[Scan]
initial_time=2015-12-22T18:51:24
final_time=2015-12-22T18:51:44
ip_count=19
run=1021
dataset=5
scan=161
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-7.60484E-1
ql1_imon=1.62924E-8
ql2_vset=
ql2_vmon=-7.35235E-1
ql2_imon=1.82288E-9
ql3_vset=
ql3_vmon=-9.19366E0
ql3_imon=6.88852E-9
ql4_vset=
ql4_vmon=-9.18953E0
ql4_imon=-5.2253E-10
mult1=-1.07398E-8
mult2=-2.50503E-9
rf_tmon=-3.85152E-3
rf_agc=3.49678E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.48519E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19412E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.17083E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02388E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=1.08904E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4044E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.40231E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.34577E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.35654E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63906E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27313E0
cs_ionrep_imon=9.63591E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=1.95377E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.33486E-8
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26741E1
iondef3_imon=1.48379E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26284E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.91599E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24369E0
ionrepsh_imon=8.6157E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.20478E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74946E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53689E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72594E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.29039E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=7.88005E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-7.74273E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.1557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.0634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.4269E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07678E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64969E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31639E1
cs_fil1_imon=7.32903E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.6656E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66158E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.30757E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22055E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77312E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.61676E-1	-7.35068E-1	-9.19464E0	-9.18899E0	5.22137E-3	9.31025E-2	2.73098E1	-3.26614E1	-3.25877E1	2.68154E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.60937E-1	-7.35331E-1	-9.19452E0	-9.18913E0	5.50747E-3	9.32693E-2	2.72892E1	-3.26701E1	-3.26107E1	2.68016E1	1.1929E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.60198E-1	-7.35331E-1	-9.19495E0	-9.18927E0	5.45979E-3	9.30309E-2	2.72783E1	-3.26283E1	-3.26499E1	2.67763E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01475E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.60269E-1	-7.35259E-1	-9.19471E0	-9.18937E0	5.26905E-3	9.31263E-2	2.73315E1	-3.26621E1	-3.26332E1	2.6804E1	1.1929E-7	2.52093E-3	2.52093E-3	6.3126E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.60221E-1	-7.34878E-1	-9.19461E0	-9.18932E0	4.93526E-3	9.31978E-2	2.73393E1	-3.26488E1	-3.26386E1	2.68262E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.6046E-1	-7.35092E-1	-9.19485E0	-9.18925E0	4.95911E-3	9.3174E-2	2.72805E1	-3.26783E1	-3.26188E1	2.67951E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.60674E-1	-7.35259E-1	-9.1944E0	-9.18913E0	5.29289E-3	9.34601E-2	2.73033E1	-3.26419E1	-3.2626E1	2.68334E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.60603E-1	-7.35092E-1	-9.19471E0	-9.1892E0	5.17368E-3	9.31501E-2	2.73169E1	-3.26555E1	-3.26178E1	2.6803E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-7.60579E-1	-7.34973E-1	-9.19452E0	-9.18944E0	5.29289E-3	9.32693E-2	2.72997E1	-3.26783E1	-3.26458E1	2.68046E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.6046E-1	-7.34973E-1	-9.19421E0	-9.18941E0	5.10216E-3	9.34124E-2	2.72672E1	-3.26567E1	-3.26338E1	2.68262E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.60412E-1	-7.35188E-1	-9.19454E0	-9.18963E0	5.07832E-3	9.30786E-2	2.73234E1	-3.26703E1	-3.26331E1	2.67794E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.60269E-1	-7.35259E-1	-9.19416E0	-9.18927E0	5.17368E-3	9.3174E-2	2.73143E1	-3.26193E1	-3.26162E1	2.68094E1	1.1929E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.02922E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.60555E-1	-7.35211E-1	-9.19435E0	-9.18951E0	5.34058E-3	9.29117E-2	2.72839E1	-3.26484E1	-3.26449E1	2.68526E1	1.1929E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.04241E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.60412E-1	-7.35283E-1	-9.19418E0	-9.18939E0	5.07832E-3	9.28879E-2	2.73322E1	-3.2662E1	-3.26791E1	2.67992E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3514E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-7.60531E-1	-7.35569E-1	-9.19449E0	-9.18922E0	5.31673E-3	9.29594E-2	2.73375E1	-3.26603E1	-3.25978E1	2.6792E1	1.1929E-7	2.52169E-3	2.52169E-3	6.29128E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-7.60508E-1	-7.35378E-1	-9.19387E0	-9.18925E0	5.36442E-3	9.30071E-2	2.73045E1	-3.26487E1	-3.26242E1	2.67782E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02922E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-7.60603E-1	-7.35164E-1	-9.1938E0	-9.18946E0	5.126E-3	9.28402E-2	2.73163E1	-3.26756E1	-3.26095E1	2.6763E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.60436E-1	-7.34925E-1	-9.19354E0	-9.18932E0	5.24521E-3	9.28402E-2	2.73322E1	-3.26826E1	-3.26526E1	2.6804E1	1.1929E-7	2.51632E-3	2.51632E-3	6.26985E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-7.60436E-1	-7.35068E-1	-9.19378E0	-9.18951E0	5.19753E-3	9.27448E-2	2.72791E1	-3.27068E1	-3.26195E1	2.68012E1	1.1929E-7	2.51771E-3	2.51771E-3	6.37905E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-7.60484E-1	-7.35235E-1	-9.19366E0	-9.18953E0	4.95911E-3	9.29832E-2	2.72594E1	-3.26284E1	-3.26741E1	2.67854E1	1.1929E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.00197E-1