[Scan]
initial_time=2015-12-22T18:57:11
final_time=2015-12-22T18:57:30
ip_count=19
run=1021
dataset=5
scan=174
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-7.57933E-1
ql1_imon=1.38733E-8
ql2_vset=
ql2_vmon=-7.35521E-1
ql2_imon=2.07862E-9
ql3_vset=
ql3_vmon=-9.19433E0
ql3_imon=5.38147E-10
ql4_vset=
ql4_vmon=-9.1892E0
ql4_imon=7.70211E-11
mult1=-8.81134E-9
mult2=-2.85554E-9
rf_tmon=-4.77847E-3
rf_agc=3.25458E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.66934E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65644E0
bslens_imon=2.85795E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=1.99053E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05336E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53354E1
cs_ef1b_imon=3.16914E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02104E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04779E1
cs_ea1_imon=1.07976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39342E0
lens1_imon=2.55552E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98808E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03238E1
cs_ea2_imon=1.39992E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84585E1
cs_ef1a_imon=3.0482E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.38206E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=4.28991E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15387E1
os_ea1_imon=2.34058E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22545E0
cs_ionrep_imon=9.4245E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93483E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=1.95941E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.40302E-8
tplens_vset=1.4E-1
tplens_vmon=1.63158E0
tplens_imon=-3.40159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26247E1
iondef3_imon=1.51707E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26688E1
iondef2_imon=1.56817E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.08734E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27411E0
ionrepsh_imon=8.4894E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33466E1
lens5b_imon=2.19875E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5638E0
os_ea2_imon=-6.98208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00678E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.19764E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08757E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29667E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10602E1
os_restr2_imon=3.4482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.29998E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.09564E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72954E1
iondef1_imon=1.07281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67777E1
iondef4_imon=1.08816E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.78966E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=8.06894E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-8.2653E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56463E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=1.8525E-1
window_imon=-9.6554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.38973E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.4851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.52302E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.84516E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.68292E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47031E0
defgridb_imon=6.0213E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.44198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07903E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31667E1
cs_fil1_imon=6.58078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48136E-2
os_fil2_imon=-2.55334E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20775E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7982E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.48963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52429E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27199E-3
inlet_lpb_pmon=3.00479E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51793E-3
foreline_cvt_pmon=2.51793E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30449E-1
res40_imon=-2.42515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-7.57813E-1	-7.35664E-1	-9.19421E0	-9.18939E0	5.26905E-3	9.3174E-2	2.72941E1	-3.26544E1	-3.25773E1	2.68099E1	1.1929E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.00852E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-7.58123E-1	-7.35521E-1	-9.19409E0	-9.18922E0	5.48363E-3	9.2864E-2	2.72993E1	-3.26747E1	-3.26347E1	2.68024E1	1.1929E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-7.58076E-1	-7.35736E-1	-9.19406E0	-9.18937E0	5.29289E-3	9.29594E-2	2.73201E1	-3.26981E1	-3.25894E1	2.67734E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0071E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.58243E-1	-7.35474E-1	-9.19402E0	-9.18944E0	5.38826E-3	9.27687E-2	2.73039E1	-3.26944E1	-3.2606E1	2.68046E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02396E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-7.5798E-1	-7.3545E-1	-9.19435E0	-9.18939E0	5.24521E-3	9.30309E-2	2.72985E1	-3.26452E1	-3.26182E1	2.6813E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-7.5779E-1	-7.35617E-1	-9.19414E0	-9.18899E0	5.22137E-3	9.2864E-2	2.73027E1	-3.26518E1	-3.2644E1	2.68376E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-7.5779E-1	-7.35617E-1	-9.19421E0	-9.18903E0	5.55515E-3	9.31025E-2	2.73005E1	-3.2653E1	-3.26173E1	2.68244E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.58123E-1	-7.35617E-1	-9.19454E0	-9.18922E0	5.38826E-3	9.26018E-2	2.73105E1	-3.26427E1	-3.26256E1	2.68147E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31151E-3	3.02199E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-7.57885E-1	-7.35736E-1	-9.19433E0	-9.18918E0	5.76973E-3	9.30786E-2	2.72512E1	-3.26615E1	-3.26315E1	2.67962E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31688E-3	3.00423E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09688E0	-7.57813E-1	-7.35569E-1	-9.19454E0	-9.18925E0	5.43594E-3	9.29594E-2	2.73169E1	-3.26691E1	-3.26248E1	2.68023E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-7.5779E-1	-7.35354E-1	-9.19459E0	-9.18925E0	5.36442E-3	9.31025E-2	2.73249E1	-3.26825E1	-3.25834E1	2.68277E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-7.57742E-1	-7.35283E-1	-9.19433E0	-9.18932E0	5.45979E-3	9.30548E-2	2.72895E1	-3.26849E1	-3.26362E1	2.67854E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09704E0	-7.57957E-1	-7.35378E-1	-9.19423E0	-9.18951E0	5.19753E-3	9.31501E-2	2.72919E1	-3.26326E1	-3.26242E1	2.67854E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.58028E-1	-7.35879E-1	-9.1944E0	-9.18932E0	5.05447E-3	9.29832E-2	2.73201E1	-3.2641E1	-3.26296E1	2.68376E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.03449E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-7.57885E-1	-7.35855E-1	-9.19394E0	-9.18958E0	5.24521E-3	9.32455E-2	2.7298E1	-3.26579E1	-3.26585E1	2.68082E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.03449E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09719E0	-7.57933E-1	-7.35617E-1	-9.19421E0	-9.18922E0	5.17368E-3	9.31501E-2	2.73051E1	-3.26639E1	-3.2611E1	2.6816E1	1.1929E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.03286E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-7.57933E-1	-7.35378E-1	-9.19394E0	-9.18908E0	5.24521E-3	9.33409E-2	2.72853E1	-3.26735E1	-3.26116E1	2.6801E1	1.1929E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.02277E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.58076E-1	-7.35211E-1	-9.19411E0	-9.18927E0	5.43594E-3	9.32932E-2	2.72929E1	-3.26619E1	-3.25982E1	2.68221E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-7.58052E-1	-7.35569E-1	-9.19402E0	-9.18913E0	5.17368E-3	9.3317E-2	2.73517E1	-3.26812E1	-3.26137E1	2.6813E1	1.1929E-7	2.51477E-3	2.51477E-3	6.32201E-3	3.0141E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-7.57933E-1	-7.35521E-1	-9.19433E0	-9.1892E0	5.31673E-3	9.31501E-2	2.72954E1	-3.26688E1	-3.26247E1	2.67777E1	1.1929E-7	2.51793E-3	2.51793E-3	6.27199E-3	3.00479E-1