[Scan]
initial_time=2015-12-22T18:59:24
final_time=2015-12-22T18:59:44
ip_count=19
run=1021
dataset=5
scan=179
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-7.57504E-1
ql1_imon=1.39278E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=1.99085E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=4.18997E-10
ql4_vset=
ql4_vmon=-9.1892E0
ql4_imon=7.94768E-11
mult1=-1.00674E-8
mult2=-2.6624E-9
rf_tmon=-4.38528E-3
rf_agc=3.3417E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.6704E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.5332E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.9804E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53702E1
cs_ef1b_imon=3.1754E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=1.10405E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41582E0
lens1_imon=2.55711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64967E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03559E1
cs_ea2_imon=1.39639E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.02249E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.38622E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.30729E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15214E1
os_ea1_imon=2.36222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23388E0
cs_ionrep_imon=9.58904E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93468E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.95454E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.4057E-8
tplens_vset=1.4E-1
tplens_vmon=1.58394E0
tplens_imon=-2.12637E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26435E1
iondef3_imon=1.51422E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2669E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98527E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.04283E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28511E0
ionrepsh_imon=8.47568E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.17301E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56971E0
os_ea2_imon=-5.30253E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00592E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7109E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07715E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.21558E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=3.45411E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.3208E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.09459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.09312E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68219E1
iondef4_imon=1.08225E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=5.75939E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=8.10634E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-8.12629E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47341E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.67741E-6
window_vset=0.0E0
window_vmon=2.03206E-1
window_imon=-9.41213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86217E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.64578E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.52559E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.17448E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43306E0
defgridb_imon=6.21139E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.44158E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07665E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66231E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31685E1
cs_fil1_imon=7.69286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55212E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67932E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24681E-2
os_fil2_imon=-2.64023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03399E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58012E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.08998E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32622E-3
inlet_lpb_pmon=3.01721E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51521E-3
foreline_cvt_pmon=2.51521E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22919E-1
res40_imon=-2.52245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=231
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.57694E-1	-7.35784E-1	-9.19473E0	-9.18932E0	5.29289E-3	9.31978E-2	2.72889E1	-3.2655E1	-3.26272E1	2.68146E1	1.1929E-7	2.51498E-3	2.51498E-3	6.37915E-3	3.006E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.57813E-1	-7.35354E-1	-9.1943E0	-9.18949E0	5.74589E-3	9.3174E-2	2.73165E1	-3.26324E1	-3.26693E1	2.68132E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-7.57599E-1	-7.35092E-1	-9.19459E0	-9.18918E0	5.65052E-3	9.2864E-2	2.73201E1	-3.26687E1	-3.26098E1	2.68016E1	1.1929E-7	2.51611E-3	2.51611E-3	6.34737E-3	3.00522E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.57551E-1	-7.35235E-1	-9.19411E0	-9.18901E0	5.65052E-3	9.31025E-2	2.72854E1	-3.26671E1	-3.26138E1	2.68065E1	1.1929E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.57742E-1	-7.35331E-1	-9.19418E0	-9.1892E0	5.74589E-3	9.31263E-2	2.73081E1	-3.26386E1	-3.26374E1	2.67956E1	1.1929E-7	2.51498E-3	2.51498E-3	6.25478E-3	3.00348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-7.5767E-1	-7.35283E-1	-9.19423E0	-9.18934E0	5.48363E-3	9.30786E-2	2.73118E1	-3.26713E1	-3.26015E1	2.67951E1	1.1929E-7	2.51443E-3	2.51443E-3	6.38459E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-7.57575E-1	-7.35188E-1	-9.19437E0	-9.18899E0	5.53131E-3	9.31501E-2	2.72787E1	-3.26699E1	-3.26008E1	2.67944E1	1.1929E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.57766E-1	-7.35354E-1	-9.19437E0	-9.18908E0	5.55515E-3	9.32693E-2	2.7309E1	-3.2668E1	-3.26506E1	2.68322E1	1.1929E-7	2.51334E-3	2.51334E-3	6.25284E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-7.57766E-1	-7.35116E-1	-9.19449E0	-9.18908E0	5.79357E-3	9.33647E-2	2.72865E1	-3.2641E1	-3.26152E1	2.68196E1	1.1929E-7	2.5165E-3	2.5165E-3	6.35349E-3	3.01365E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.57885E-1	-7.35402E-1	-9.1944E0	-9.18903E0	5.53131E-3	9.31263E-2	2.72845E1	-3.26747E1	-3.26248E1	2.67988E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.5779E-1	-7.35617E-1	-9.19456E0	-9.18896E0	5.53131E-3	9.30786E-2	2.73027E1	-3.26753E1	-3.26032E1	2.68148E1	1.1929E-7	2.51725E-3	2.51725E-3	6.33021E-3	3.00251E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.57432E-1	-7.35402E-1	-9.19425E0	-9.18899E0	5.126E-3	9.29356E-2	2.73069E1	-3.26284E1	-3.26603E1	2.67986E1	1.1929E-7	2.51935E-3	2.51935E-3	6.30466E-3	3.02527E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.57647E-1	-7.3545E-1	-9.19425E0	-9.18894E0	5.126E-3	9.29117E-2	2.72913E1	-3.26783E1	-3.26122E1	2.68076E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.5748E-1	-7.35092E-1	-9.19473E0	-9.18908E0	5.36442E-3	9.28879E-2	2.72823E1	-3.26831E1	-3.26152E1	2.6816E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01609E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-7.57337E-1	-7.35188E-1	-9.19425E0	-9.18953E0	5.03063E-3	9.31501E-2	2.73201E1	-3.26603E1	-3.2614E1	2.68154E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-7.57575E-1	-7.35426E-1	-9.1948E0	-9.18901E0	5.55515E-3	9.3317E-2	2.73128E1	-3.26732E1	-3.26331E1	2.68592E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-7.5736E-1	-7.35092E-1	-9.19421E0	-9.18906E0	5.57899E-3	9.29117E-2	2.73315E1	-3.26681E1	-3.26068E1	2.67932E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.03027E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-7.57313E-1	-7.34782E-1	-9.19433E0	-9.1892E0	5.38826E-3	9.32217E-2	2.73207E1	-3.26532E1	-3.26071E1	2.6784E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.5767E-1	-7.35068E-1	-9.19456E0	-9.18908E0	5.43594E-3	9.32455E-2	2.73123E1	-3.26739E1	-3.26394E1	2.67716E1	1.1929E-7	2.51829E-3	2.51829E-3	6.31042E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.57504E-1	-7.35164E-1	-9.19445E0	-9.1892E0	5.19753E-3	9.31263E-2	2.73147E1	-3.2669E1	-3.26435E1	2.68219E1	1.1929E-7	2.51521E-3	2.51521E-3	6.32622E-3	3.01721E-1