[Scan]
initial_time=2015-12-22T18:52:17
final_time=2015-12-22T18:52:37
ip_count=19
run=1021
dataset=5
scan=163
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-7.59506E-1
ql1_imon=1.45034E-8
ql2_vset=
ql2_vmon=-7.34949E-1
ql2_imon=1.9743E-9
ql3_vset=
ql3_vmon=-9.19387E0
ql3_imon=2.47153E-9
ql4_vset=
ql4_vmon=-9.18937E0
ql4_imon=-8.72135E-11
mult1=-1.02678E-8
mult2=-2.62919E-9
rf_tmon=-4.73954E-3
rf_agc=3.33504E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=1.66887E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64414E0
bslens_imon=2.53734E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.99451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04864E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53613E1
cs_ef1b_imon=3.18356E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.02346E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=1.07134E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40064E0
lens1_imon=2.65339E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64537E1
os_ef1alow_imon=2.99634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.42174E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=3.02864E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.35994E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.2948E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15231E1
os_ea1_imon=2.33106E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64057E1
os_ef1bup_imon=3.08314E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24336E0
cs_ionrep_imon=9.32449E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93574E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01608E1
cs_anode1_imon=1.97267E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.36398E-8
tplens_vset=1.4E-1
tplens_vmon=1.59214E0
tplens_imon=-3.07769E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.48501E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.57972E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98462E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.04315E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26083E0
ionrepsh_imon=8.56454E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33371E1
lens5b_imon=2.1772E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74391E1
cs_ef2b_imon=3.13412E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53162E0
os_ea2_imon=-4.12625E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00361E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71167E1
cs_ef2a_imon=3.2108E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08894E0
os_ef2alow_imon=-2.69288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14723E-1
os_ef2bup_imon=-5.1022E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10838E1
os_restr2_imon=3.46069E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.32699E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02023E1
cs_anode2_imon=2.08983E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72762E1
iondef1_imon=1.07658E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.07783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.79641E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.95895E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14441E0
cs_ionaccel_imon=-9.17999E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02031E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.87078E-6
window_vset=0.0E0
window_vmon=2.16574E-1
window_imon=-1.05423E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39104E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.65E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.34787E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.37453E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.3591E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.27345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.42894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06985E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65321E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31651E1
cs_fil1_imon=6.54649E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.76509E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66752E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50528E-2
os_fil2_imon=-2.5874E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.11591E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3133E-1
cs_fil2_imon=-2.50307E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.96657E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22117E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35601E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.80243E-1
res40_imon=-2.61114E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.60031E-1	-7.3514E-1	-9.19342E0	-9.18918E0	5.48363E-3	9.29356E-2	2.72927E1	-3.26384E1	-3.26166E1	2.68024E1	1.1929E-7	2.51642E-3	2.51642E-3	6.3074E-3	2.99811E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.59983E-1	-7.35211E-1	-9.19368E0	-9.18951E0	5.48363E-3	9.30309E-2	2.72898E1	-3.26634E1	-3.26272E1	2.67926E1	1.1929E-7	2.51919E-3	2.51919E-3	6.29157E-3	2.97843E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-7.59983E-1	-7.34949E-1	-9.19368E0	-9.18939E0	5.53131E-3	9.32217E-2	2.72889E1	-3.26879E1	-3.26038E1	2.67792E1	1.1929E-7	2.51838E-3	2.51838E-3	6.3245E-3	2.97823E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.59816E-1	-7.35331E-1	-9.19368E0	-9.18946E0	5.57899E-3	9.3317E-2	2.72874E1	-3.26579E1	-3.25947E1	2.6825E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.59673E-1	-7.35497E-1	-9.19363E0	-9.18915E0	5.57899E-3	9.31501E-2	2.72821E1	-3.2649E1	-3.26231E1	2.68022E1	1.1929E-7	2.51593E-3	2.51593E-3	6.31555E-3	3.02714E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-7.59578E-1	-7.35593E-1	-9.19352E0	-9.18903E0	5.45979E-3	9.32455E-2	2.734E1	-3.26407E1	-3.26278E1	2.68232E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-7.59912E-1	-7.35521E-1	-9.19361E0	-9.18922E0	5.55515E-3	9.33409E-2	2.7337E1	-3.26313E1	-3.26366E1	2.67986E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.59983E-1	-7.35736E-1	-9.19385E0	-9.18925E0	5.43594E-3	9.30548E-2	2.72931E1	-3.26753E1	-3.26278E1	2.68036E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-7.59792E-1	-7.35664E-1	-9.19347E0	-9.18915E0	5.24521E-3	9.31501E-2	2.72967E1	-3.26789E1	-3.26446E1	2.68094E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-7.59745E-1	-7.35497E-1	-9.19385E0	-9.18932E0	5.31673E-3	9.31025E-2	2.73466E1	-3.26843E1	-3.26164E1	2.681E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.59935E-1	-7.35521E-1	-9.19363E0	-9.18934E0	5.53131E-3	9.31263E-2	2.73261E1	-3.26518E1	-3.26332E1	2.68022E1	1.1929E-7	2.52045E-3	2.52045E-3	6.32386E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.59745E-1	-7.35188E-1	-9.19375E0	-9.18949E0	5.19753E-3	9.30309E-2	2.73181E1	-3.26874E1	-3.26219E1	2.68004E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9874E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-7.59768E-1	-7.35164E-1	-9.19366E0	-9.1892E0	5.36442E-3	9.31263E-2	2.72138E1	-3.25749E1	-3.26729E1	2.6804E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.59649E-1	-7.35211E-1	-9.19335E0	-9.18941E0	5.36442E-3	9.29356E-2	2.73249E1	-3.2644E1	-3.25996E1	2.67908E1	1.1929E-7	2.52243E-3	2.52243E-3	6.31283E-3	2.99346E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.59625E-1	-7.35044E-1	-9.19361E0	-9.18934E0	5.43594E-3	9.31025E-2	2.72862E1	-3.2659E1	-3.26313E1	2.68182E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.59602E-1	-7.35283E-1	-9.19373E0	-9.18932E0	5.31673E-3	9.30786E-2	2.72925E1	-3.26747E1	-3.26332E1	2.68212E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.02511E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.59578E-1	-7.35307E-1	-9.19366E0	-9.18927E0	5.53131E-3	9.31501E-2	2.73201E1	-3.26464E1	-3.26651E1	2.68088E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.59506E-1	-7.34854E-1	-9.19366E0	-9.18927E0	5.53131E-3	9.29594E-2	2.73151E1	-3.26661E1	-3.25865E1	2.68007E1	1.1929E-7	2.51025E-3	2.51025E-3	6.31858E-3	2.99348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.59482E-1	-7.35044E-1	-9.19359E0	-9.18932E0	5.38826E-3	9.31025E-2	2.73198E1	-3.26809E1	-3.26071E1	2.68076E1	1.1929E-7	2.51287E-3	2.51287E-3	6.33388E-3	2.99594E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.59506E-1	-7.34949E-1	-9.19387E0	-9.18937E0	5.81741E-3	9.32217E-2	2.72762E1	-3.26537E1	-3.26443E1	2.68166E1	1.1929E-7	2.51632E-3	2.51632E-3	6.35601E-3	3.01738E-1