[Scan]
initial_time=2015-12-22T18:55:51
final_time=2015-12-22T18:56:10
ip_count=19
run=1021
dataset=5
scan=171
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-7.58266E-1
ql1_imon=1.39811E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.01347E-9
ql3_vset=
ql3_vmon=-9.19449E0
ql3_imon=6.73115E-10
ql4_vset=
ql4_vmon=-9.18944E0
ql4_imon=7.57456E-11
mult1=-9.46389E-9
mult2=-2.84672E-9
rf_tmon=-5.49461E-3
rf_agc=3.20349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.68369E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19484E1
lens5a_imon=1.97154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.18272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.10959E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41282E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04183E1
cs_ea2_imon=1.39006E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.38473E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15564E1
os_ea1_imon=2.35474E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=9.42321E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=1.95125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.40182E-8
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-4.94013E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25888E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27015E1
iondef2_imon=1.58689E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=4.13337E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=8.55802E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5459E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.83084E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=8.06996E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.62434E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.71736E0
defgridb_imon=6.33377E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.44048E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07593E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66099E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31712E1
cs_fil1_imon=7.40712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80375E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67898E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51485E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.57933E-1	-7.35259E-1	-9.19418E0	-9.18903E0	4.88758E-3	9.30786E-2	2.72473E1	-3.26738E1	-3.26337E1	2.68337E1	1.1929E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00563E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.58052E-1	-7.35736E-1	-9.19418E0	-9.18894E0	5.34058E-3	9.30071E-2	2.73076E1	-3.26204E1	-3.26497E1	2.68045E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.57885E-1	-7.35593E-1	-9.19402E0	-9.18906E0	5.14984E-3	9.27925E-2	2.72709E1	-3.26411E1	-3.26556E1	2.68286E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.01209E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.58028E-1	-7.35664E-1	-9.19423E0	-9.18927E0	5.19753E-3	9.29117E-2	2.73183E1	-3.26621E1	-3.2653E1	2.67717E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.581E-1	-7.35497E-1	-9.19442E0	-9.18915E0	5.14984E-3	9.28402E-2	2.73033E1	-3.26747E1	-3.26428E1	2.67962E1	1.1929E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-7.58243E-1	-7.35474E-1	-9.19411E0	-9.1892E0	5.38826E-3	9.28402E-2	2.73183E1	-3.26543E1	-3.26639E1	2.68148E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-7.58123E-1	-7.35688E-1	-9.1943E0	-9.18908E0	5.34058E-3	9.30071E-2	2.72672E1	-3.26224E1	-3.26254E1	2.68022E1	1.19341E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.5798E-1	-7.35354E-1	-9.19406E0	-9.18899E0	5.38826E-3	9.31263E-2	2.72895E1	-3.26657E1	-3.26026E1	2.68088E1	1.1929E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0201E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.58243E-1	-7.35235E-1	-9.19375E0	-9.18934E0	5.14984E-3	9.30548E-2	2.72997E1	-3.26669E1	-3.26038E1	2.67974E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-7.58314E-1	-7.3545E-1	-9.19373E0	-9.18915E0	5.45979E-3	9.32217E-2	2.73171E1	-3.26434E1	-3.26386E1	2.68004E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-7.58266E-1	-7.35474E-1	-9.19373E0	-9.18911E0	5.26905E-3	9.29832E-2	2.73225E1	-3.26789E1	-3.26404E1	2.68058E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09263E0	-7.57957E-1	-7.35426E-1	-9.19383E0	-9.18963E0	4.62532E-3	9.30309E-2	2.73291E1	-3.26717E1	-3.26218E1	2.68058E1	1.1929E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.58052E-1	-7.35474E-1	-9.19378E0	-9.18953E0	5.05447E-3	9.29117E-2	2.73131E1	-3.26438E1	-3.2637E1	2.68119E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.57885E-1	-7.35307E-1	-9.19361E0	-9.18918E0	5.126E-3	9.28879E-2	2.73045E1	-3.26753E1	-3.26302E1	2.67998E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03712E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.57957E-1	-7.35283E-1	-9.19375E0	-9.1892E0	5.29289E-3	9.31263E-2	2.72957E1	-3.26514E1	-3.26372E1	2.67978E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-7.58052E-1	-7.35188E-1	-9.19392E0	-9.18934E0	5.24521E-3	9.29356E-2	2.73027E1	-3.2678E1	-3.26046E1	2.67845E1	1.1929E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.03976E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.58028E-1	-7.35569E-1	-9.19411E0	-9.18932E0	5.10216E-3	9.29117E-2	2.73016E1	-3.26561E1	-3.26086E1	2.6792E1	1.1929E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.58052E-1	-7.35545E-1	-9.19445E0	-9.18956E0	5.19753E-3	9.33409E-2	2.7275E1	-3.26413E1	-3.26384E1	2.6813E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.97647E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-7.58338E-1	-7.35426E-1	-9.19454E0	-9.18951E0	4.91142E-3	9.31501E-2	2.72949E1	-3.26825E1	-3.2593E1	2.68024E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-7.58266E-1	-7.35164E-1	-9.19449E0	-9.18944E0	4.91142E-3	9.28164E-2	2.72898E1	-3.27015E1	-3.25888E1	2.68112E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1