[Scan]
initial_time=2015-12-22T18:50:46
final_time=2015-12-22T18:51:06
ip_count=19
run=1021
dataset=4
scan=160
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78159E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.53319E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.48157E-9
ql3_vset=
ql3_vmon=-8.79993E1
ql3_imon=-2.42795E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.59355E-8
mult1=-2.05285E-8
mult2=-3.30561E-9
rf_tmon=3.49771E-3
rf_agc=4.43534E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.92208E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=1.96433E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.82809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.52598E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64248E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.53245E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.91747E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.33839E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11622E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.3533E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2563E0
cs_ionrep_imon=1.21197E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02242E1
cs_anode1_imon=2.97333E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=4.01309E-8
tplens_vset=1.4E-1
tplens_vmon=1.57835E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26817E1
iondef3_imon=1.50974E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27417E1
iondef2_imon=1.54976E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=1.00498E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.7693E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33375E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49904E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00342E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.43392E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.24677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73926E1
iondef1_imon=1.07931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68263E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.74245E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.84748E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.46465E-1
window_imon=-1.18873E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-9.11223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.25664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16096E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.43207E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06692E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64783E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30732E1
cs_fil1_imon=9.96215E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62942E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64728E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.53315E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59912E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.02368E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.26566E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=129
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.52E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80023E1	-4.52995E-4	-8.79999E1	0.0E0	5.50747E-3	9.30786E-2	2.73016E1	-3.26521E1	-3.26081E1	2.6829E1	1.1929E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00302E-1
2.0E0	1.09644E5	1.07E2	3.16E2	1.6E2	-7.18554E-2	-8.80025E1	-7.86781E-4	-8.79997E1	-1.90735E-4	5.65052E-3	9.32932E-2	2.73143E1	-3.26695E1	-3.25905E1	2.68076E1	1.1929E-7	2.51214E-3	2.51214E-3	6.34007E-3	3.00249E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80024E1	-8.10623E-4	-8.79998E1	-1.19209E-4	5.36442E-3	9.29832E-2	2.73145E1	-3.27068E1	-3.2626E1	2.6786E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02769E-1
4.0E0	2.3532E4	8.0E0	6.55E2	3.98E2	-7.286E-2	-8.80022E1	-5.72205E-4	-8.79997E1	1.66893E-4	5.57899E-3	9.31263E-2	2.72651E1	-3.26422E1	-3.2633E1	2.68238E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80022E1	-6.91414E-4	-8.8E1	1.43051E-4	5.62668E-3	9.32217E-2	2.72996E1	-3.26621E1	-3.25979E1	2.6798E1	1.1929E-7	2.5199E-3	2.5199E-3	6.2815E-3	3.01237E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80024E1	-8.10623E-4	-8.80001E1	4.76837E-4	5.38826E-3	9.30309E-2	2.7311E1	-3.26602E1	-3.26278E1	2.6822E1	1.1929E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.03081E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80024E1	-5.72205E-4	-8.79999E1	1.43051E-4	5.48363E-3	9.31025E-2	2.73045E1	-3.26512E1	-3.26603E1	2.67998E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80023E1	-7.39098E-4	-8.79998E1	-1.19209E-4	5.50747E-3	9.3317E-2	2.726E1	-3.26549E1	-3.26074E1	2.67896E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00302E-1
1.2E1	1.28E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80025E1	-6.67572E-4	-8.79998E1	9.53674E-5	5.34058E-3	9.30071E-2	2.73171E1	-3.26735E1	-3.26098E1	2.6831E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01738E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80024E1	-7.86781E-4	-8.79997E1	-1.43051E-4	5.34058E-3	9.32693E-2	2.72997E1	-3.27095E1	-3.25948E1	2.68106E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.4E1	3.533E3	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80023E1	-8.34465E-4	-8.79997E1	-7.15256E-5	5.34058E-3	9.31263E-2	2.73129E1	-3.27071E1	-3.26338E1	2.68304E1	1.1929E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.03618E-1
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80026E1	-1.19209E-3	-8.79997E1	7.15256E-5	5.6982E-3	9.31025E-2	2.73039E1	-3.2682E1	-3.26626E1	2.68182E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00041E-1
1.6E1	5.79E2	2.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80027E1	-1.0252E-3	-8.79996E1	2.38419E-5	5.55515E-3	9.33409E-2	2.72787E1	-3.26585E1	-3.26134E1	2.68259E1	1.1929E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1
1.7E1	1.322E3	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80027E1	-5.48363E-4	-8.79997E1	-2.6226E-4	5.65052E-3	9.30786E-2	2.73015E1	-3.26711E1	-3.26326E1	2.67701E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1
1.8E1	5.608E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80026E1	-7.15256E-4	-8.79997E1	-4.76837E-5	5.6982E-3	9.31025E-2	2.72986E1	-3.26425E1	-3.26726E1	2.68424E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99613E-1
1.9E1	2.453E3	3.0E0	7.68E2	5.29E2	-7.286E-2	-8.80026E1	-9.29832E-4	-8.79999E1	3.33786E-4	5.6982E-3	9.3174E-2	2.73279E1	-3.26861E1	-3.26422E1	2.68196E1	1.1929E-7	2.52599E-3	2.52599E-3	6.29128E-3	3.00197E-1
2.0E1	2.6155E4	1.4E1	8.08E2	5.58E2	-7.34782E-2	-8.80024E1	-1.07288E-3	-8.79998E1	7.15256E-5	5.74589E-3	9.31263E-2	2.72751E1	-3.26518E1	-3.26326E1	2.67926E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.9841E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80024E1	-9.29832E-4	-8.79995E1	4.76837E-4	6.00815E-3	9.30548E-2	2.73219E1	-3.27297E1	-3.25941E1	2.68134E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.9978E-1
2.2E1	1.78E3	2.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80026E1	-6.19888E-4	-8.79997E1	2.14577E-4	5.67436E-3	9.29594E-2	2.73022E1	-3.26868E1	-3.26081E1	2.68302E1	1.1929E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80023E1	-6.19888E-4	-8.79993E1	2.38419E-4	5.55515E-3	9.34362E-2	2.73926E1	-3.27417E1	-3.26817E1	2.68263E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.02368E-1