[Scan]
initial_time=2015-12-22T19:04:18
final_time=2015-12-22T19:04:37
ip_count=19
run=1021
dataset=5
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-7.57003E-1
ql1_imon=1.38599E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=2.02237E-9
ql3_vset=
ql3_vmon=-9.19409E0
ql3_imon=2.75207E-10
ql4_vset=
ql4_vmon=-9.18925E0
ql4_imon=9.33886E-11
mult1=-9.65304E-9
mult2=-2.7311E-9
rf_tmon=-4.60386E-3
rf_agc=3.33858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.70488E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53702E1
cs_ef1b_imon=3.17887E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04552E1
cs_ea1_imon=1.06733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43568E0
lens1_imon=2.50786E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.3972E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.05237E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.39009E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.27983E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63323E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27038E0
cs_ionrep_imon=9.45572E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=1.9601E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.40576E-8
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.03934E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=8.69475E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56711E0
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08815E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17503E-1
os_ef2bup_imon=-5.33046E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.46037E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.09181E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.08051E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.86233E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.12204E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-9.34263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=1.96834E-1
window_imon=-1.06632E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.35331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.03831E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=5.83845E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.42119E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3167E1
cs_fil1_imon=7.71024E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.31465E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6793E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.51859E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.00889E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19993E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22391E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.02545E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.08439E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-7.57241E-1	-7.35116E-1	-9.19437E0	-9.18939E0	5.43594E-3	9.29356E-2	2.73183E1	-3.26885E1	-3.26332E1	2.68172E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.57146E-1	-7.35068E-1	-9.19428E0	-9.18903E0	5.48363E-3	9.32932E-2	2.72953E1	-3.26456E1	-3.2697E1	2.68219E1	1.1929E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-7.5736E-1	-7.34973E-1	-9.19416E0	-9.1892E0	5.26905E-3	9.32455E-2	2.72939E1	-3.26402E1	-3.2639E1	2.68018E1	1.1929E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.57384E-1	-7.35331E-1	-9.19428E0	-9.18922E0	5.19753E-3	9.30548E-2	2.73393E1	-3.26838E1	-3.26089E1	2.68058E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.57384E-1	-7.35068E-1	-9.19445E0	-9.18949E0	5.34058E-3	9.32932E-2	2.72727E1	-3.26524E1	-3.25984E1	2.6804E1	1.1929E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.57003E-1	-7.35044E-1	-9.19454E0	-9.18939E0	5.31673E-3	9.30309E-2	2.73003E1	-3.26861E1	-3.26038E1	2.68004E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-7.57003E-1	-7.35283E-1	-9.19423E0	-9.18922E0	5.22137E-3	9.31978E-2	2.72874E1	-3.26413E1	-3.26349E1	2.68036E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.56979E-1	-7.35044E-1	-9.19435E0	-9.1892E0	5.38826E-3	9.30786E-2	2.73014E1	-3.26603E1	-3.26162E1	2.67968E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.57098E-1	-7.35044E-1	-9.19423E0	-9.1893E0	5.72205E-3	9.32455E-2	2.72684E1	-3.2626E1	-3.26212E1	2.67901E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.57122E-1	-7.34973E-1	-9.19418E0	-9.1893E0	5.24521E-3	9.29117E-2	2.72997E1	-3.26873E1	-3.26104E1	2.6798E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-7.56884E-1	-7.34854E-1	-9.19421E0	-9.18891E0	5.43594E-3	9.32455E-2	2.73466E1	-3.27113E1	-3.26224E1	2.68023E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01478E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.56907E-1	-7.35021E-1	-9.19406E0	-9.18911E0	5.48363E-3	9.30309E-2	2.72744E1	-3.2649E1	-3.26178E1	2.68017E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.5686E-1	-7.34901E-1	-9.19414E0	-9.18925E0	5.31673E-3	9.31025E-2	2.73009E1	-3.26759E1	-3.26182E1	2.68046E1	1.1929E-7	2.52647E-3	2.52647E-3	6.34588E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-7.56764E-1	-7.35188E-1	-9.19418E0	-9.18906E0	5.65052E-3	9.31263E-2	2.73075E1	-3.26651E1	-3.26374E1	2.68232E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.57313E-1	-7.35211E-1	-9.19418E0	-9.1892E0	5.4121E-3	9.31501E-2	2.73105E1	-3.27071E1	-3.26104E1	2.68094E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.57456E-1	-7.35044E-1	-9.19409E0	-9.18932E0	5.50747E-3	9.31501E-2	2.73334E1	-3.26166E1	-3.26142E1	2.67856E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.56717E-1	-7.35235E-1	-9.19433E0	-9.18932E0	5.43594E-3	9.29594E-2	2.73231E1	-3.26753E1	-3.26338E1	2.67857E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.57122E-1	-7.34878E-1	-9.19392E0	-9.18922E0	5.53131E-3	9.29832E-2	2.7324E1	-3.26838E1	-3.25906E1	2.68024E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-7.56931E-1	-7.35164E-1	-9.19409E0	-9.1893E0	5.34058E-3	9.2864E-2	2.73492E1	-3.26499E1	-3.26107E1	2.68322E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.57003E-1	-7.35116E-1	-9.19409E0	-9.18925E0	5.31673E-3	9.29594E-2	2.73299E1	-3.26543E1	-3.26219E1	2.681E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02545E-1