[Scan]
initial_time=2015-12-22T18:49:53
final_time=2015-12-22T18:50:12
ip_count=19
run=1021
dataset=4
scan=158
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.84374E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-8.06344E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.47952E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.45157E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.60438E-8
mult1=-1.79641E-8
mult2=-1.92217E-9
rf_tmon=-9.41516E-3
rf_agc=2.97226E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.87404E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65443E0
bslens_imon=2.58346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19762E1
lens5a_imon=1.97473E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5378E1
cs_ef1b_imon=2.78229E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0508E1
cs_ea1_imon=2.54477E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99554E0
lens1_imon=1.34934E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64496E1
os_ef1alow_imon=2.97466E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04137E1
cs_ea2_imon=1.56482E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84282E1
cs_ef1a_imon=2.90842E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.27589E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11585E1
os_restr1_imon=4.31488E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15183E1
os_ea1_imon=2.36663E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63535E1
os_ef1bup_imon=3.06897E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26312E0
cs_ionrep_imon=1.21332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93269E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01946E1
cs_anode1_imon=2.94771E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.97913E-8
tplens_vset=1.4E-1
tplens_vmon=1.61205E0
tplens_imon=-3.14514E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26819E1
iondef3_imon=1.4719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25611E1
iondef2_imon=1.56996E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98302E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=9.98414E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24414E0
ionrepsh_imon=1.77455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3405E1
lens5b_imon=2.15433E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74794E1
cs_ef2b_imon=3.11426E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41677E0
os_ea2_imon=-5.45911E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71058E1
cs_ef2a_imon=3.18761E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06329E0
os_ef2alow_imon=-2.80261E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79543E-1
os_ef2bup_imon=-5.31014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11067E1
os_restr2_imon=3.40655E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29598E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.26357E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72228E1
iondef1_imon=1.08807E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.07717E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=5.61234E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.55117E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11704E0
cs_ionaccel_imon=-1.78089E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47095E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5638E1
einzel_imon=7.6317E-6
window_vset=0.0E0
window_vmon=1.49607E-1
window_imon=-1.2195E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39219E-4
mask2_vset=0.0E0
mask2_vmon=-1.86144E1
mask2_imon=-8.04075E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=6.74861E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=5.97361E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.27752E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.17066E0
defgridb_imon=6.19032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.42171E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06974E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3072E1
cs_fil1_imon=9.96001E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62253E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62569E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37084E-2
os_fil2_imon=-2.83716E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70384E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.57216E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32744E-1
cs_fil2_imon=-2.58141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.12057E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21681E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7685E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=134
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.493E3	1.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80028E1	-6.67572E-4	-8.79994E1	1.43051E-4	5.57899E-3	9.34601E-2	2.73165E1	-3.26385E1	-3.26471E1	2.68037E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01475E-1
2.0E0	1.05399E5	8.7E1	3.16E2	1.6E2	-7.19325E-2	-8.80026E1	-5.72205E-4	-8.79993E1	2.6226E-4	5.76973E-3	9.32455E-2	2.73008E1	-3.26952E1	-3.25789E1	2.67988E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33706E-3	2.99813E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80025E1	-1.00136E-3	-8.79999E1	2.38419E-4	5.91278E-3	9.28402E-2	2.72839E1	-3.2695E1	-3.26325E1	2.67908E1					
4.0E0	2.2981E4	1.2E1	6.55E2	3.98E2	-7.32464E-2	-8.80027E1	-8.10623E-4	-8.80001E1	4.76837E-5	5.34058E-3	9.30548E-2	2.73439E1	-3.26671E1	-3.26144E1	2.68053E1	1.1929E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80027E1	-6.91414E-4	-8.79999E1	9.53674E-5	5.74589E-3	9.31025E-2	2.73027E1	-3.26464E1	-3.26344E1	2.68136E1	1.1929E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.99594E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80024E1	-7.62939E-4	-8.79999E1	1.90735E-4	5.74589E-3	9.32217E-2	2.73493E1	-3.26443E1	-3.26797E1	2.6822E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80024E1	-6.19888E-4	-8.8E1	2.14577E-4	5.8651E-3	9.31025E-2	2.73022E1	-3.26683E1	-3.26133E1	2.67827E1	1.1929E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80021E1	-9.29832E-4	-8.79997E1	1.19209E-4	5.65052E-3	9.32455E-2	2.72957E1	-3.26578E1	-3.26135E1	2.68076E1	1.1929E-7	2.51679E-3	2.51679E-3	6.30221E-3	3.00741E-1
1.2E1	9.1E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80022E1	-5.24521E-4	-8.79997E1	1.43051E-4	5.24521E-3	9.31501E-2	2.73045E1	-3.26452E1	-3.26014E1	2.68046E1	1.1929E-7	2.51527E-3	2.51527E-3	6.35399E-3	3.01193E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80023E1	-6.91414E-4	-8.8E1	0.0E0	5.6982E-3	9.28164E-2	2.73207E1	-3.26464E1	-3.26681E1	2.68112E1	1.1929E-7	2.5188E-3	2.5188E-3	6.25827E-3	2.99E-1
1.4E1	3.47E3	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80027E1	-1.04904E-3	-8.79998E1	4.76837E-5	5.88894E-3	9.29356E-2	2.73189E1	-3.26729E1	-3.26488E1	2.67794E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.03976E-1
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80024E1	-1.35899E-3	-8.8E1	7.15256E-5	5.55515E-3	9.33409E-2	2.72709E1	-3.26416E1	-3.26897E1	2.67818E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.6E1	5.6E2	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80024E1	-1.38283E-3	-8.80001E1	2.38419E-5	5.55515E-3	9.32455E-2	2.73252E1	-3.26909E1	-3.25818E1	2.68142E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
1.7E1	1.306E3	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80023E1	-1.04904E-3	-8.80002E1	-4.76837E-5	5.6982E-3	9.32455E-2	2.73014E1	-3.26499E1	-3.26303E1	2.68244E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.98156E-1
1.8E1	5.368E3	4.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80023E1	-9.77516E-4	-8.8E1	9.53674E-5	5.43594E-3	9.33886E-2	2.72697E1	-3.26585E1	-3.26119E1	2.68256E1	1.1929E-7	2.51225E-3	2.51225E-3	6.35692E-3	2.9874E-1
1.9E1	2.478E3	2.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80025E1	-7.39098E-4	-8.79999E1	9.53674E-5	5.55515E-3	9.29117E-2	2.73309E1	-3.26603E1	-3.25936E1	2.68105E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00824E-1
2.0E1	2.5299E4	1.3E1	8.08E2	5.58E2	-7.27828E-2	-8.80025E1	-6.19888E-4	-8.79998E1	2.38419E-4	5.74589E-3	9.29356E-2	2.73122E1	-3.26608E1	-3.26408E1	2.68713E1	1.1929E-7	2.52169E-3	2.52169E-3	6.28592E-3	2.99686E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80025E1	-5.48363E-4	-8.79998E1	2.14577E-4	5.55515E-3	9.28879E-2	2.73045E1	-3.26396E1	-3.26343E1	2.67908E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
2.2E1	1.768E3	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80022E1	-7.39098E-4	-8.80001E1	1.43051E-4	5.65052E-3	9.34362E-2	2.72907E1	-3.26729E1	-3.26579E1	2.68076E1	1.1929E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.02621E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80023E1	-8.10623E-4	-8.79999E1	1.43051E-4	5.6982E-3	9.32455E-2	2.72228E1	-3.25611E1	-3.26819E1	2.68064E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.03185E-1