[Scan]
initial_time=2015-12-22T18:55:24
final_time=2015-12-22T18:55:44
ip_count=19
run=1021
dataset=5
scan=170
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-7.58219E-1
ql1_imon=1.39936E-8
ql2_vset=
ql2_vmon=-7.35307E-1
ql2_imon=2.01671E-9
ql3_vset=
ql3_vmon=-9.19425E0
ql3_imon=7.82025E-10
ql4_vset=
ql4_vmon=-9.18918E0
ql4_imon=1.01638E-10
mult1=-1.06579E-8
mult2=-2.79577E-9
rf_tmon=-3.09961E-3
rf_agc=3.33858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.71115E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63558E0
bslens_imon=2.4269E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=2.0159E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.17401E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02232E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.09714E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40732E0
lens1_imon=2.80233E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0318E1
cs_ea2_imon=1.38706E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=3.04473E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.38359E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.29095E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15213E1
os_ea1_imon=2.34301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28049E0
cs_ionrep_imon=9.39321E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93437E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=1.95975E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.39317E-8
tplens_vset=1.4E-1
tplens_vmon=1.62231E0
tplens_imon=-2.8454E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.50142E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.27687E-2
ql6_imon=4.06344E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2353E0
ionrepsh_imon=8.37469E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34115E1
lens5b_imon=2.17407E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5215E0
os_ea2_imon=-7.12113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.19069E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09163E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40092E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=3.43743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.31353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.0859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.08358E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.08781E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.82714E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=8.05159E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11219E0
cs_ionaccel_imon=-9.6554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=1.99151E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86234E1
mask2_imon=-5.31134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92601E3
multa_neg_imon=7.30402E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.89035E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.24144E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3949E0
defgridb_imon=6.00044E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.44204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07451E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31649E1
cs_fil1_imon=6.82405E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38994E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67895E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40674E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64283E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.65181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45478E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22245E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.52835E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-7.58624E-1	-7.34949E-1	-9.19416E0	-9.18956E0	5.4121E-3	9.30548E-2	2.72839E1	-3.26649E1	-3.26378E1	2.67974E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.5829E-1	-7.35188E-1	-9.19437E0	-9.18968E0	5.07832E-3	9.2721E-2	2.72788E1	-3.26378E1	-3.26495E1	2.68132E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-7.581E-1	-7.35497E-1	-9.19428E0	-9.18968E0	4.81606E-3	9.28402E-2	2.73006E1	-3.26792E1	-3.26072E1	2.67764E1	1.1929E-7	2.51447E-3	2.51447E-3	6.32784E-3	2.99906E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-7.58171E-1	-7.35521E-1	-9.1943E0	-9.18949E0	5.19753E-3	9.28164E-2	2.73219E1	-3.26625E1	-3.26231E1	2.68065E1	1.1929E-7	2.51439E-3	2.51439E-3	6.3074E-3	3.03027E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-7.58243E-1	-7.35426E-1	-9.19423E0	-9.1892E0	5.07832E-3	9.27448E-2	2.72985E1	-3.26476E1	-3.26284E1	2.68118E1	1.1929E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.01862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-7.58243E-1	-7.35283E-1	-9.19428E0	-9.1892E0	5.17368E-3	9.29356E-2	2.73123E1	-3.26524E1	-3.26188E1	2.68046E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.58338E-1	-7.35545E-1	-9.19418E0	-9.18951E0	5.31673E-3	9.32693E-2	2.73135E1	-3.26753E1	-3.26176E1	2.67842E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.03185E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.58266E-1	-7.35211E-1	-9.19418E0	-9.18956E0	5.19753E-3	9.31501E-2	2.73021E1	-3.26573E1	-3.26476E1	2.68256E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-7.58147E-1	-7.35497E-1	-9.19425E0	-9.18949E0	5.50747E-3	9.30309E-2	2.72871E1	-3.26591E1	-3.2623E1	2.68028E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.97762E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.57813E-1	-7.35354E-1	-9.19418E0	-9.18915E0	5.31673E-3	9.30786E-2	2.73243E1	-3.26645E1	-3.26705E1	2.68214E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9926E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-7.5829E-1	-7.35092E-1	-9.19423E0	-9.18901E0	5.29289E-3	9.29117E-2	2.73045E1	-3.26691E1	-3.26077E1	2.67788E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-7.58266E-1	-7.35259E-1	-9.19409E0	-9.18913E0	5.10216E-3	9.29832E-2	2.73087E1	-3.26741E1	-3.25918E1	2.68178E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02769E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.58576E-1	-7.35116E-1	-9.19378E0	-9.18913E0	5.126E-3	9.30071E-2	2.73189E1	-3.26795E1	-3.26248E1	2.67943E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-7.58481E-1	-7.35283E-1	-9.19399E0	-9.18918E0	4.8399E-3	9.29594E-2	2.73039E1	-3.26543E1	-3.26585E1	2.6792E1	1.19342E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02133E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.58719E-1	-7.35188E-1	-9.19394E0	-9.18927E0	5.10216E-3	9.31263E-2	2.73081E1	-3.26591E1	-3.26038E1	2.67956E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.58624E-1	-7.35569E-1	-9.19404E0	-9.18946E0	5.03063E-3	9.30786E-2	2.73345E1	-3.26723E1	-3.26026E1	2.68268E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.58386E-1	-7.35426E-1	-9.1939E0	-9.18927E0	5.14984E-3	9.3317E-2	2.7285E1	-3.26508E1	-3.26708E1	2.6798E1	1.1929E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.58386E-1	-7.35593E-1	-9.19428E0	-9.18911E0	5.65052E-3	9.29356E-2	2.72909E1	-3.26927E1	-3.25942E1	2.68215E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02659E-1
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-7.58195E-1	-7.35092E-1	-9.19423E0	-9.18937E0	5.65052E-3	9.29594E-2	2.73231E1	-3.26657E1	-3.25876E1	2.68124E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.03804E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.58219E-1	-7.35307E-1	-9.19425E0	-9.18918E0	5.4121E-3	9.27687E-2	2.73175E1	-3.26567E1	-3.2616E1	2.68142E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1