[Scan]
initial_time=2015-12-22T18:51:51
final_time=2015-12-22T18:52:10
ip_count=19
run=1021
dataset=5
scan=162
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-7.60031E-1
ql1_imon=1.48644E-8
ql2_vset=
ql2_vmon=-7.35092E-1
ql2_imon=1.97939E-9
ql3_vset=
ql3_vmon=-9.19397E0
ql3_imon=3.49441E-9
ql4_vset=
ql4_vmon=-9.18889E0
ql4_imon=-1.72567E-10
mult1=-9.37917E-9
mult2=-2.76452E-9
rf_tmon=-6.44708E-3
rf_agc=3.1495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.66235E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05179E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.18308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=1.07174E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40981E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.39006E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.04973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.35437E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10632E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02133E1
cs_anode1_imon=1.95665E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.36162E-8
tplens_vset=1.4E-1
tplens_vmon=1.64684E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.01061E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=8.37057E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48942E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.44689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.0721E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=5.66231E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.91131E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-8.85996E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.82839E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.06557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.84207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.47436E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.41789E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08026E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65174E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31637E1
cs_fil1_imon=8.47629E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79775E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66538E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.22895E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.03527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22176E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=3.03637E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11549E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.60365E-1	-7.34973E-1	-9.19342E0	-9.18915E0	5.29289E-3	9.28879E-2	2.73187E1	-3.26738E1	-3.26354E1	2.68001E1	1.1929E-7	2.51662E-3	2.51662E-3	6.36797E-3	3.00302E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.60508E-1	-7.35283E-1	-9.19337E0	-9.18937E0	4.98295E-3	9.31501E-2	2.73314E1	-3.26842E1	-3.26315E1	2.6787E1	1.1929E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.60388E-1	-7.35354E-1	-9.19373E0	-9.18958E0	5.36442E-3	9.31978E-2	2.73132E1	-3.26596E1	-3.25941E1	2.67989E1	1.1929E-7	2.51693E-3	2.51693E-3	6.26289E-3	3.01742E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.60388E-1	-7.35497E-1	-9.19371E0	-9.18956E0	5.34058E-3	9.29117E-2	2.72945E1	-3.26638E1	-3.26142E1	2.67879E1	1.1929E-7	2.51603E-3	2.51603E-3	6.37648E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.60293E-1	-7.3545E-1	-9.19373E0	-9.18941E0	5.36442E-3	9.29594E-2	2.73171E1	-3.26813E1	-3.26146E1	2.67938E1	1.1929E-7	2.52061E-3	2.52061E-3	6.2645E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-7.60078E-1	-7.35378E-1	-9.19354E0	-9.18968E0	5.29289E-3	9.31025E-2	2.73241E1	-3.26389E1	-3.26248E1	2.67845E1	1.1929E-7	2.52099E-3	2.52099E-3	6.37351E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.60126E-1	-7.35235E-1	-9.19356E0	-9.18944E0	5.31673E-3	9.27448E-2	2.73115E1	-3.26225E1	-3.26376E1	2.68123E1	1.1929E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.60007E-1	-7.35235E-1	-9.19373E0	-9.18958E0	5.36442E-3	9.30309E-2	2.72757E1	-3.26338E1	-3.26506E1	2.6792E1	1.1929E-7	2.51814E-3	2.51814E-3	6.33919E-3	3.01104E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.60198E-1	-7.3514E-1	-9.19363E0	-9.18937E0	5.36442E-3	9.27687E-2	2.72962E1	-3.26703E1	-3.26071E1	2.67956E1	1.1929E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.60245E-1	-7.3545E-1	-9.19356E0	-9.18939E0	5.34058E-3	9.26495E-2	2.72849E1	-3.26395E1	-3.2626E1	2.68226E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3514E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-7.60365E-1	-7.35188E-1	-9.19397E0	-9.18922E0	5.19753E-3	9.2864E-2	2.73291E1	-3.26687E1	-3.26494E1	2.68148E1	1.1929E-7	2.5199E-3	2.5199E-3	6.26916E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.6015E-1	-7.35331E-1	-9.19363E0	-9.18937E0	5.60284E-3	9.26733E-2	2.73099E1	-3.26512E1	-3.26506E1	2.67908E1	1.1929E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.60221E-1	-7.35617E-1	-9.19361E0	-9.18903E0	5.29289E-3	9.2864E-2	2.73171E1	-3.26633E1	-3.26536E1	2.68016E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02922E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.60436E-1	-7.35569E-1	-9.19368E0	-9.18894E0	5.38826E-3	9.30071E-2	2.73207E1	-3.26663E1	-3.26272E1	2.6774E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-7.60031E-1	-7.35688E-1	-9.19344E0	-9.18922E0	5.24521E-3	9.29832E-2	2.72793E1	-3.26554E1	-3.26182E1	2.68094E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00144E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.59983E-1	-7.35164E-1	-9.19352E0	-9.18901E0	5.19753E-3	9.30309E-2	2.73165E1	-3.26747E1	-3.26224E1	2.67944E1	1.1929E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.9841E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-7.60007E-1	-7.35092E-1	-9.19359E0	-9.18934E0	5.36442E-3	9.3317E-2	2.73363E1	-3.26867E1	-3.26044E1	2.68508E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.60007E-1	-7.34854E-1	-9.19383E0	-9.18927E0	5.17368E-3	9.31025E-2	2.73246E1	-3.26968E1	-3.26431E1	2.67978E1	1.1929E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.59959E-1	-7.34901E-1	-9.1939E0	-9.18922E0	5.29289E-3	9.32217E-2	2.72941E1	-3.26538E1	-3.2666E1	2.6814E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.60031E-1	-7.35092E-1	-9.19397E0	-9.18889E0	5.57899E-3	9.3317E-2	2.73273E1	-3.26591E1	-3.26092E1	2.6825E1	1.1929E-7	2.52236E-3	2.52236E-3	6.29684E-3	3.03637E-1