[Scan]
initial_time=2015-12-22T19:00:45
final_time=2015-12-22T19:01:04
ip_count=19
run=1021
dataset=5
scan=182
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08719E-4
ql1_vset=
ql1_vmon=-7.57408E-1
ql1_imon=1.38817E-8
ql2_vset=
ql2_vmon=-7.35331E-1
ql2_imon=1.99921E-9
ql3_vset=
ql3_vmon=-9.1944E0
ql3_imon=4.00293E-10
ql4_vset=
ql4_vmon=-9.18922E0
ql4_imon=1.02878E-10
mult1=-9.5357E-9
mult2=-2.6727E-9
rf_tmon=-5.75613E-3
rf_agc=3.19877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.69047E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.63174E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19777E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.19353E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.09352E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04139E1
cs_ea2_imon=1.40109E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.04865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.38864E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11039E1
os_restr1_imon=4.29094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.3316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63912E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28513E0
cs_ionrep_imon=9.49112E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.40541E-8
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-8.65226E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.07443E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=8.28772E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56947E0
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3947E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10559E1
os_restr2_imon=3.46167E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.82111E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.1034E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-7.88688E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30221E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.44655E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07888E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31683E1
cs_fil1_imon=6.392E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.60554E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68242E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54716E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53698E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.78513E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.57408E-1	-7.35164E-1	-9.19452E0	-9.18918E0	4.98295E-3	9.27687E-2	2.73093E1	-3.26813E1	-3.26152E1	2.67992E1	1.1929E-7	2.50989E-3	2.50989E-3	6.29128E-3	3.0148E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.57837E-1	-7.35211E-1	-9.19421E0	-9.18891E0	5.38826E-3	9.29117E-2	2.72867E1	-3.26774E1	-3.26046E1	2.67944E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.57766E-1	-7.3545E-1	-9.19406E0	-9.1887E0	5.36442E-3	9.3174E-2	2.72964E1	-3.26683E1	-3.26266E1	2.67887E1	1.1929E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.01475E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.57742E-1	-7.35354E-1	-9.19425E0	-9.1888E0	5.43594E-3	9.33647E-2	2.72986E1	-3.26579E1	-3.26561E1	2.68041E1	1.1929E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.03383E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.57575E-1	-7.35521E-1	-9.1943E0	-9.18891E0	5.07832E-3	9.32217E-2	2.72727E1	-3.26651E1	-3.26176E1	2.67788E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.57623E-1	-7.35593E-1	-9.19456E0	-9.18901E0	5.4121E-3	9.3174E-2	2.72733E1	-3.26807E1	-3.25942E1	2.68214E1	1.1929E-7	2.51607E-3	2.51607E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-7.57766E-1	-7.3576E-1	-9.19435E0	-9.18894E0	5.45979E-3	9.31263E-2	2.73004E1	-3.26632E1	-3.26337E1	2.6825E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.57456E-1	-7.35426E-1	-9.19428E0	-9.1893E0	5.34058E-3	9.32693E-2	2.7269E1	-3.2644E1	-3.26338E1	2.67746E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.57527E-1	-7.35235E-1	-9.1944E0	-9.18901E0	5.29289E-3	9.31978E-2	2.7291E1	-3.26634E1	-3.25979E1	2.67794E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.57408E-1	-7.35188E-1	-9.19454E0	-9.18941E0	5.48363E-3	9.31025E-2	2.73116E1	-3.26673E1	-3.26248E1	2.681E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.57527E-1	-7.3545E-1	-9.19414E0	-9.18927E0	5.43594E-3	9.30071E-2	2.72745E1	-3.26404E1	-3.26789E1	2.67938E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-7.5748E-1	-7.35402E-1	-9.19428E0	-9.18941E0	5.31673E-3	9.31025E-2	2.72787E1	-3.26422E1	-3.26639E1	2.68178E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.57504E-1	-7.35044E-1	-9.1943E0	-9.1892E0	5.26905E-3	9.32693E-2	2.73153E1	-3.26771E1	-3.26014E1	2.68124E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.5767E-1	-7.3514E-1	-9.19442E0	-9.18946E0	5.34058E-3	9.29832E-2	2.7311E1	-3.26897E1	-3.26042E1	2.67848E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.57647E-1	-7.35307E-1	-9.19433E0	-9.18913E0	5.55515E-3	9.31501E-2	2.73219E1	-3.26891E1	-3.26524E1	2.68154E1	1.1929E-7	2.50989E-3	2.50989E-3	6.3074E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.57432E-1	-7.35044E-1	-9.19466E0	-9.18934E0	5.43594E-3	9.35316E-2	2.73057E1	-3.26651E1	-3.26104E1	2.67938E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01609E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.57456E-1	-7.35378E-1	-9.19423E0	-9.1893E0	5.43594E-3	9.29356E-2	2.73093E1	-3.26705E1	-3.26194E1	2.6828E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.57527E-1	-7.35044E-1	-9.19471E0	-9.18932E0	5.34058E-3	9.32932E-2	2.73275E1	-3.26231E1	-3.26384E1	2.68505E1	1.1929E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-7.5736E-1	-7.35259E-1	-9.1943E0	-9.18911E0	5.43594E-3	9.33409E-2	2.72809E1	-3.26785E1	-3.26408E1	2.68052E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.57408E-1	-7.35331E-1	-9.1944E0	-9.18922E0	5.31673E-3	9.31978E-2	2.72925E1	-3.26404E1	-3.26284E1	2.67932E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1