[Scan]
initial_time=2015-12-22T18:54:31
final_time=2015-12-22T18:54:51
ip_count=19
run=1021
dataset=5
scan=168
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-7.5829E-1
ql1_imon=1.40213E-8
ql2_vset=
ql2_vmon=-7.35283E-1
ql2_imon=2.0962E-9
ql3_vset=
ql3_vmon=-9.19387E0
ql3_imon=8.95894E-10
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=3.89457E-11
mult1=-9.34305E-9
mult2=-2.83638E-9
rf_tmon=-5.05918E-3
rf_agc=3.25165E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.63614E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67614E0
bslens_imon=2.36433E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19973E1
lens5a_imon=1.99157E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05055E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53557E1
cs_ef1b_imon=3.17262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05121E1
cs_ea1_imon=1.07594E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40095E0
lens1_imon=2.58681E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64846E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.39158E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83954E1
cs_ef1a_imon=3.05029E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.37531E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.28435E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.34614E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63421E1
os_ef1bup_imon=3.09547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29149E0
cs_ionrep_imon=9.4384E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01902E1
cs_anode1_imon=1.95037E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.39007E-8
tplens_vset=1.4E-1
tplens_vmon=1.61478E0
tplens_imon=-1.5592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.46666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.58138E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.07971E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23008E0
ionrepsh_imon=8.52764E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.17616E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7442E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5244E0
os_ea2_imon=-5.69589E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71339E1
cs_ef2a_imon=3.18304E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.42862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40092E-1
os_ef2bup_imon=-5.34088E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.44334E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29963E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.09772E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73429E1
iondef1_imon=1.09297E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.74967E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=8.0356E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12261E0
cs_ionaccel_imon=-1.14973E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47289E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.63571E-6
window_vset=0.0E0
window_vmon=1.64399E-1
window_imon=-1.02462E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-4.26876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.52302E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.32373E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.13253E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.43086E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07462E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65682E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31751E1
cs_fil1_imon=6.96885E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02645E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67568E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40674E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91006E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.11315E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22329E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.08642E-1
res40_imon=-2.41472E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.58243E-1	-7.35402E-1	-9.19399E0	-9.18944E0	5.57899E-3	9.31263E-2	2.73228E1	-3.27033E1	-3.25794E1	2.681E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.02875E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.58386E-1	-7.35331E-1	-9.19411E0	-9.18922E0	5.74589E-3	9.31978E-2	2.72989E1	-3.2684E1	-3.25805E1	2.67956E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.58529E-1	-7.35164E-1	-9.19423E0	-9.1892E0	5.6982E-3	9.28879E-2	2.72889E1	-3.26567E1	-3.26567E1	2.67949E1	1.1929E-7	2.51611E-3	2.51611E-3	6.3131E-3	3.02972E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.58553E-1	-7.35259E-1	-9.19402E0	-9.1893E0	5.84126E-3	9.31501E-2	2.72909E1	-3.26744E1	-3.26284E1	2.67962E1	1.1929E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-7.5841E-1	-7.35354E-1	-9.19404E0	-9.1892E0	5.79357E-3	9.32932E-2	2.72977E1	-3.26738E1	-3.26493E1	2.67752E1	1.1929E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.58553E-1	-7.35521E-1	-9.19404E0	-9.18891E0	5.65052E-3	9.30548E-2	2.73356E1	-3.26483E1	-3.26095E1	2.67835E1	1.1929E-7	2.52509E-3	2.52509E-3	6.33863E-3	3.01485E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.58529E-1	-7.35521E-1	-9.19428E0	-9.18903E0	5.79357E-3	9.28879E-2	2.73139E1	-3.26296E1	-3.26301E1	2.67937E1	1.1929E-7	2.51411E-3	2.51411E-3	6.3074E-3	3.00916E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-7.58576E-1	-7.35378E-1	-9.19425E0	-9.18911E0	6.05583E-3	9.26733E-2	2.72709E1	-3.26567E1	-3.26173E1	2.6801E1	1.1929E-7	2.52553E-3	2.52553E-3	6.31269E-3	3.00348E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.58529E-1	-7.35426E-1	-9.1943E0	-9.18896E0	5.72205E-3	9.29832E-2	2.73297E1	-3.26476E1	-3.26597E1	2.6792E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.58576E-1	-7.35116E-1	-9.19411E0	-9.18927E0	5.29289E-3	9.30309E-2	2.73219E1	-3.26494E1	-3.2638E1	2.67938E1	1.1929E-7	2.50898E-3	2.50898E-3	6.34037E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.58672E-1	-7.35497E-1	-9.19404E0	-9.18913E0	5.34058E-3	9.30786E-2	2.73129E1	-3.26615E1	-3.26554E1	2.6786E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.58338E-1	-7.35402E-1	-9.19404E0	-9.1892E0	5.07832E-3	9.29356E-2	2.72791E1	-3.26762E1	-3.26549E1	2.67716E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.58386E-1	-7.35235E-1	-9.19394E0	-9.18949E0	5.4121E-3	9.29832E-2	2.73051E1	-3.26413E1	-3.26352E1	2.68166E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.58505E-1	-7.35426E-1	-9.19418E0	-9.18925E0	5.36442E-3	9.30071E-2	2.73263E1	-3.26679E1	-3.26296E1	2.67992E1	1.1929E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.00942E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-7.5841E-1	-7.35617E-1	-9.19402E0	-9.18932E0	5.29289E-3	9.30786E-2	2.73339E1	-3.26829E1	-3.2626E1	2.6789E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.58505E-1	-7.35497E-1	-9.19409E0	-9.18939E0	5.17368E-3	9.28879E-2	2.72998E1	-3.2649E1	-3.26567E1	2.68022E1	1.1929E-7	2.51804E-3	2.51804E-3	6.34661E-3	2.99613E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-7.58338E-1	-7.35235E-1	-9.19421E0	-9.18934E0	5.43594E-3	9.29117E-2	2.73219E1	-3.26284E1	-3.26536E1	2.68004E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.58433E-1	-7.35211E-1	-9.19409E0	-9.18944E0	5.48363E-3	9.27687E-2	2.73242E1	-3.26527E1	-3.26521E1	2.67891E1	1.1929E-7	2.51225E-3	2.51225E-3	6.27461E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.58696E-1	-7.35283E-1	-9.19404E0	-9.18958E0	5.48363E-3	9.28164E-2	2.72953E1	-3.26327E1	-3.26462E1	2.67944E1	1.1929E-7	2.51918E-3	2.51918E-3	6.31555E-3	3.01414E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.5829E-1	-7.35283E-1	-9.19387E0	-9.18941E0	5.22137E-3	9.30071E-2	2.73429E1	-3.26687E1	-3.26224E1	2.67842E1