[Scan]
initial_time=2015-12-22T18:45:23
final_time=2015-12-22T18:45:43
ip_count=19
run=1021
dataset=4
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.7987E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-8.0812E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.48749E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.46348E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.6073E-8
mult1=-1.66156E-8
mult2=-2.61881E-9
rf_tmon=-5.29951E-3
rf_agc=3.19036E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.27518E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=2.79529E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=2.5458E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02573E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.96072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03636E1
cs_ea2_imon=1.51947E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.91423E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.27338E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11544E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.37132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.92287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.96521E-8
tplens_vset=1.4E-1
tplens_vmon=1.59036E0
tplens_imon=-5.22853E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26224E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=9.64069E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=1.7693E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44376E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.40581E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.24172E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.10707E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.58091E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.58598E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.47797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70533E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.39699E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62579E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.93368E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62642E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62243E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41738E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21979E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34975E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.468E3	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.8002E1	-9.05991E-4	-8.80002E1	4.76837E-5	5.43594E-3	9.34601E-2	2.72859E1	-3.26627E1	-3.26518E1	2.68233E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
2.0E0	1.05765E5	8.7E1	3.16E2	1.6E2	-7.36328E-2	-8.80021E1	-6.19888E-4	-8.80005E1	9.53674E-5	5.57899E-3	9.34601E-2	2.73141E1	-3.26699E1	-3.25972E1	2.68076E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01223E-1
3.0E0	3.0E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80023E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.36442E-3	9.35555E-2	2.73175E1	-3.26561E1	-3.26178E1	2.6781E1	1.1929E-7	2.51136E-3	2.51136E-3	6.31299E-3	2.99879E-1
4.0E0	2.27E4	1.2E1	6.55E2	3.98E2	-7.27828E-2	-8.80026E1	-6.19888E-4	-8.80003E1	2.86102E-4	5.4121E-3	9.32217E-2	2.72803E1	-3.26549E1	-3.26431E1	2.6804E1	1.1929E-7	2.52923E-3	2.52923E-3	6.30202E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80025E1	-6.19888E-4	-8.80004E1	3.09944E-4	5.72205E-3	9.33886E-2	2.73057E1	-3.2641E1	-3.2587E1	2.6803E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80023E1	-2.6226E-4	-8.80002E1	2.38419E-4	5.67436E-3	9.32455E-2	2.73045E1	-3.26699E1	-3.26248E1	2.68262E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80025E1	-3.8147E-4	-8.8E1	2.86102E-4	5.81741E-3	9.30786E-2	2.72973E1	-3.2653E1	-3.26278E1	2.68088E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80027E1	-2.38419E-4	-8.8E1	1.43051E-4	5.38826E-3	9.29117E-2	2.72833E1	-3.26484E1	-3.26142E1	2.68117E1	1.1929E-7	2.51693E-3	2.51693E-3	6.26844E-3	3.03887E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80026E1	-4.76837E-4	-8.79999E1	1.43051E-4	5.48363E-3	9.33886E-2	2.72865E1	-3.26801E1	-3.2617E1	2.68196E1	1.1929E-7	2.52025E-3	2.52025E-3	6.2863E-3	3.01356E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80024E1	-5.00679E-4	-8.80002E1	2.14577E-4	5.50747E-3	9.32217E-2	2.73051E1	-3.27054E1	-3.26086E1	2.68041E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
1.4E1	3.401E3	5.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80026E1	-6.91414E-4	-8.80006E1	3.33786E-4	5.48363E-3	9.32217E-2	2.73437E1	-3.26866E1	-3.26003E1	2.67872E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80023E1	-5.00679E-4	-8.80001E1	2.38419E-5	5.36442E-3	9.31978E-2	2.73309E1	-3.26765E1	-3.2614E1	2.68418E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03185E-1
1.6E1	5.67E2	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80019E1	-4.29153E-4	-8.79999E1	2.38419E-5	5.84126E-3	9.30071E-2	2.72903E1	-3.2662E1	-3.26343E1	2.68358E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02659E-1
1.7E1	1.294E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.8002E1	-2.38419E-4	-8.79998E1	-4.76837E-5	5.14984E-3	9.29832E-2	2.72998E1	-3.26815E1	-3.26484E1	2.67824E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.8E1	5.407E3	3.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80019E1	-3.09944E-4	-8.8E1	3.09944E-4	5.38826E-3	9.31263E-2	2.72853E1	-3.27203E1	-3.25791E1	2.68004E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
1.9E1	2.36E3	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80019E1	-2.14577E-4	-8.8E1	2.86102E-4	5.26905E-3	9.31025E-2	2.73255E1	-3.26915E1	-3.26284E1	2.68172E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.02133E-1
2.0E1	2.4861E4	1.4E1	8.08E2	5.58E2	-7.35556E-2	-8.80022E1	-6.91414E-4	-8.80001E1	2.86102E-4	4.93526E-3	9.34601E-2	2.73135E1	-3.26579E1	-3.26446E1	2.68169E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.8002E1	-9.53674E-5	-8.79999E1	-1.19209E-4	5.38826E-3	9.36031E-2	2.7308E1	-3.2659E1	-3.2626E1	2.68124E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
2.2E1	1.781E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80019E1	-4.05312E-4	-8.79995E1	-7.15256E-5	4.95911E-3	9.31978E-2	2.73181E1	-3.2626E1	-3.26219E1	2.68136E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80025E1	-4.29153E-4	-8.79997E1	9.53674E-5	5.03063E-3	9.3174E-2	2.72787E1	-3.26224E1	-3.2644E1	2.68154E1	1.1929E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.9943E-1