[Scan]
initial_time=2015-12-22T18:46:44
final_time=2015-12-22T18:47:04
ip_count=19
run=1021
dataset=4
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81273E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-8.00049E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.50516E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.53365E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.61609E-8
mult1=-1.88739E-8
mult2=-2.81733E-9
rf_tmon=-3.87828E-3
rf_agc=3.39167E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=6.00398E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.96209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54015E1
cs_ef1b_imon=2.76254E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=2.56414E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99408E0
lens1_imon=1.3257E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.54798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84452E1
cs_ef1a_imon=2.9085E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.20818E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.29165E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15577E1
os_ea1_imon=2.40452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.07566E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93271E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=2.8866E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.92415E-8
tplens_vset=1.4E-1
tplens_vmon=1.5907E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26095E1
iondef3_imon=1.48108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=1.03129E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=1.72389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.16419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44736E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00258E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.76572E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94914E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.37905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.23187E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72957E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.07634E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.42996E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.24725E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14926E0
cs_ionaccel_imon=-1.7301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=1.44706E-1
window_imon=-1.22618E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86008E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41134E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06883E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61082E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=9.95064E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63049E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.59912E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.66339E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-1.93359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67057E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2158E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.1481E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.418E3	4.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80026E1	-3.09944E-4	-8.79996E1	2.38419E-5	5.31673E-3	9.31263E-2	2.72968E1	-3.26756E1	-3.26242E1	2.68004E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
2.0E0	1.01485E5	8.7E1	3.16E2	1.6E2	-7.32464E-2	-8.80025E1	-2.86102E-4	-8.79995E1	4.52995E-4	5.50747E-3	9.30786E-2	2.73131E1	-3.26248E1	-3.2593E1	2.67884E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9978E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80028E1	-6.19888E-4	-8.79999E1	4.29153E-4	5.4121E-3	9.31501E-2	2.72809E1	-3.26354E1	-3.26685E1	2.681E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
4.0E0	2.1831E4	1.6E1	6.55E2	3.98E2	-7.31692E-2	-8.80024E1	-7.15256E-4	-8.79998E1	-7.15256E-5	5.48363E-3	9.30786E-2	2.73033E1	-3.26667E1	-3.26207E1	2.67845E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80023E1	-7.62939E-4	-8.79999E1	-4.76837E-5	5.43594E-3	9.30071E-2	2.73177E1	-3.26621E1	-3.25972E1	2.6807E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80024E1	-4.76837E-4	-8.79998E1	2.14577E-4	5.4121E-3	9.30309E-2	2.72979E1	-3.26669E1	-3.26188E1	2.68004E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80024E1	-3.8147E-4	-8.8E1	1.43051E-4	5.48363E-3	9.3174E-2	2.72769E1	-3.26554E1	-3.26068E1	2.68094E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80025E1	-2.86102E-4	-8.80002E1	1.90735E-4	5.55515E-3	9.32217E-2	2.72927E1	-3.2672E1	-3.26272E1	2.68004E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1
1.2E1	1.12E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80022E1	-2.38419E-4	-8.80001E1	1.19209E-4	5.36442E-3	9.27448E-2	2.73261E1	-3.26591E1	-3.26218E1	2.6804E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80022E1	-4.29153E-4	-8.80001E1	1.66893E-4	5.67436E-3	9.30309E-2	2.72877E1	-3.26164E1	-3.26518E1	2.6829E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.4E1	3.225E3	2.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80021E1	-5.24521E-4	-8.80002E1	2.38419E-5	5.55515E-3	9.28164E-2	2.73093E1	-3.26591E1	-3.26098E1	2.6807E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80022E1	-3.57628E-4	-8.8E1	-1.19209E-4	5.50747E-3	9.27448E-2	2.72997E1	-3.26374E1	-3.26092E1	2.67849E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.6E1	5.49E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80025E1	-4.29153E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.31025E-2	2.72703E1	-3.26349E1	-3.26514E1	2.68204E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.7E1	1.289E3	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80024E1	-6.19888E-4	-8.80001E1	1.90735E-4	5.74589E-3	9.31501E-2	2.72901E1	-3.27185E1	-3.26266E1	2.68815E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
1.8E1	5.225E3	2.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80024E1	-5.48363E-4	-8.79999E1	1.43051E-4	5.6982E-3	9.29832E-2	2.72671E1	-3.26842E1	-3.2607E1	2.68162E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
1.9E1	2.331E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80024E1	-4.05312E-4	-8.80001E1	1.19209E-4	5.53131E-3	9.29117E-2	2.73291E1	-3.26518E1	-3.26452E1	2.68023E1	1.1929E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99613E-1
2.0E1	2.4194E4	1.6E1	8.08E2	5.58E2	-7.29374E-2	-8.80026E1	-5.00679E-4	-8.80004E1	2.38419E-5	5.36442E-3	9.30786E-2	2.73045E1	-3.26213E1	-3.26331E1	2.68208E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97704E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80024E1	-3.33786E-4	-8.80001E1	-9.53674E-5	5.88894E-3	9.31501E-2	2.73177E1	-3.26536E1	-3.26122E1	2.68004E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.95129E-1
2.2E1	1.732E3	1.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80024E1	-3.8147E-4	-8.80001E1	4.76837E-5	5.76973E-3	9.32217E-2	2.73346E1	-3.26561E1	-3.25965E1	2.67989E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.97901E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80024E1	-5.00679E-4	-8.80002E1	7.15256E-5	5.6982E-3	9.31263E-2	2.72957E1	-3.26443E1	-3.26095E1	2.6801E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00453E-1