[Scan]
initial_time=2015-12-22T19:03:51
final_time=2015-12-22T19:04:11
ip_count=19
run=1021
dataset=5
scan=189
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-7.57432E-1
ql1_imon=1.38552E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=2.03652E-9
ql3_vset=
ql3_vmon=-9.19435E0
ql3_imon=3.21615E-10
ql4_vset=
ql4_vmon=-9.18932E0
ql4_imon=1.18244E-10
mult1=-8.96738E-9
mult2=-2.93884E-9
rf_tmon=-3.94317E-3
rf_agc=3.37338E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.66519E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.96649E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=1.115E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44226E0
lens1_imon=2.78649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04261E1
cs_ea2_imon=1.38501E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.38783E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.34465E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.10524E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=9.39798E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.95449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.4042E-8
tplens_vset=1.4E-1
tplens_vmon=1.63663E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.06226E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=8.57965E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3394E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74982E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5465E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10441E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31061E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73181E1
iondef1_imon=1.11932E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.86226E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=8.114E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-7.45441E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.06531E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=8.01368E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.83846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.39362E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.43075E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66371E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31677E1
cs_fil1_imon=7.92369E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.98395E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68043E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.32666E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=3.00171E-1
chamber_ion_pmon=1.19316E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.32573E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.57837E-1	-7.34901E-1	-9.19423E0	-9.18934E0	5.53131E-3	9.29356E-2	2.72835E1	-3.26528E1	-3.26624E1	2.6825E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.5779E-1	-7.35259E-1	-9.19404E0	-9.1893E0	5.36442E-3	9.31025E-2	2.72739E1	-3.2667E1	-3.26034E1	2.68076E1	1.1929E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.02368E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.57504E-1	-7.35092E-1	-9.19409E0	-9.18908E0	5.38826E-3	9.31978E-2	2.73269E1	-3.2685E1	-3.26278E1	2.67943E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01871E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.57527E-1	-7.35164E-1	-9.19425E0	-9.1893E0	5.34058E-3	9.2864E-2	2.73051E1	-3.26644E1	-3.26331E1	2.68256E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-7.57504E-1	-7.34949E-1	-9.19447E0	-9.18908E0	5.26905E-3	9.31978E-2	2.73263E1	-3.26354E1	-3.2636E1	2.68279E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-7.57527E-1	-7.34925E-1	-9.1943E0	-9.18915E0	5.45979E-3	9.31501E-2	2.72909E1	-3.2639E1	-3.2639E1	2.68406E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.03286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-7.57575E-1	-7.34997E-1	-9.19411E0	-9.18894E0	5.53131E-3	9.34362E-2	2.72901E1	-3.26518E1	-3.2599E1	2.67986E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09286E0	-7.57694E-1	-7.35068E-1	-9.19387E0	-9.18891E0	5.19753E-3	9.31501E-2	2.72823E1	-3.26747E1	-3.26116E1	2.68118E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-7.57623E-1	-7.35378E-1	-9.19414E0	-9.18934E0	5.31673E-3	9.27687E-2	2.73105E1	-3.26927E1	-3.26188E1	2.68689E1	1.1929E-7	2.5068E-3	2.5068E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.57527E-1	-7.35044E-1	-9.19399E0	-9.18915E0	5.6982E-3	9.28402E-2	2.7275E1	-3.26472E1	-3.26437E1	2.67879E1	1.1929E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.57408E-1	-7.35211E-1	-9.19397E0	-9.18937E0	5.45979E-3	9.29117E-2	2.72991E1	-3.26549E1	-3.25719E1	2.6789E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.57909E-1	-7.34901E-1	-9.19411E0	-9.18901E0	5.62668E-3	9.30548E-2	2.73207E1	-3.26498E1	-3.26266E1	2.68094E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.02769E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.57861E-1	-7.34735E-1	-9.19402E0	-9.18965E0	5.48363E-3	9.30548E-2	2.72933E1	-3.26461E1	-3.26443E1	2.68046E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.02769E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.57504E-1	-7.34925E-1	-9.19414E0	-9.18915E0	5.43594E-3	9.32693E-2	2.73006E1	-3.26387E1	-3.26305E1	2.67876E1	1.1929E-7	2.52867E-3	2.52867E-3	6.3074E-3	3.00041E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.57504E-1	-7.3514E-1	-9.19409E0	-9.18894E0	5.17368E-3	9.28402E-2	2.73015E1	-3.26561E1	-3.2611E1	2.6792E1	1.1929E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99613E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-7.57146E-1	-7.35164E-1	-9.19423E0	-9.18865E0	5.07832E-3	9.29117E-2	2.72574E1	-3.26572E1	-3.2634E1	2.68256E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01871E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-7.57289E-1	-7.3514E-1	-9.19416E0	-9.18913E0	5.34058E-3	9.29117E-2	2.72827E1	-3.26614E1	-3.26472E1	2.6822E1	1.1929E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.02545E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.57337E-1	-7.35188E-1	-9.19409E0	-9.18946E0	5.38826E-3	9.29356E-2	2.72526E1	-3.2698E1	-3.2652E1	2.67956E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.04582E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.5736E-1	-7.34925E-1	-9.19425E0	-9.18915E0	5.48363E-3	9.30071E-2	2.73186E1	-3.26444E1	-3.25789E1	2.68022E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03185E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.57432E-1	-7.34878E-1	-9.19435E0	-9.18932E0	5.45979E-3	9.29356E-2	2.73181E1	-3.26561E1	-3.26231E1	2.68154E1	1.19316E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00171E-1