[Scan]
initial_time=2015-12-22T18:46:17
final_time=2015-12-22T18:46:37
ip_count=19
run=1021
dataset=4
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.78483E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-9.07588E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.51527E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.54805E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.60926E-8
mult1=-1.49846E-8
mult2=-2.78205E-9
rf_tmon=-3.59513E-3
rf_agc=3.42412E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.18029E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=2.78016E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.55878E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01552E0
lens1_imon=1.27602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04171E1
cs_ea2_imon=1.55913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.91963E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.26355E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=4.30932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.06415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.17051E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.90918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.95735E-8
tplens_vset=1.4E-1
tplens_vmon=1.56873E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2613E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2688E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=1.00149E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=1.7556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.76147E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41733E0
os_ea2_imon=-7.71595E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03654E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.39644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.32812E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01527E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67885E1
iondef4_imon=1.07116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.5287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.4693E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-2.03926E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56766E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.85948E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=5.87233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.42432E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62277E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30946E1
cs_fil1_imon=9.96906E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62206E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.65278E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.68678E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21926E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.60203E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.359E3	2.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80021E1	-6.91414E-4	-8.8E1	3.33786E-4	5.45979E-3	9.33647E-2	2.72709E1	-3.26492E1	-3.26295E1	2.68267E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00041E-1
2.0E0	1.03698E5	1.12E2	3.16E2	1.6E2	-7.33239E-2	-8.80023E1	-3.8147E-4	-8.79998E1	1.66893E-4	4.95911E-3	9.32217E-2	2.72886E1	-3.26505E1	-3.26266E1	2.6819E1	1.1929E-7	2.52405E-3	2.52405E-3	6.31779E-3	3.0E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80023E1	-3.8147E-4	-8.79997E1	-4.76837E-5	5.17368E-3	9.32932E-2	2.73334E1	-3.26956E1	-3.2616E1	2.68046E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00144E-1
4.0E0	2.2364E4	1.4E1	6.55E2	3.98E2	-7.38649E-2	-8.80026E1	-4.76837E-4	-8.79999E1	9.53674E-5	5.31673E-3	9.32932E-2	2.73109E1	-3.26753E1	-3.26318E1	2.6818E1	1.1929E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80023E1	-4.76837E-4	-8.79999E1	4.52995E-4	5.43594E-3	9.33409E-2	2.72973E1	-3.26452E1	-3.26416E1	2.68076E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80023E1	-5.96046E-4	-8.79998E1	5.96046E-4	5.50747E-3	9.35555E-2	2.73027E1	-3.26838E1	-3.25871E1	2.68041E1	1.1929E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80022E1	-4.76837E-4	-8.79997E1	3.09944E-4	5.34058E-3	9.33647E-2	2.73177E1	-3.26536E1	-3.26314E1	2.68148E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.8002E1	-3.8147E-4	-8.79999E1	6.4373E-4	5.26905E-3	9.30309E-2	2.72715E1	-3.2635E1	-3.2599E1	2.68184E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80024E1	-7.86781E-4	-8.79999E1	6.4373E-4	5.62668E-3	9.3174E-2	2.72841E1	-3.26765E1	-3.25942E1	2.68184E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03712E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80023E1	-5.96046E-4	-8.79999E1	4.52995E-4	5.24521E-3	9.30071E-2	2.72733E1	-3.26512E1	-3.26597E1	2.68064E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00563E-1
1.4E1	3.353E3	3.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80021E1	-3.57628E-4	-8.79997E1	3.8147E-4	5.29289E-3	9.31978E-2	2.73128E1	-3.26107E1	-3.26644E1	2.6783E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80019E1	-6.91414E-4	-8.79999E1	3.57628E-4	5.43594E-3	9.31263E-2	2.72889E1	-3.26374E1	-3.26639E1	2.68148E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01347E-1
1.6E1	4.99E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80023E1	-7.62939E-4	-8.8E1	7.15256E-5	5.55515E-3	9.31501E-2	2.73004E1	-3.26502E1	-3.26325E1	2.68052E1	1.1929E-7	2.50571E-3	2.50571E-3	6.32386E-3	3.03185E-1
1.7E1	1.329E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80021E1	-3.33786E-4	-8.79998E1	7.15256E-5	5.26905E-3	9.32217E-2	2.72904E1	-3.26536E1	-3.26076E1	2.68172E1	1.1929E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.03545E-1
1.8E1	5.271E3	2.0E0	7.27E2	5.0E2	-7.41738E-2	-8.80023E1	-2.86102E-4	-8.8E1	1.43051E-4	5.36442E-3	9.35316E-2	2.73016E1	-3.26697E1	-3.26425E1	2.68094E1	1.19342E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.02922E-1
1.9E1	2.299E3	1.0E0	7.68E2	5.29E2	-7.43285E-2	-8.80024E1	-4.29153E-4	-8.80002E1	3.33786E-4	5.34058E-3	9.3174E-2	2.72895E1	-3.2623E1	-3.26494E1	2.68154E1	1.1929E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.01871E-1
2.0E1	2.4305E4	1.5E1	8.08E2	5.58E2	-7.46377E-2	-8.80022E1	-4.29153E-4	-8.8E1	5.96046E-4	5.00679E-3	9.3174E-2	2.72957E1	-3.26638E1	-3.26024E1	2.67723E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.9943E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.47923E-2	-8.80025E1	-1.66893E-4	-8.80001E1	3.8147E-4	5.43594E-3	9.31025E-2	2.73057E1	-3.26705E1	-3.26404E1	2.68232E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
2.2E1	1.7E3	1.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80023E1	-5.24521E-4	-8.79999E1	4.05312E-4	5.10216E-3	9.32932E-2	2.73147E1	-3.26428E1	-3.26074E1	2.68052E1	1.1929E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.01085E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80026E1	-1.90735E-4	-8.8E1	3.57628E-4	5.19753E-3	9.30309E-2	2.73045E1	-3.2688E1	-3.2613E1	2.67885E1	1.1929E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.01609E-1