[Scan]
initial_time=2015-12-22T19:04:44
final_time=2015-12-22T19:05:04
ip_count=19
run=1021
dataset=5
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-7.57408E-1
ql1_imon=1.37769E-8
ql2_vset=
ql2_vmon=-7.35188E-1
ql2_imon=2.03928E-9
ql3_vset=
ql3_vmon=-9.19414E0
ql3_imon=2.56646E-10
ql4_vset=
ql4_vmon=-9.18922E0
ql4_imon=1.34003E-10
mult1=-9.85907E-9
mult2=-2.62765E-9
rf_tmon=-4.74997E-3
rf_agc=3.299E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.71477E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60368E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20113E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.17876E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=1.10768E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4286E0
lens1_imon=2.61759E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.40711E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=3.02919E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.38804E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.32311E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.55837E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93158E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.96602E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.40831E-8
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26156E1
iondef3_imon=1.47967E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26353E1
iondef2_imon=1.60744E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.09676E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=8.50362E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33274E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57359E0
os_ea2_imon=-8.29799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73109E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68146E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.84763E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=8.11135E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-7.77877E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.88966E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.79574E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.56568E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56206E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.43225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07563E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66177E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31656E1
cs_fil1_imon=7.42514E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.89385E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67647E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57368E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61675E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22332E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.02249E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-7.57456E-1	-7.3514E-1	-9.19421E0	-9.1892E0	5.17368E-3	9.33409E-2	2.72933E1	-3.26661E1	-3.26337E1	2.67879E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.03286E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09696E0	-7.57265E-1	-7.35235E-1	-9.19421E0	-9.18932E0	5.4121E-3	9.35793E-2	2.7288E1	-3.26621E1	-3.26358E1	2.67945E1	1.18833E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0968E0	-7.57337E-1	-7.35116E-1	-9.19418E0	-9.1892E0	5.53131E-3	9.33409E-2	2.72986E1	-3.26826E1	-3.26278E1	2.67595E1	1.1929E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00144E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09704E0	-7.57194E-1	-7.35211E-1	-9.19423E0	-9.18925E0	5.45979E-3	9.31263E-2	2.72921E1	-3.26602E1	-3.26349E1	2.68196E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-7.57146E-1	-7.35402E-1	-9.19416E0	-9.18922E0	5.48363E-3	9.3317E-2	2.72841E1	-3.26446E1	-3.259E1	2.68034E1	1.1929E-7	2.51647E-3	2.51647E-3	6.32099E-3	3.00766E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09704E0	-7.57027E-1	-7.35641E-1	-9.1943E0	-9.1892E0	5.4121E-3	9.30786E-2	2.72727E1	-3.26747E1	-3.26278E1	2.68052E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-7.5736E-1	-7.35378E-1	-9.19387E0	-9.18911E0	5.17368E-3	9.33409E-2	2.72951E1	-3.26402E1	-3.26225E1	2.67914E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-7.57408E-1	-7.35545E-1	-9.19399E0	-9.18901E0	5.55515E-3	9.31025E-2	2.73027E1	-3.26639E1	-3.2614E1	2.681E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-7.57432E-1	-7.35545E-1	-9.19414E0	-9.18915E0	5.29289E-3	9.36508E-2	2.73183E1	-3.26687E1	-3.26032E1	2.6807E1	1.1929E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.57098E-1	-7.35188E-1	-9.19418E0	-9.18903E0	5.07832E-3	9.32455E-2	2.73129E1	-3.26579E1	-3.26146E1	2.68022E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-7.57384E-1	-7.35426E-1	-9.19409E0	-9.18922E0	5.60284E-3	9.33647E-2	2.72841E1	-3.26272E1	-3.25948E1	2.67992E1	1.1929E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.57098E-1	-7.35283E-1	-9.19397E0	-9.18939E0	5.26905E-3	9.35316E-2	2.72829E1	-3.26753E1	-3.26146E1	2.6813E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01871E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-7.57337E-1	-7.35569E-1	-9.19435E0	-9.18944E0	5.24521E-3	9.34362E-2	2.7308E1	-3.26549E1	-3.26337E1	2.68226E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-7.5748E-1	-7.35307E-1	-9.19416E0	-9.18937E0	4.98295E-3	9.32455E-2	2.73369E1	-3.26499E1	-3.26266E1	2.67992E1	1.1929E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.02253E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.57313E-1	-7.35354E-1	-9.19394E0	-9.18918E0	5.00679E-3	9.31501E-2	2.73075E1	-3.26867E1	-3.26476E1	2.67956E1	1.19343E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.02545E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.57408E-1	-7.34925E-1	-9.19406E0	-9.18937E0	5.26905E-3	9.31025E-2	2.73086E1	-3.26425E1	-3.26408E1	2.68016E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-7.57456E-1	-7.35092E-1	-9.19433E0	-9.18949E0	5.38826E-3	9.32217E-2	2.72907E1	-3.26374E1	-3.26158E1	2.67968E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.57289E-1	-7.35235E-1	-9.19449E0	-9.18946E0	5.10216E-3	9.31501E-2	2.73511E1	-3.26738E1	-3.26455E1	2.6818E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-7.57313E-1	-7.35331E-1	-9.19416E0	-9.18951E0	5.38826E-3	9.31978E-2	2.73015E1	-3.26663E1	-3.25936E1	2.68274E1	1.1929E-7	2.50775E-3	2.50775E-3	6.33977E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-7.57408E-1	-7.35188E-1	-9.19414E0	-9.18922E0	5.29289E-3	9.34124E-2	2.73109E1	-3.26353E1	-3.26156E1	2.68146E1	1.1929E-7	2.52647E-3	2.52647E-3	6.29645E-3	3.02133E-1