[Scan]
initial_time=2015-12-22T19:03:25
final_time=2015-12-22T19:03:44
ip_count=19
run=1021
dataset=5
scan=188
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-7.57408E-1
ql1_imon=1.38728E-8
ql2_vset=
ql2_vmon=-7.35044E-1
ql2_imon=1.99782E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=3.23439E-10
ql4_vset=
ql4_vmon=-9.18906E0
ql4_imon=8.57234E-11
mult1=-1.00053E-8
mult2=-2.6228E-9
rf_tmon=-4.01975E-3
rf_agc=3.41988E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.68911E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62138E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20397E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53701E1
cs_ef1b_imon=3.17422E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.07405E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40677E0
lens1_imon=2.86181E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64629E1
os_ef1alow_imon=2.97182E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.40605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84344E1
cs_ef1a_imon=3.05002E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.39328E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.29342E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.36204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63674E1
os_ef1bup_imon=3.09283E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=9.35308E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01898E1
cs_anode1_imon=1.95416E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.40542E-8
tplens_vset=1.4E-1
tplens_vmon=1.5848E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26212E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.07171E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=8.33727E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.19958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74607E1
cs_ef2b_imon=3.13706E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54705E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71334E1
cs_ef2a_imon=3.18766E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0979E0
os_ef2alow_imon=-2.61963E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37133E-1
os_ef2bup_imon=-5.25223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10852E1
os_restr2_imon=3.45552E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02016E1
cs_anode2_imon=2.09393E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.09432E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.80018E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=8.13003E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12071E0
cs_ionaccel_imon=-9.77798E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47272E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56334E1
einzel_imon=7.75861E-6
window_vset=0.0E0
window_vmon=1.71812E-1
window_imon=-9.42414E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86491E1
mask2_imon=-5.63801E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.32335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.36747E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58273E0
defgridb_imon=6.3906E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.41907E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66325E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31704E1
cs_fil1_imon=7.65284E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.60488E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68076E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.51427E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0857E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51799E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31749E-1
cs_fil2_imon=-2.35504E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.65519E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22395E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.63082E-1
res40_imon=-2.38964E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-7.57337E-1	-7.35021E-1	-9.19433E0	-9.18913E0	5.17368E-3	9.31978E-2	2.72921E1	-3.26732E1	-3.26343E1	2.67974E1	1.1929E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9841E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-7.57289E-1	-7.35378E-1	-9.19449E0	-9.18932E0	5.31673E-3	9.32932E-2	2.72939E1	-3.2684E1	-3.2621E1	2.67745E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-7.57384E-1	-7.35569E-1	-9.1943E0	-9.18906E0	5.26905E-3	9.3317E-2	2.72856E1	-3.26484E1	-3.26738E1	2.68024E1	1.1929E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.01881E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.5748E-1	-7.35235E-1	-9.19442E0	-9.18925E0	5.29289E-3	9.31263E-2	2.73126E1	-3.26573E1	-3.26185E1	2.68262E1	1.1929E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-7.5748E-1	-7.35354E-1	-9.19437E0	-9.18941E0	5.24521E-3	9.31025E-2	2.73009E1	-3.2644E1	-3.2623E1	2.6852E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.57313E-1	-7.35188E-1	-9.19442E0	-9.18913E0	5.38826E-3	9.29356E-2	2.72986E1	-3.26667E1	-3.26425E1	2.68112E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.57432E-1	-7.3545E-1	-9.19425E0	-9.18946E0	5.60284E-3	9.31263E-2	2.72889E1	-3.26975E1	-3.2626E1	2.68088E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.57551E-1	-7.35164E-1	-9.19411E0	-9.18939E0	5.74589E-3	9.32455E-2	2.73161E1	-3.26719E1	-3.26156E1	2.68148E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.57575E-1	-7.35378E-1	-9.1943E0	-9.18953E0	5.53131E-3	9.27687E-2	2.73321E1	-3.26765E1	-3.26026E1	2.68124E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.5748E-1	-7.35068E-1	-9.19425E0	-9.1898E0	5.76973E-3	9.32217E-2	2.73399E1	-3.26873E1	-3.26104E1	2.67986E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.57599E-1	-7.35283E-1	-9.19421E0	-9.18932E0	5.6982E-3	9.29117E-2	2.72781E1	-3.26903E1	-3.26807E1	2.67938E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-7.57551E-1	-7.35497E-1	-9.19414E0	-9.1892E0	5.84126E-3	9.32455E-2	2.73051E1	-3.27149E1	-3.25984E1	2.6804E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-7.57456E-1	-7.35474E-1	-9.1943E0	-9.18944E0	5.60284E-3	9.31978E-2	2.73207E1	-3.26849E1	-3.26098E1	2.681E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.03185E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-7.5736E-1	-7.35474E-1	-9.19418E0	-9.18932E0	5.36442E-3	9.32455E-2	2.73098E1	-3.26543E1	-3.26284E1	2.67968E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9952E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-7.57122E-1	-7.35331E-1	-9.19418E0	-9.1893E0	5.34058E-3	9.3174E-2	2.73004E1	-3.26703E1	-3.25971E1	2.68186E1	1.1929E-7	2.50989E-3	2.50989E-3	6.33436E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-7.56979E-1	-7.3545E-1	-9.19406E0	-9.18918E0	5.60284E-3	9.31501E-2	2.73039E1	-3.26795E1	-3.26428E1	2.68154E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9952E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.56979E-1	-7.35497E-1	-9.19392E0	-9.18906E0	5.38826E-3	9.32217E-2	2.72979E1	-3.26693E1	-3.26332E1	2.67752E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.57003E-1	-7.35044E-1	-9.19406E0	-9.18941E0	5.55515E-3	9.32217E-2	2.72815E1	-3.26803E1	-3.26437E1	2.67854E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01995E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-7.57217E-1	-7.3514E-1	-9.19406E0	-9.18925E0	5.31673E-3	9.2864E-2	2.73057E1	-3.26691E1	-3.25765E1	2.68036E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.57408E-1	-7.35044E-1	-9.19445E0	-9.18906E0	5.50747E-3	9.3317E-2	2.72889E1	-3.26212E1	-3.26494E1	2.6825E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.01995E-1