[Scan]
initial_time=2015-12-22T18:52:44
final_time=2015-12-22T18:53:04
ip_count=19
run=1021
dataset=5
scan=164
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-7.59268E-1
ql1_imon=1.43855E-8
ql2_vset=
ql2_vmon=-7.35378E-1
ql2_imon=1.96574E-9
ql3_vset=
ql3_vmon=-9.19406E0
ql3_imon=1.8995E-9
ql4_vset=
ql4_vmon=-9.18913E0
ql4_imon=-5.04613E-11
mult1=-1.0516E-8
mult2=-2.96039E-9
rf_tmon=-4.57436E-3
rf_agc=3.30437E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.60784E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12539E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53679E1
cs_ef1b_imon=3.18999E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.01923E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05448E1
cs_ea1_imon=1.09635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39498E0
lens1_imon=2.53264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.41136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84162E1
cs_ef1a_imon=3.05411E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.36878E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=4.28817E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.34364E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.10068E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20845E0
cs_ionrep_imon=9.82736E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93013E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=1.94689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.37362E-8
tplens_vset=1.4E-1
tplens_vmon=1.57359E0
tplens_imon=-1.53771E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98197E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.0629E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26331E0
ionrepsh_imon=8.29834E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33941E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74988E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50045E0
os_ea2_imon=-8.15641E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06159E2
lens4b_imon=2.00895E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10785E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65577E-1
os_ef2bup_imon=-5.44167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10683E1
os_restr2_imon=3.44299E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.29256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.07652E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73582E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.10137E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.70836E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.98816E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-1.02462E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=1.59186E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9271E3
multa_neg_imon=6.67729E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.71268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.35685E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37603E0
defgridb_imon=6.35166E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.42716E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07306E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65447E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31722E1
cs_fil1_imon=7.68707E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68534E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67066E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.50701E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14983E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.05458E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22169E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51248E-3
foreline_cvt_pmon=2.51248E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43191E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.59482E-1	-7.35497E-1	-9.19366E0	-9.18934E0	5.43594E-3	9.36508E-2	2.72909E1	-3.26549E1	-3.25953E1	2.68256E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.59602E-1	-7.35092E-1	-9.19375E0	-9.18918E0	5.24521E-3	9.3317E-2	2.73063E1	-3.26756E1	-3.26058E1	2.67932E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.59578E-1	-7.35116E-1	-9.19366E0	-9.18937E0	5.60284E-3	9.32932E-2	2.73021E1	-3.26909E1	-3.26419E1	2.67944E1	1.1929E-7	2.52027E-3	2.52027E-3	6.28511E-3	3.01209E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.5984E-1	-7.35235E-1	-9.19366E0	-9.18944E0	5.36442E-3	9.31025E-2	2.72656E1	-3.26708E1	-3.26313E1	2.68111E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.59673E-1	-7.35378E-1	-9.19375E0	-9.18951E0	5.26905E-3	9.34601E-2	2.73429E1	-3.265E1	-3.27029E1	2.6816E1	1.1929E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.59459E-1	-7.35068E-1	-9.19397E0	-9.18941E0	5.60284E-3	9.2864E-2	2.73333E1	-3.26524E1	-3.26356E1	2.68028E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.59602E-1	-7.34901E-1	-9.19392E0	-9.18951E0	5.31673E-3	9.29356E-2	2.73139E1	-3.26278E1	-3.26354E1	2.67938E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.59339E-1	-7.35235E-1	-9.19373E0	-9.18963E0	5.43594E-3	9.30548E-2	2.73116E1	-3.26791E1	-3.26384E1	2.68059E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.59315E-1	-7.35378E-1	-9.19387E0	-9.18958E0	5.31673E-3	9.27448E-2	2.72883E1	-3.26416E1	-3.26314E1	2.68082E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-7.59459E-1	-7.35378E-1	-9.1939E0	-9.18944E0	5.57899E-3	9.29832E-2	2.73045E1	-3.26669E1	-3.26206E1	2.67824E1	1.1929E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.59578E-1	-7.35188E-1	-9.19399E0	-9.18941E0	5.65052E-3	9.30309E-2	2.73289E1	-3.26446E1	-3.26191E1	2.67692E1	1.1929E-7	2.51755E-3	2.51755E-3	6.29655E-3	3.00766E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.59339E-1	-7.35545E-1	-9.19399E0	-9.18932E0	5.50747E-3	9.31025E-2	2.72865E1	-3.26338E1	-3.2641E1	2.68016E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-7.59387E-1	-7.3514E-1	-9.1938E0	-9.18958E0	5.4121E-3	9.30786E-2	2.72873E1	-3.26168E1	-3.25966E1	2.6816E1	1.1929E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.99175E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-7.59149E-1	-7.35116E-1	-9.19378E0	-9.18934E0	5.43594E-3	9.2864E-2	2.73129E1	-3.26609E1	-3.26188E1	2.68076E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00144E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-7.59482E-1	-7.35211E-1	-9.19404E0	-9.18949E0	5.45979E-3	9.30071E-2	2.73193E1	-3.26708E1	-3.26101E1	2.68024E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.59578E-1	-7.35044E-1	-9.19394E0	-9.18922E0	5.43594E-3	9.2864E-2	2.73027E1	-3.26726E1	-3.26384E1	2.68286E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.59554E-1	-7.34973E-1	-9.19409E0	-9.18951E0	5.55515E-3	9.32455E-2	2.72886E1	-3.26768E1	-3.25911E1	2.68106E1	1.1929E-7	2.50989E-3	2.50989E-3	6.35601E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.59482E-1	-7.34854E-1	-9.19411E0	-9.18937E0	5.45979E-3	9.28879E-2	2.73104E1	-3.26809E1	-3.26396E1	2.6789E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01209E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-7.59196E-1	-7.35211E-1	-9.19392E0	-9.18963E0	5.31673E-3	9.32217E-2	2.73099E1	-3.26476E1	-3.25821E1	2.68178E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-7.59268E-1	-7.35378E-1	-9.19406E0	-9.18913E0	5.10216E-3	9.34124E-2	2.73582E1	-3.26714E1	-3.26301E1	2.681E1	1.1929E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.01209E-1