[Scan]
initial_time=2015-12-22T18:48:05
final_time=2015-12-22T18:48:25
ip_count=19
run=1021
dataset=4
scan=154
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.80026E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.00121E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.45403E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.42883E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.61016E-8
mult1=-1.85902E-8
mult2=-3.1358E-9
rf_tmon=-2.16522E-4
rf_agc=3.78758E-2
counter1=1
counter2=2
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=6.32513E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.79313E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02031E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.55842E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02513E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.54904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=2.92396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=1.24546E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.37709E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.1716E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.90341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.95663E-8
tplens_vset=1.4E-1
tplens_vmon=1.58015E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.48162E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27029E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.65452E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=1.73469E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33453E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.11208E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42814E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02453E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.38851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.22983E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.55818E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.37889E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.17733E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=6.92498E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.29051E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.40402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06861E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30719E1
cs_fil1_imon=9.93482E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62654E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61188E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.12761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37378E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.469E3	4.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80024E1	-6.67572E-4	-8.80002E1	2.38419E-5	5.57899E-3	9.32455E-2	2.72721E1	-3.26954E1	-3.26118E1	2.68412E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
2.0E0	1.03323E5	1.08E2	3.16E2	1.6E2	-7.40192E-2	-8.80024E1	-3.09944E-4	-8.79999E1	1.90735E-4	5.53131E-3	9.32932E-2	2.73312E1	-3.26464E1	-3.26521E1	2.68157E1	1.1929E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.03129E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80023E1	-5.96046E-4	-8.80001E1	1.90735E-4	5.57899E-3	9.31501E-2	2.73417E1	-3.26408E1	-3.2659E1	2.67962E1	1.1929E-7	2.50818E-3	2.50818E-3	6.31879E-3	3.03246E-1
4.0E0	2.2734E4	9.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80022E1	-7.15256E-4	-8.8E1	2.14577E-4	5.55515E-3	9.30309E-2	2.73051E1	-3.26382E1	-3.26324E1	2.67937E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80021E1	-6.4373E-4	-8.79998E1	0.0E0	5.38826E-3	9.29117E-2	2.73147E1	-3.27149E1	-3.25888E1	2.68148E1	1.1929E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80021E1	-4.29153E-4	-8.8E1	1.19209E-4	5.26905E-3	9.3174E-2	2.73392E1	-3.26691E1	-3.2631E1	2.68099E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80023E1	-5.96046E-4	-8.79999E1	3.33786E-4	5.62668E-3	9.29832E-2	2.73452E1	-3.26438E1	-3.26228E1	2.68101E1	1.1929E-7	2.52058E-3	2.52058E-3	6.3023E-3	3.00392E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80026E1	-5.72205E-4	-8.80003E1	3.8147E-4	5.53131E-3	9.31025E-2	2.72733E1	-3.26218E1	-3.26248E1	2.68221E1	1.1929E-7	2.52338E-3	2.52338E-3	6.3074E-3	2.98985E-1
1.2E1	1.19E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80025E1	-5.24521E-4	-8.80001E1	2.38419E-4	5.31673E-3	9.30309E-2	2.73057E1	-3.26795E1	-3.26128E1	2.681E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80023E1	-2.86102E-4	-8.80001E1	3.09944E-4	5.53131E-3	9.28879E-2	2.72799E1	-3.26392E1	-3.26603E1	2.68184E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
1.4E1	3.329E3	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80023E1	-6.19888E-4	-8.79998E1	0.0E0	5.8651E-3	9.33409E-2	2.72997E1	-3.26639E1	-3.26254E1	2.67812E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02659E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80022E1	-6.4373E-4	-8.79997E1	1.19209E-4	5.55515E-3	9.30548E-2	2.73057E1	-3.26753E1	-3.26524E1	2.67842E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01871E-1
1.6E1	5.26E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80024E1	-4.52995E-4	-8.79999E1	9.53674E-5	5.53131E-3	9.31025E-2	2.73163E1	-3.26809E1	-3.26561E1	2.68142E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
1.7E1	1.305E3	2.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80028E1	-5.00679E-4	-8.80001E1	9.53674E-5	5.55515E-3	9.30309E-2	2.72612E1	-3.26747E1	-3.26254E1	2.68166E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
1.8E1	5.467E3	5.0E0	7.27E2	5.0E2	-7.286E-2	-8.80031E1	-5.24521E-4	-8.8E1	2.14577E-4	5.43594E-3	9.3317E-2	2.72971E1	-3.26823E1	-3.26413E1	2.67866E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.9E1	2.373E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80024E1	-4.29153E-4	-8.79998E1	1.66893E-4	5.126E-3	9.30786E-2	2.73556E1	-3.26699E1	-3.26092E1	2.6807E1	1.1929E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.0041E-1
2.0E1	2.5027E4	1.0E1	8.08E2	5.58E2	-7.33239E-2	-8.80024E1	-5.96046E-4	-8.80001E1	1.66893E-4	5.31673E-3	9.3174E-2	2.73157E1	-3.2649E1	-3.26278E1	2.68418E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80023E1	-3.57628E-4	-8.79999E1	3.09944E-4	5.36442E-3	9.33409E-2	2.7308E1	-3.2688E1	-3.26313E1	2.68256E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01223E-1
2.2E1	1.779E3	1.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80024E1	-4.76837E-4	-8.8E1	2.14577E-4	5.10216E-3	9.35078E-2	2.72853E1	-3.26482E1	-3.26182E1	2.6825E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0148E-1
2.3E1	1.0E0	2.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80021E1	-5.48363E-4	-8.79998E1	2.86102E-4	5.36442E-3	9.3317E-2	2.73297E1	-3.27029E1	-3.26212E1	2.68244E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1