[Scan]
initial_time=2015-12-22T18:54:04
final_time=2015-12-22T18:54:24
ip_count=19
run=1021
dataset=5
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-7.58457E-1
ql1_imon=1.41514E-8
ql2_vset=
ql2_vmon=-7.34973E-1
ql2_imon=1.96658E-9
ql3_vset=
ql3_vmon=-9.19371E0
ql3_imon=1.09743E-9
ql4_vset=
ql4_vmon=-9.18958E0
ql4_imon=2.05278E-11
mult1=-9.96916E-9
mult2=-2.75654E-9
rf_tmon=-2.73999E-3
rf_agc=3.49498E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.63894E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19583E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53551E1
cs_ef1b_imon=3.18304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=1.11617E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37551E0
lens1_imon=2.53972E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.37419E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84452E1
cs_ef1a_imon=3.05759E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.37308E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.29026E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1507E1
os_ea1_imon=2.35638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63977E1
os_ef1bup_imon=3.09373E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=9.15841E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.93751E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.38636E-8
tplens_vset=1.4E-1
tplens_vmon=1.59719E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.59187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.04396E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=8.5284E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.14551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54587E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70939E1
cs_ef2a_imon=3.17401E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08584E0
os_ef2alow_imon=-2.43557E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.43568E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.45272E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.3368E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.08973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72709E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.11422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.74151E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=8.01483E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10408E0
cs_ionaccel_imon=-1.15668E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=1.82354E-1
window_imon=-9.34263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82582E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.5546E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.40641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.71268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=7.61169E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.42797E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07179E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65723E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31743E1
cs_fil1_imon=6.48811E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80697E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67453E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66606E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-1.84671E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46637E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2233E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.02271E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.58553E-1	-7.35426E-1	-9.1938E0	-9.18913E0	5.07832E-3	9.33409E-2	2.72992E1	-3.26803E1	-3.25959E1	2.68123E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.58791E-1	-7.35235E-1	-9.1938E0	-9.18937E0	5.14984E-3	9.3317E-2	2.72696E1	-3.26952E1	-3.25942E1	2.67976E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-7.58576E-1	-7.35188E-1	-9.19378E0	-9.18915E0	5.07832E-3	9.30071E-2	2.7326E1	-3.26434E1	-3.26324E1	2.68065E1	1.1929E-7	2.5225E-3	2.5225E-3	6.29067E-3	2.99879E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-7.58481E-1	-7.35188E-1	-9.19404E0	-9.1893E0	5.34058E-3	9.31501E-2	2.73075E1	-3.26708E1	-3.26042E1	2.67955E1	1.1929E-7	2.51287E-3	2.51287E-3	6.36047E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.58553E-1	-7.35211E-1	-9.19383E0	-9.18937E0	5.60284E-3	9.32693E-2	2.72859E1	-3.26452E1	-3.26579E1	2.68107E1	1.1929E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.58696E-1	-7.35497E-1	-9.19385E0	-9.18944E0	5.05447E-3	9.32217E-2	2.73081E1	-3.26278E1	-3.26693E1	2.6814E1	1.1929E-7	2.50898E-3	2.50898E-3	6.29098E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.58743E-1	-7.35188E-1	-9.1938E0	-9.18927E0	5.10216E-3	9.31978E-2	2.7311E1	-3.26484E1	-3.26172E1	2.6795E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.58505E-1	-7.35283E-1	-9.19392E0	-9.1893E0	4.95911E-3	9.3174E-2	2.73075E1	-3.26603E1	-3.26182E1	2.68214E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.58672E-1	-7.3545E-1	-9.19378E0	-9.18925E0	5.24521E-3	9.2864E-2	2.72715E1	-3.26615E1	-3.26212E1	2.67914E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-7.58505E-1	-7.35712E-1	-9.19371E0	-9.18961E0	5.4121E-3	9.30309E-2	2.73033E1	-3.26789E1	-3.25876E1	2.67956E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.58529E-1	-7.35331E-1	-9.19404E0	-9.18941E0	5.14984E-3	9.32932E-2	2.73381E1	-3.26526E1	-3.26124E1	2.6801E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.58696E-1	-7.3545E-1	-9.19418E0	-9.18941E0	5.36442E-3	9.31501E-2	2.73273E1	-3.2653E1	-3.25816E1	2.68178E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.58362E-1	-7.35259E-1	-9.19378E0	-9.18922E0	5.17368E-3	9.32455E-2	2.73033E1	-3.27029E1	-3.26224E1	2.68018E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-7.58481E-1	-7.35497E-1	-9.19359E0	-9.18934E0	5.17368E-3	9.30071E-2	2.7358E1	-3.26549E1	-3.26663E1	2.67932E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.58362E-1	-7.3545E-1	-9.19392E0	-9.1893E0	5.38826E-3	9.32455E-2	2.73225E1	-3.26747E1	-3.25996E1	2.67932E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.5841E-1	-7.35235E-1	-9.19361E0	-9.18939E0	5.10216E-3	9.33886E-2	2.73104E1	-3.26679E1	-3.25942E1	2.68172E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01347E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.58243E-1	-7.3545E-1	-9.19394E0	-9.18918E0	5.36442E-3	9.31025E-2	2.7308E1	-3.26653E1	-3.26324E1	2.6788E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-7.5841E-1	-7.35092E-1	-9.19387E0	-9.18903E0	5.10216E-3	9.30309E-2	2.7334E1	-3.26754E1	-3.2614E1	2.68279E1	1.1929E-7	2.52348E-3	2.52348E-3	6.33887E-3	3.02038E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-7.58338E-1	-7.3514E-1	-9.19378E0	-9.18937E0	5.45979E-3	9.29356E-2	2.72847E1	-3.26627E1	-3.26248E1	2.67794E1	1.1929E-7	2.51947E-3	2.51947E-3	6.3074E-3	3.01301E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.58457E-1	-7.34973E-1	-9.19371E0	-9.18958E0	5.24521E-3	9.29356E-2	2.72709E1	-3.26416E1	-3.2593E1	2.67896E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1