[Scan]
initial_time=2015-12-22T18:56:18
final_time=2015-12-22T18:56:37
ip_count=19
run=1021
dataset=5
scan=172
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09711E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-7.58529E-1
ql1_imon=1.39166E-8
ql2_vset=
ql2_vmon=-7.35331E-1
ql2_imon=2.04865E-9
ql3_vset=
ql3_vmon=-9.19402E0
ql3_imon=5.95391E-10
ql4_vset=
ql4_vmon=-9.18915E0
ql4_imon=9.18746E-11
mult1=-9.4262E-9
mult2=-2.72803E-9
rf_tmon=-5.10928E-3
rf_agc=3.23673E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.69566E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.90906E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.17818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=1.09697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.402E0
lens1_imon=2.60264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64539E1
os_ef1alow_imon=2.98912E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.41781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=3.04368E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.38488E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.29026E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.33888E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28334E0
cs_ionrep_imon=9.28262E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=1.95176E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.40084E-8
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26021E1
iondef3_imon=1.47802E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26468E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.0832E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24309E0
ionrepsh_imon=8.50395E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74385E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58435E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09279E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18662E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1066E1
os_restr2_imon=3.45828E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.32199E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.09147E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72947E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67692E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.81187E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.07131E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11566E0
cs_ionaccel_imon=-8.57807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=1.71928E-1
window_imon=-9.02986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.8624E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=8.04252E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.19678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.43729E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07752E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65924E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31667E1
cs_fil1_imon=7.71603E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.18143E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13825E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7198E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32898E-1
cs_fil2_imon=-2.39696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15389E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-7.58052E-1	-7.35402E-1	-9.19416E0	-9.18908E0	5.79357E-3	9.31978E-2	2.73393E1	-3.26515E1	-3.26631E1	2.68259E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.58052E-1	-7.35092E-1	-9.1939E0	-9.18882E0	5.48363E-3	9.32455E-2	2.73124E1	-3.26181E1	-3.25899E1	2.67929E1	1.1929E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-7.58004E-1	-7.35664E-1	-9.19399E0	-9.18925E0	5.38826E-3	9.33647E-2	2.72933E1	-3.2682E1	-3.26012E1	2.68146E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9978E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-7.57813E-1	-7.35497E-1	-9.19394E0	-9.1892E0	5.22137E-3	9.33886E-2	2.73063E1	-3.26793E1	-3.2615E1	2.68065E1	1.1929E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.98481E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.58076E-1	-7.35474E-1	-9.19425E0	-9.18901E0	5.19753E-3	9.31501E-2	2.73143E1	-3.26523E1	-3.26132E1	2.6802E1	1.1929E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.5829E-1	-7.35497E-1	-9.19442E0	-9.18918E0	5.4121E-3	9.31978E-2	2.72853E1	-3.26759E1	-3.26368E1	2.6813E1	1.1929E-7	2.51898E-3	2.51898E-3	6.32125E-3	3.01411E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.58362E-1	-7.35402E-1	-9.19428E0	-9.18918E0	5.67436E-3	9.31501E-2	2.72827E1	-3.26885E1	-3.26225E1	2.67668E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.58028E-1	-7.35307E-1	-9.19454E0	-9.18937E0	5.65052E-3	9.32217E-2	2.73171E1	-3.26771E1	-3.26104E1	2.67788E1	1.1929E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-7.581E-1	-7.35712E-1	-9.19411E0	-9.18937E0	5.57899E-3	9.29356E-2	2.72898E1	-3.26695E1	-3.26389E1	2.6816E1	1.1929E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-7.58266E-1	-7.35426E-1	-9.19397E0	-9.1893E0	5.48363E-3	9.31978E-2	2.7288E1	-3.26219E1	-3.26402E1	2.68175E1	1.1929E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-7.57933E-1	-7.35474E-1	-9.19428E0	-9.18908E0	5.45979E-3	9.31501E-2	2.72907E1	-3.26308E1	-3.2617E1	2.68046E1	1.1929E-7	2.51334E-3	2.51334E-3	6.35692E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-7.57837E-1	-7.3514E-1	-9.19428E0	-9.18925E0	5.34058E-3	9.30309E-2	2.72961E1	-3.26933E1	-3.26206E1	2.67938E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-7.57647E-1	-7.3514E-1	-9.19406E0	-9.1893E0	5.60284E-3	9.28402E-2	2.73069E1	-3.26326E1	-3.26008E1	2.68022E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.03027E-1
1.7E1	3.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-7.58171E-1	-7.35259E-1	-9.19423E0	-9.18932E0	5.50747E-3	9.31263E-2	2.73075E1	-3.2698E1	-3.25936E1	2.67746E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01347E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-7.58243E-1	-7.35545E-1	-9.19409E0	-9.18932E0	5.45979E-3	9.31978E-2	2.73118E1	-3.26658E1	-3.26413E1	2.6819E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-7.58004E-1	-7.35569E-1	-9.19411E0	-9.1893E0	5.50747E-3	9.3174E-2	2.72974E1	-3.26502E1	-3.26467E1	2.68004E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9978E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-7.58123E-1	-7.35474E-1	-9.19378E0	-9.18944E0	5.34058E-3	9.32932E-2	2.72937E1	-3.26452E1	-3.2626E1	2.68178E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09688E0	-7.5798E-1	-7.35211E-1	-9.19394E0	-9.18949E0	5.24521E-3	9.3317E-2	2.72779E1	-3.26486E1	-3.26648E1	2.68065E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-7.58195E-1	-7.35402E-1	-9.19409E0	-9.18918E0	5.17368E-3	9.3317E-2	2.72781E1	-3.2626E1	-3.26921E1	2.6789E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09711E0	-7.58529E-1	-7.35331E-1	-9.19402E0	-9.18915E0	4.98295E-3	9.32932E-2	2.72947E1	-3.26468E1	-3.26021E1	2.67692E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1