[Scan]
initial_time=2015-12-22T19:05:38
final_time=2015-12-22T19:05:57
ip_count=19
run=1021
dataset=5
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-7.57027E-1
ql1_imon=1.39133E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=1.96598E-9
ql3_vset=
ql3_vmon=-9.19466E0
ql3_imon=3.32391E-10
ql4_vset=
ql4_vmon=-9.18963E0
ql4_imon=1.24252E-10
mult1=-1.01377E-8
mult2=-2.77813E-9
rf_tmon=-3.87828E-3
rf_agc=3.33209E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.66813E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64717E0
bslens_imon=2.62504E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19961E1
lens5a_imon=1.95507E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53627E1
cs_ef1b_imon=3.17366E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05278E1
cs_ea1_imon=1.08358E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38994E0
lens1_imon=2.65633E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03725E1
cs_ea2_imon=1.39714E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.04403E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.38384E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.29304E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15375E1
os_ea1_imon=2.34718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26716E0
cs_ionrep_imon=9.40712E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=1.95385E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.40249E-8
tplens_vset=1.4E-1
tplens_vmon=1.58813E0
tplens_imon=-3.8535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.5115E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.5852E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98419E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.06438E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22719E0
ionrepsh_imon=8.52069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.17755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54642E0
os_ea2_imon=-6.3216E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00699E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.18061E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07946E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42988E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1095E1
os_restr2_imon=3.45203E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31701E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.09737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7301E1
iondef1_imon=1.08185E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68128E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=5.83111E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.07678E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11045E0
cs_ionaccel_imon=-1.02809E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.72259E-6
window_vset=0.0E0
window_vmon=1.89305E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.64468E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.59139E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50081E3
multb_neg_imon=7.49868E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50511E0
defgridb_imon=6.24377E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.45473E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65864E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31641E1
cs_fil1_imon=7.76816E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62163E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67935E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19531E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06874E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77955E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.61147E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-7.57146E-1	-7.35331E-1	-9.19433E0	-9.18899E0	5.36442E-3	9.33409E-2	2.72845E1	-3.26626E1	-3.26461E1	2.67787E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.01862E-1
2.0E0	4.8E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-7.57074E-1	-7.35044E-1	-9.19437E0	-9.1892E0	5.29289E-3	9.31501E-2	2.73063E1	-3.26822E1	-3.2616E1	2.68082E1	1.1929E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-7.57146E-1	-7.35259E-1	-9.19445E0	-9.18925E0	5.53131E-3	9.30548E-2	2.73092E1	-3.26667E1	-3.26319E1	2.67986E1	1.1929E-7	2.52407E-3	2.52407E-3	6.29603E-3	3.00522E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.56788E-1	-7.35188E-1	-9.19442E0	-9.18918E0	5.57899E-3	9.28879E-2	2.72709E1	-3.26189E1	-3.25995E1	2.67816E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.57003E-1	-7.35259E-1	-9.19449E0	-9.1893E0	5.60284E-3	9.30548E-2	2.73171E1	-3.26458E1	-3.2617E1	2.68124E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.57194E-1	-7.35092E-1	-9.19456E0	-9.18941E0	5.36442E-3	9.29832E-2	2.72931E1	-3.26903E1	-3.2593E1	2.68028E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.57122E-1	-7.3514E-1	-9.19437E0	-9.18922E0	5.4121E-3	9.30786E-2	2.73045E1	-3.2644E1	-3.26476E1	2.681E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.5748E-1	-7.35569E-1	-9.1943E0	-9.18965E0	5.43594E-3	9.34362E-2	2.72805E1	-3.26597E1	-3.26434E1	2.6789E1	1.1929E-7	2.52154E-3	2.52154E-3	6.32386E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-7.57337E-1	-7.3514E-1	-9.19425E0	-9.18956E0	5.24521E-3	9.30309E-2	2.73015E1	-3.26777E1	-3.26224E1	2.68106E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-7.57265E-1	-7.34949E-1	-9.19425E0	-9.18968E0	5.29289E-3	9.31025E-2	2.73045E1	-3.26825E1	-3.26116E1	2.67854E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.57098E-1	-7.35092E-1	-9.1943E0	-9.18922E0	5.38826E-3	9.30548E-2	2.73363E1	-3.26741E1	-3.25617E1	2.68232E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03185E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.57408E-1	-7.35092E-1	-9.19449E0	-9.18934E0	5.24521E-3	9.30071E-2	2.73207E1	-3.26735E1	-3.2644E1	2.67932E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-7.57289E-1	-7.35116E-1	-9.19414E0	-9.18937E0	5.07832E-3	9.27687E-2	2.7298E1	-3.26543E1	-3.2629E1	2.6801E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.57217E-1	-7.35021E-1	-9.1943E0	-9.1893E0	5.05447E-3	9.29832E-2	2.72624E1	-3.26446E1	-3.2608E1	2.67788E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.57027E-1	-7.35211E-1	-9.19447E0	-9.18908E0	5.24521E-3	9.27687E-2	2.72955E1	-3.26735E1	-3.26242E1	2.68017E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-7.56645E-1	-7.34949E-1	-9.19425E0	-9.18937E0	5.48363E-3	9.29356E-2	2.72927E1	-3.26608E1	-3.26183E1	2.67758E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03449E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.56741E-1	-7.3545E-1	-9.19404E0	-9.18901E0	5.29289E-3	9.27687E-2	2.73123E1	-3.2638E1	-3.2629E1	2.68232E1	1.1929E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.56884E-1	-7.35307E-1	-9.19425E0	-9.18911E0	5.07832E-3	9.27448E-2	2.72909E1	-3.26573E1	-3.26366E1	2.68265E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-7.5686E-1	-7.35164E-1	-9.19421E0	-9.18953E0	5.29289E-3	9.26733E-2	2.73712E1	-3.27143E1	-3.25821E1	2.67666E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97901E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.57027E-1	-7.35021E-1	-9.19466E0	-9.18963E0	5.07832E-3	9.29356E-2	2.7301E1	-3.26425E1	-3.26402E1	2.68128E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1