[Scan]
initial_time=2015-12-22T19:02:05
final_time=2015-12-22T19:02:24
ip_count=19
run=1021
dataset=5
scan=185
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-7.57408E-1
ql1_imon=1.38622E-8
ql2_vset=
ql2_vmon=-7.35259E-1
ql2_imon=2.03781E-9
ql3_vset=
ql3_vmon=-9.19454E0
ql3_imon=3.83556E-10
ql4_vset=
ql4_vmon=-9.18911E0
ql4_imon=1.0798E-10
mult1=-9.48754E-9
mult2=-2.79247E-9
rf_tmon=-5.8042E-3
rf_agc=3.26727E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.70696E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.98085E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.1802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0523E1
cs_ea1_imon=1.09918E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3879E0
lens1_imon=2.51848E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.41561E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=1.39254E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.28842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.35638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=9.4982E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=1.95449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.40702E-8
tplens_vset=1.4E-1
tplens_vmon=1.58716E0
tplens_imon=-3.48439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26308E1
iondef2_imon=1.56461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.09772E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21552E0
ionrepsh_imon=8.53902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55885E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.43675E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.4541E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.86789E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.11794E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-7.95896E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.49324E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.04893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35536E0
defgridb_imon=6.25964E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.43261E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07599E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66543E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3167E1
cs_fil1_imon=6.58421E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82177E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68369E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11662E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.32437E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.98645E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=194
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.57313E-1	-7.35021E-1	-9.19392E0	-9.18946E0	5.43594E-3	9.28879E-2	2.73535E1	-3.26549E1	-3.26484E1	2.68088E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02769E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-7.57098E-1	-7.35235E-1	-9.19387E0	-9.18951E0	5.4121E-3	9.30309E-2	2.7288E1	-3.26597E1	-3.26272E1	2.68076E1	1.1929E-7	2.52659E-3	2.52659E-3	6.32328E-3	3.02875E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.57122E-1	-7.34973E-1	-9.19416E0	-9.18949E0	5.34058E-3	9.29832E-2	2.73393E1	-3.26455E1	-3.26679E1	2.67902E1	1.1929E-7	2.51498E-3	2.51498E-3	6.33021E-3	3.00522E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.57122E-1	-7.35068E-1	-9.19425E0	-9.18918E0	5.17368E-3	9.29832E-2	2.7286E1	-3.26318E1	-3.26063E1	2.68146E1	1.1929E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-7.57504E-1	-7.35235E-1	-9.19445E0	-9.18937E0	5.126E-3	9.32932E-2	2.72865E1	-3.26194E1	-3.26338E1	2.68124E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.57599E-1	-7.35116E-1	-9.19445E0	-9.18934E0	5.03063E-3	9.30309E-2	2.72853E1	-3.26663E1	-3.26224E1	2.68034E1	1.1929E-7	2.51826E-3	2.51826E-3	6.30192E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-7.57527E-1	-7.35211E-1	-9.19421E0	-9.18937E0	5.14984E-3	9.31025E-2	2.73092E1	-3.26555E1	-3.26372E1	2.67878E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.57337E-1	-7.35211E-1	-9.19409E0	-9.18925E0	5.26905E-3	9.31501E-2	2.72965E1	-3.26364E1	-3.25874E1	2.67938E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.01104E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-7.57408E-1	-7.34973E-1	-9.19459E0	-9.18922E0	5.38826E-3	9.29594E-2	2.73208E1	-3.26461E1	-3.26154E1	2.67892E1	1.1929E-7	2.51725E-3	2.51725E-3	6.34737E-3	2.9944E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-7.57289E-1	-7.35044E-1	-9.19433E0	-9.18927E0	5.14984E-3	9.29832E-2	2.73344E1	-3.26718E1	-3.26158E1	2.67998E1	1.1929E-7	2.51549E-3	2.51549E-3	6.3074E-3	2.98937E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.57217E-1	-7.34997E-1	-9.19454E0	-9.1892E0	5.10216E-3	9.29356E-2	2.73039E1	-3.26729E1	-3.25635E1	2.68088E1	1.1929E-7	2.51411E-3	2.51411E-3	6.3016E-3	2.98985E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.57384E-1	-7.34997E-1	-9.19464E0	-9.1893E0	5.4121E-3	9.28402E-2	2.73039E1	-3.26452E1	-3.26729E1	2.67932E1	1.1929E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-7.57384E-1	-7.35092E-1	-9.19464E0	-9.18911E0	5.29289E-3	9.28402E-2	2.73045E1	-3.26771E1	-3.26188E1	2.67968E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-7.57289E-1	-7.35235E-1	-9.19487E0	-9.18934E0	5.57899E-3	9.27925E-2	2.73213E1	-3.26434E1	-3.2623E1	2.67686E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00942E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.57146E-1	-7.34901E-1	-9.19449E0	-9.18949E0	5.67436E-3	9.27925E-2	2.72997E1	-3.26254E1	-3.26224E1	2.68136E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.57337E-1	-7.35211E-1	-9.19466E0	-9.18889E0	5.48363E-3	9.28164E-2	2.73405E1	-3.26314E1	-3.26422E1	2.67974E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-7.57337E-1	-7.35426E-1	-9.19466E0	-9.1893E0	5.74589E-3	9.29832E-2	2.72624E1	-3.26789E1	-3.26284E1	2.68142E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.57337E-1	-7.35283E-1	-9.19461E0	-9.1892E0	5.45979E-3	9.28879E-2	2.73195E1	-3.26735E1	-3.2608E1	2.6807E1	1.1929E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.0041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.5717E-1	-7.35116E-1	-9.19454E0	-9.18937E0	5.48363E-3	9.27925E-2	2.73128E1	-3.2652E1	-3.26402E1	2.68279E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-7.57408E-1	-7.35259E-1	-9.19454E0	-9.18911E0	5.34058E-3	9.29832E-2	2.73339E1	-3.26308E1	-3.26098E1	2.68262E1	1.1929E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.02659E-1