[Scan]
initial_time=2015-12-22T19:06:04
final_time=2015-12-22T19:06:24
ip_count=19
run=1021
dataset=5
scan=194
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-7.56979E-1
ql1_imon=1.38309E-8
ql2_vset=
ql2_vmon=-7.34925E-1
ql2_imon=2.05392E-9
ql3_vset=
ql3_vmon=-9.19416E0
ql3_imon=2.81787E-10
ql4_vset=
ql4_vmon=-9.18906E0
ql4_imon=8.81791E-11
mult1=-9.25877E-9
mult2=-2.75254E-9
rf_tmon=-3.61719E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.66513E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64022E0
bslens_imon=2.56595E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19926E1
lens5a_imon=2.00304E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=3.17018E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02281E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05046E1
cs_ea1_imon=1.07802E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41775E0
lens1_imon=2.58681E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64394E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.41348E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.04264E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.3844E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.36735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24341E0
cs_ionrep_imon=9.37931E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93281E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=1.95767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.39663E-8
tplens_vset=1.4E-1
tplens_vmon=1.60667E0
tplens_imon=-2.35873E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26873E1
iondef3_imon=1.48335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.58485E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98297E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.0897E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27759E0
ionrepsh_imon=8.66669E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33472E1
lens5b_imon=2.19806E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.133E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.558E0
os_ea2_imon=-4.13159E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08468E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40092E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.45967E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31284E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.09459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73646E1
iondef1_imon=1.08289E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=5.80772E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=8.05823E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-8.85609E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.67741E-6
window_vset=0.0E0
window_vmon=2.08418E-1
window_imon=-1.10803E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86286E1
mask2_imon=-6.49292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.63773E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.25768E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.71073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45291E0
defgridb_imon=6.18468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.42953E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07115E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66135E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31669E1
cs_fil1_imon=7.49014E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40153E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67564E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14557E-2
os_fil2_imon=-2.39117E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56453E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31899E-1
cs_fil2_imon=-2.5823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50518E-1
res40_imon=-2.31046E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.57313E-1	-7.35402E-1	-9.19416E0	-9.18915E0	5.50747E-3	9.30786E-2	2.73169E1	-3.26667E1	-3.26284E1	2.67806E1	1.1929E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.01104E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.57408E-1	-7.35164E-1	-9.19421E0	-9.18913E0	5.57899E-3	9.32932E-2	2.72939E1	-3.26797E1	-3.25892E1	2.67878E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.57289E-1	-7.3483E-1	-9.19425E0	-9.1892E0	5.34058E-3	9.32693E-2	2.7324E1	-3.26561E1	-3.26301E1	2.6801E1	1.1929E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.57098E-1	-7.35307E-1	-9.19423E0	-9.18934E0	5.38826E-3	9.2864E-2	2.73126E1	-3.26602E1	-3.26144E1	2.68105E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.57074E-1	-7.35021E-1	-9.1943E0	-9.1893E0	5.34058E-3	9.27448E-2	2.73015E1	-3.26765E1	-3.26236E1	2.67836E1	1.1929E-7	2.51498E-3	2.51498E-3	6.2863E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.57098E-1	-7.35211E-1	-9.19387E0	-9.18915E0	5.29289E-3	9.31501E-2	2.73063E1	-3.26602E1	-3.26001E1	2.67896E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-7.56812E-1	-7.35259E-1	-9.19414E0	-9.18963E0	5.19753E-3	9.32217E-2	2.72959E1	-3.26223E1	-3.26009E1	2.678E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-7.57194E-1	-7.35545E-1	-9.19421E0	-9.18927E0	5.38826E-3	9.33409E-2	2.73039E1	-3.26535E1	-3.26441E1	2.67982E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.57217E-1	-7.35378E-1	-9.19425E0	-9.18946E0	5.48363E-3	9.32455E-2	2.73028E1	-3.26498E1	-3.25646E1	2.67833E1	1.1929E-7	2.51045E-3	2.51045E-3	6.3245E-3	3.02972E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.5717E-1	-7.35545E-1	-9.19392E0	-9.18972E0	4.98295E-3	9.3174E-2	2.73201E1	-3.26873E1	-3.26296E1	2.68034E1	1.1929E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.02368E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.57265E-1	-7.35402E-1	-9.19428E0	-9.18934E0	5.36442E-3	9.31025E-2	2.72937E1	-3.26867E1	-3.26735E1	2.68118E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.57194E-1	-7.35164E-1	-9.19459E0	-9.18894E0	5.17368E-3	9.31263E-2	2.73009E1	-3.26518E1	-3.26488E1	2.67746E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-7.57313E-1	-7.35116E-1	-9.1943E0	-9.18941E0	4.8399E-3	9.32693E-2	2.72941E1	-3.26891E1	-3.26009E1	2.68051E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.5736E-1	-7.35092E-1	-9.19425E0	-9.18946E0	5.126E-3	9.32455E-2	2.73039E1	-3.26831E1	-3.25888E1	2.68223E1	1.1929E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.0041E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-7.57504E-1	-7.35307E-1	-9.19442E0	-9.18927E0	5.38826E-3	9.31978E-2	2.73146E1	-3.26864E1	-3.26764E1	2.68099E1	1.1929E-7	2.51867E-3	2.51867E-3	6.31269E-3	3.006E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.57384E-1	-7.35164E-1	-9.19445E0	-9.18932E0	5.60284E-3	9.33409E-2	2.73126E1	-3.26884E1	-3.2611E1	2.68032E1					
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-7.57313E-1	-7.3514E-1	-9.19445E0	-9.18953E0	5.38826E-3	9.31978E-2	2.73706E1	-3.26735E1	-3.26428E1	2.68214E1	1.1929E-7	2.51838E-3	2.51838E-3	6.34164E-3	2.9944E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.57289E-1	-7.35378E-1	-9.19456E0	-9.18944E0	5.14984E-3	9.32932E-2	2.72877E1	-3.26567E1	-3.26347E1	2.68047E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.56931E-1	-7.34997E-1	-9.19418E0	-9.18932E0	5.03063E-3	9.32217E-2	2.74325E1	-3.28008E1	-3.2507E1	2.68052E1	1.1929E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.02621E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.56979E-1	-7.34925E-1	-9.19416E0	-9.18906E0	5.53131E-3	9.31501E-2	2.73646E1	-3.26476E1	-3.26873E1	2.68076E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1