[Scan]
initial_time=2015-12-22T18:45:50
final_time=2015-12-22T18:46:10
ip_count=19
run=1021
dataset=4
scan=149
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.82243E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.89773E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.50361E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.38434E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.60181E-8
mult1=-1.79755E-8
mult2=-2.71542E-9
rf_tmon=-4.10244E-3
rf_agc=3.36866E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=5.98907E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.3761E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20076E1
lens5a_imon=1.99098E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53821E1
cs_ef1b_imon=2.77532E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02005E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=2.51966E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98817E0
lens1_imon=1.48814E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64379E1
os_ef1alow_imon=2.97195E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03759E1
cs_ea2_imon=1.53983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.9082E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.2692E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.31445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.38305E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63915E1
os_ef1bup_imon=3.0706E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27088E0
cs_ionrep_imon=1.18636E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=2.93638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.95882E-8
tplens_vset=1.4E-1
tplens_vmon=1.56971E0
tplens_imon=-5.26837E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.49031E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26384E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=1.02668E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24641E0
ionrepsh_imon=1.73279E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.1836E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.1055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4331E0
os_ea2_imon=-5.6099E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00595E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71381E1
cs_ef2a_imon=3.17932E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0389E0
os_ef2alow_imon=-2.69046E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04321E-1
os_ef2bup_imon=-5.41171E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10956E1
os_restr2_imon=3.41352E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29894E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.09415E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.08621E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.57146E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.51634E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14971E0
cs_ionaccel_imon=-1.82141E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47394E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56472E1
einzel_imon=7.42612E-6
window_vset=0.0E0
window_vmon=1.50338E-1
window_imon=-1.02282E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86238E1
mask2_imon=-6.36949E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.49827E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.1779E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45016E0
defgridb_imon=6.27628E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.39831E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06647E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62906E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.95106E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62746E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18571E-2
os_fil2_imon=-2.6554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81848E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.33367E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35317E-1
cs_fil2_imon=-2.20242E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.61528E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21937E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.64822E-1
res40_imon=-2.56631E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.347E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80023E1	-8.34465E-4	-8.79999E1	-4.76837E-5	5.34058E-3	9.31025E-2	2.73039E1	-3.26809E1	-3.26067E1	2.68144E1	1.2021E-7	2.51752E-3	2.51752E-3	6.31761E-3	3.02342E-1
2.0E0	1.04943E5	9.9E1	3.16E2	1.6E2	-7.08504E-2	-8.80022E1	-8.10623E-4	-8.79996E1	-2.14577E-4	5.36442E-3	9.30786E-2	2.73173E1	-3.26731E1	-3.26395E1	2.68278E1	1.19895E-7	2.50834E-3	2.50834E-3	6.33648E-3	3.00639E-1
3.0E0	1.6E1	2.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80022E1	-5.00679E-4	-8.80002E1	-1.43051E-4	5.22137E-3	9.3174E-2	2.73157E1	-3.26502E1	-3.26296E1	2.68395E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9926E-1
4.0E0	2.2624E4	6.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80021E1	-3.09944E-4	-8.80003E1	-9.53674E-5	5.36442E-3	9.30071E-2	2.72837E1	-3.27085E1	-3.26106E1	2.67893E1	1.19342E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80019E1	-4.76837E-4	-8.80002E1	0.0E0	5.17368E-3	9.29594E-2	2.7296E1	-3.2639E1	-3.26331E1	2.6792E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31727E-3	3.01373E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80021E1	-2.14577E-4	-8.80001E1	1.90735E-4	5.26905E-3	9.32217E-2	2.73193E1	-3.26858E1	-3.26243E1	2.68053E1	1.19682E-7	2.51321E-3	2.51321E-3	6.28377E-3	3.03596E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8002E1	-2.14577E-4	-8.80001E1	3.33786E-4	5.26905E-3	9.29832E-2	2.73242E1	-3.26769E1	-3.26597E1	2.68203E1	1.19891E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	-3.8147E-4	-8.8E1	-9.53674E-5	5.19753E-3	9.32932E-2	2.73104E1	-3.26596E1	-3.2593E1	2.67899E1	1.19613E-7	2.51611E-3	2.51611E-3	6.34164E-3	3.03246E-1
1.2E1	1.08E2	1.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80017E1	-8.34465E-4	-8.79998E1	1.43051E-4	5.29289E-3	9.31263E-2	2.72871E1	-3.265E1	-3.26248E1	2.68238E1	1.19497E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80021E1	-9.77516E-4	-8.80001E1	2.38419E-4	5.29289E-3	9.29117E-2	2.73363E1	-3.27215E1	-3.2641E1	2.6786E1	1.19601E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.4E1	3.288E3	3.0E0	5.66E2	3.82E2	-7.26282E-2	-8.8002E1	-7.39098E-4	-8.80002E1	2.38419E-4	5.19753E-3	9.32455E-2	2.73093E1	-3.26416E1	-3.2653E1	2.68052E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.99E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80021E1	-8.10623E-4	-8.79997E1	2.38419E-4	4.76837E-3	9.30309E-2	2.72919E1	-3.26939E1	-3.26122E1	2.68232E1	1.1929E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9874E-1
1.6E1	5.19E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80024E1	-6.91414E-4	-8.79999E1	3.33786E-4	4.93526E-3	9.32455E-2	2.73099E1	-3.26146E1	-3.25996E1	2.6804E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0071E-1
1.7E1	1.258E3	2.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80024E1	-5.96046E-4	-8.79997E1	2.14577E-4	5.29289E-3	9.30309E-2	2.72709E1	-3.26506E1	-3.25846E1	2.68058E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
1.8E1	5.455E3	2.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80021E1	-7.39098E-4	-8.79999E1	9.53674E-5	4.86374E-3	9.31978E-2	2.73275E1	-3.26773E1	-3.26095E1	2.68022E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02659E-1
1.9E1	2.241E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.8002E1	-6.4373E-4	-8.80001E1	7.15256E-5	4.93526E-3	9.33647E-2	2.72865E1	-3.26633E1	-3.2602E1	2.68035E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01995E-1
2.0E1	2.4846E4	1.2E1	8.08E2	5.58E2	-7.201E-2	-8.80024E1	-4.76837E-4	-8.80002E1	-9.53674E-5	4.88758E-3	9.32217E-2	2.73051E1	-3.26673E1	-3.26213E1	2.68212E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01871E-1
2.1E1	4.1E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80022E1	-5.24521E-4	-8.80001E1	9.53674E-5	5.26905E-3	9.35793E-2	2.72886E1	-3.26767E1	-3.26231E1	2.67962E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
2.2E1	1.843E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80022E1	-4.52995E-4	-8.80001E1	-1.43051E-4	5.00679E-3	9.3317E-2	2.72949E1	-3.26585E1	-3.26074E1	2.68099E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80022E1	-7.15256E-4	-8.79999E1	2.14577E-4	5.22137E-3	9.32217E-2	2.73198E1	-3.26384E1	-3.26301E1	2.67896E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.9892E-1