[Scan]
initial_time=2015-12-22T18:48:59
final_time=2015-12-22T18:49:19
ip_count=19
run=1021
dataset=4
scan=156
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.74398E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.80427E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.52978E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.45848E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.61363E-8
mult1=-2.83672E-8
mult2=-3.30347E-9
rf_tmon=1.47781E-3
rf_agc=4.3848E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=6.38282E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.73602E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.95459E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=2.79421E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.01836E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.54364E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01913E0
lens1_imon=1.30486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.5375E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.92035E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.26745E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.37817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27553E0
cs_ionrep_imon=1.18638E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01515E1
cs_anode1_imon=2.91999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.95075E-8
tplens_vset=1.4E-1
tplens_vmon=1.56152E0
tplens_imon=-4.65174E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26813E1
iondef3_imon=1.4791E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27804E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=9.89032E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=1.75488E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.10956E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45518E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71456E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.40256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73574E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.60678E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=7.50815E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47082E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=1.47065E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.85882E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.87669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.89614E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.73752E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22713E0
defgridb_imon=5.82547E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.39879E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0775E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62225E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30755E1
cs_fil1_imon=9.93843E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62162E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62004E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6154E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.87497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29982E-3
inlet_lpb_pmon=3.00342E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51838E-3
foreline_cvt_pmon=2.51838E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.38869E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.548E3	3.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80025E1	-6.91414E-4	-8.79999E1	9.53674E-5	5.60284E-3	9.34124E-2	2.73022E1	-3.26608E1	-3.26092E1	2.68007E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
2.0E0	1.04934E5	1.05E2	3.16E2	1.6E2	-7.29374E-2	-8.80025E1	-5.48363E-4	-8.79998E1	2.38419E-4	5.43594E-3	9.29832E-2	2.73406E1	-3.26731E1	-3.26236E1	2.67976E1	1.1929E-7	2.52131E-3	2.52131E-3	6.28103E-3	3.02621E-1
3.0E0	1.0E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80024E1	-5.24521E-4	-8.79997E1	1.43051E-4	5.36442E-3	9.35316E-2	2.72994E1	-3.26539E1	-3.26482E1	2.67886E1	1.1929E-7	2.51693E-3	2.51693E-3	6.35786E-3	3.03081E-1
4.0E0	2.2614E4	1.1E1	6.55E2	3.98E2	-7.30918E-2	-8.80023E1	-1.12057E-3	-8.80001E1	2.38419E-4	5.43594E-3	9.31263E-2	2.72871E1	-3.26951E1	-3.265E1	2.68268E1	1.1929E-7	2.51265E-3	2.51265E-3	6.29703E-3	3.01733E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80022E1	-1.00136E-3	-8.80001E1	2.14577E-4	5.38826E-3	9.33409E-2	2.72945E1	-3.26785E1	-3.26408E1	2.68018E1	1.1929E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80022E1	-8.34465E-4	-8.80002E1	5.24521E-4	5.38826E-3	9.33886E-2	2.73104E1	-3.26602E1	-3.25965E1	2.68022E1	1.1929E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80025E1	-8.58307E-4	-8.79999E1	4.29153E-4	5.45979E-3	9.31025E-2	2.73027E1	-3.26609E1	-3.26254E1	2.68007E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80024E1	-5.48363E-4	-8.8E1	2.86102E-4	5.43594E-3	9.30309E-2	2.73063E1	-3.26573E1	-3.26212E1	2.68238E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02133E-1
1.2E1	1.11E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80023E1	-4.05312E-4	-8.80002E1	3.09944E-4	5.60284E-3	9.30309E-2	2.72847E1	-3.26597E1	-3.26188E1	2.67926E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80022E1	-7.39098E-4	-8.80004E1	2.38419E-4	5.48363E-3	9.3174E-2	2.72919E1	-3.26386E1	-3.2644E1	2.67972E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.97963E-1
1.4E1	3.395E3	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80024E1	-6.67572E-4	-8.80001E1	4.76837E-5	5.50747E-3	9.32932E-2	2.72997E1	-3.2647E1	-3.2602E1	2.6816E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9926E-1
1.5E1	1.22E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80021E1	-4.76837E-4	-8.79998E1	1.19209E-4	5.6982E-3	9.30548E-2	2.73305E1	-3.26319E1	-3.26136E1	2.67866E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00041E-1
1.6E1	5.75E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80024E1	-8.82149E-4	-8.80001E1	1.43051E-4	5.76973E-3	9.32217E-2	2.73411E1	-3.26741E1	-3.26182E1	2.67992E1	1.1929E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.00453E-1
1.7E1	1.291E3	1.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80022E1	-9.29832E-4	-8.80001E1	7.15256E-5	5.50747E-3	9.31025E-2	2.72913E1	-3.26879E1	-3.26422E1	2.68316E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
1.8E1	5.385E3	5.0E0	7.27E2	5.0E2	-7.33239E-2	-8.8002E1	-5.00679E-4	-8.80001E1	3.8147E-4	5.53131E-3	9.33647E-2	2.72961E1	-3.26518E1	-3.26573E1	2.68184E1	1.1929E-7	2.51007E-3	2.51007E-3	6.29645E-3	3.00041E-1
1.9E1	2.439E3	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80019E1	-5.72205E-4	-8.80002E1	3.57628E-4	5.53131E-3	9.31263E-2	2.73057E1	-3.26609E1	-3.26549E1	2.68442E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
2.0E1	2.4942E4	1.2E1	8.08E2	5.58E2	-7.39421E-2	-8.80022E1	-5.24521E-4	-8.8E1	4.52995E-4	5.55515E-3	9.29356E-2	2.73013E1	-3.26505E1	-3.261E1	2.68316E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80026E1	-7.39098E-4	-8.80001E1	1.90735E-4	5.6982E-3	9.33409E-2	2.73012E1	-3.26691E1	-3.26238E1	2.67989E1	1.1929E-7	2.51647E-3	2.51647E-3	6.32458E-3	3.00892E-1
2.2E1	1.76E3	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80025E1	-6.4373E-4	-8.80001E1	2.86102E-4	5.31673E-3	9.30071E-2	2.72943E1	-3.26776E1	-3.26318E1	2.68323E1	1.1929E-7	2.51854E-3	2.51854E-3	6.28194E-3	2.99906E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80022E1	-6.91414E-4	-8.79999E1	1.90735E-4	5.62668E-3	9.31025E-2	2.73574E1	-3.27804E1	-3.26813E1	2.67998E1	1.1929E-7	2.51838E-3	2.51838E-3	6.29982E-3	3.00342E-1