[Scan]
initial_time=2015-12-22T18:50:19
final_time=2015-12-22T18:50:39
ip_count=19
run=1021
dataset=4
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.77594E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.98297E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=1.45606E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.34965E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.5946E-8
mult1=-1.97724E-8
mult2=-2.05888E-9
rf_tmon=-6.1435E-3
rf_agc=3.28962E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.01518E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.72161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=2.83239E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.49317E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93441E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64678E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.54219E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=2.92344E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.32858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.36844E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.08504E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.18169E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93272E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.96931E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=4.0022E-8
tplens_vset=1.4E-1
tplens_vmon=1.55972E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27062E1
iondef3_imon=1.4791E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25375E1
iondef2_imon=1.59734E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=1.03233E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.77975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.14998E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.10728E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48462E0
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00461E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.17922E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05745E0
os_ef2alow_imon=-2.66494E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11132E-1
os_ef2bup_imon=-5.41039E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.42214E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.24229E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72089E1
iondef1_imon=1.07967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.07356E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.74688E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.79743E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.79265E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.65557E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.8595E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.29411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.21338E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=5.87594E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33372E1
os_fil1_imon=9.41024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06709E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64315E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=9.94277E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62464E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64377E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.8889E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.75027E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.91414E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21883E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.48984E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.551E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80024E1	-5.96046E-4	-8.79998E1	2.6226E-4	5.43594E-3	9.31501E-2	2.73063E1	-3.2698E1	-3.26614E1	2.68202E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00824E-1
2.0E0	1.08426E5	8.8E1	3.16E2	1.6E2	-7.29374E-2	-8.80025E1	-8.58307E-4	-8.79999E1	1.19209E-4	5.57899E-3	9.32455E-2	2.73143E1	-3.26603E1	-3.26034E1	2.6804E1	1.1929E-7	2.51739E-3	2.51739E-3	6.2645E-3	3.0071E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80028E1	-8.10623E-4	-8.80001E1	9.53674E-5	5.60284E-3	9.32217E-2	2.73135E1	-3.26482E1	-3.25978E1	2.67794E1	1.19343E-7	2.5147E-3	2.5147E-3	6.29067E-3	3.01742E-1
4.0E0	2.3345E4	1.0E1	6.55E2	3.98E2	-7.3401E-2	-8.80025E1	-6.91414E-4	-8.8E1	0.0E0	5.67436E-3	9.31501E-2	2.73039E1	-3.26642E1	-3.26306E1	2.67653E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80025E1	-1.07288E-3	-8.8E1	1.90735E-4	5.60284E-3	9.32932E-2	2.73311E1	-3.26461E1	-3.26107E1	2.6801E1	1.1929E-7	2.51954E-3	2.51954E-3	6.38318E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80024E1	-8.10623E-4	-8.79999E1	2.38419E-4	5.55515E-3	9.32455E-2	2.73424E1	-3.26603E1	-3.26182E1	2.68088E1	1.1929E-7	2.51603E-3	2.51603E-3	6.38717E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80025E1	-9.53674E-4	-8.79997E1	-2.38419E-5	5.45979E-3	9.29117E-2	2.72925E1	-3.2635E1	-3.262E1	2.6819E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80028E1	-5.96046E-4	-8.79998E1	3.33786E-4	5.31673E-3	9.32455E-2	2.7349E1	-3.26428E1	-3.26488E1	2.67998E1	1.1929E-7	2.51693E-3	2.51693E-3	6.26844E-3	3.03349E-1
1.2E1	1.15E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80028E1	-6.67572E-4	-8.79997E1	3.8147E-4	5.55515E-3	9.34124E-2	2.72462E1	-3.26585E1	-3.26422E1	2.6801E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.01347E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80027E1	-4.29153E-4	-8.79998E1	2.14577E-4	5.34058E-3	9.32455E-2	2.73181E1	-3.2659E1	-3.26236E1	2.68166E1	1.1929E-7	2.5188E-3	2.5188E-3	6.37351E-3	3.01871E-1
1.4E1	3.619E3	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80026E1	-5.48363E-4	-8.79998E1	3.8147E-4	5.17368E-3	9.30548E-2	2.72984E1	-3.26334E1	-3.26303E1	2.67914E1	1.1929E-7	2.51096E-3	2.51096E-3	6.28592E-3	3.01223E-1
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80023E1	-6.67572E-4	-8.79999E1	1.43051E-4	5.45979E-3	9.28879E-2	2.72952E1	-3.26749E1	-3.26458E1	2.68155E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00302E-1
1.6E1	5.71E2	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80022E1	-8.34465E-4	-8.80001E1	9.53674E-5	5.57899E-3	9.31025E-2	2.7298E1	-3.26786E1	-3.26442E1	2.67801E1	1.1929E-7	2.51752E-3	2.51752E-3	6.35349E-3	3.00878E-1
1.7E1	1.375E3	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80023E1	-1.09673E-3	-8.80002E1	4.29153E-4	5.67436E-3	9.32932E-2	2.73315E1	-3.2644E1	-3.26458E1	2.67939E1	1.1929E-7	2.51793E-3	2.51793E-3	6.31332E-3	3.01043E-1
1.8E1	5.838E3	4.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80022E1	-6.67572E-4	-8.8E1	2.38419E-4	5.53131E-3	9.33886E-2	2.72654E1	-3.27023E1	-3.26074E1	2.68435E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02133E-1
1.9E1	2.469E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80024E1	-6.4373E-4	-8.79997E1	4.05312E-4	5.26905E-3	9.34124E-2	2.73198E1	-3.26838E1	-3.26018E1	2.68394E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
2.0E1	2.5809E4	1.5E1	8.08E2	5.58E2	-7.29374E-2	-8.80023E1	-5.96046E-4	-8.79997E1	5.96046E-4	5.48363E-3	9.35078E-2	2.7321E1	-3.2656E1	-3.2634E1	2.68238E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80022E1	-5.00679E-4	-8.79997E1	2.14577E-4	5.62668E-3	9.2864E-2	2.73236E1	-3.26666E1	-3.26138E1	2.6804E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9952E-1
2.2E1	1.862E3	1.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80023E1	-9.77516E-4	-8.79998E1	4.05312E-4	5.26905E-3	9.34362E-2	2.73117E1	-3.26711E1	-3.26506E1	2.68146E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01223E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80023E1	-1.07288E-3	-8.80001E1	2.38419E-5	5.19753E-3	9.32932E-2	2.72089E1	-3.25375E1	-3.27062E1	2.68022E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.02133E-1