[Scan]
initial_time=2015-12-22T19:06:31
final_time=2015-12-22T19:06:50
ip_count=19
run=1021
dataset=5
scan=195
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-7.56836E-1
ql1_imon=1.38449E-8
ql2_vset=
ql2_vmon=-7.3514E-1
ql2_imon=2.04407E-9
ql3_vset=
ql3_vmon=-9.1943E0
ql3_imon=2.58732E-10
ql4_vset=
ql4_vmon=-9.18913E0
ql4_imon=1.26874E-10
mult1=-9.57029E-9
mult2=-2.73698E-9
rf_tmon=-4.9755E-3
rf_agc=3.3433E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.72148E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67498E0
bslens_imon=2.50685E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19834E1
lens5a_imon=2.00234E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05138E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.1674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02062E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0504E1
cs_ea1_imon=1.09645E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42412E0
lens1_imon=2.50685E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64521E1
os_ef1alow_imon=2.98947E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03876E1
cs_ea2_imon=1.40548E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.03847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.38334E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15421E1
os_ea1_imon=2.359E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26137E0
cs_ionrep_imon=9.64698E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01948E1
cs_anode1_imon=1.95836E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.40059E-8
tplens_vset=1.4E-1
tplens_vmon=1.59682E0
tplens_imon=-3.19302E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.49447E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.58937E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.9828E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.08115E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23646E0
ionrepsh_imon=8.55545E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33849E1
lens5b_imon=2.1845E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.14586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56322E0
os_ea2_imon=-7.19066E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00397E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08236E0
os_ef2alow_imon=-2.61281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.39513E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.45481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30276E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02006E1
cs_anode2_imon=2.10363E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7301E1
iondef1_imon=1.09506E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.0826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=5.83012E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=8.05205E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-9.06461E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56515E1
einzel_imon=7.82685E-6
window_vset=0.0E0
window_vmon=2.06102E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39206E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.37006E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.70958E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.3214E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3282E0
defgridb_imon=6.20901E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.43133E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07439E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65967E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31686E1
cs_fil1_imon=7.94192E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69113E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20775E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69752E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.20582E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36211E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23498E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-7.57122E-1	-7.35068E-1	-9.19414E0	-9.18937E0	5.57899E-3	9.30071E-2	2.73051E1	-3.26573E1	-3.26183E1	2.68169E1	1.1929E-7	2.52025E-3	2.52025E-3	6.29157E-3	3.02368E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-7.5717E-1	-7.35331E-1	-9.19428E0	-9.18915E0	5.4121E-3	9.30786E-2	2.73274E1	-3.26387E1	-3.26578E1	2.68017E1	1.1929E-7	2.51525E-3	2.51525E-3	6.28056E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.5717E-1	-7.35044E-1	-9.19425E0	-9.18913E0	5.126E-3	9.31501E-2	2.72845E1	-3.26579E1	-3.26354E1	2.67989E1	1.1929E-7	2.51642E-3	2.51642E-3	6.3074E-3	3.01748E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.57051E-1	-7.35354E-1	-9.19423E0	-9.18922E0	5.31673E-3	9.2864E-2	2.72976E1	-3.26619E1	-3.26364E1	2.67816E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.57194E-1	-7.34854E-1	-9.19435E0	-9.1893E0	5.17368E-3	9.27925E-2	2.73237E1	-3.26549E1	-3.26398E1	2.68244E1	1.1929E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.98842E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-7.56693E-1	-7.35092E-1	-9.19394E0	-9.18934E0	5.03063E-3	9.27448E-2	2.73363E1	-3.26591E1	-3.2623E1	2.67968E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-7.57003E-1	-7.35188E-1	-9.19397E0	-9.18911E0	5.07832E-3	9.28164E-2	2.72909E1	-3.26632E1	-3.26396E1	2.681E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-7.57003E-1	-7.35259E-1	-9.19425E0	-9.1892E0	4.88758E-3	9.31978E-2	2.72959E1	-3.26536E1	-3.26419E1	2.68118E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-7.56955E-1	-7.34901E-1	-9.19425E0	-9.18927E0	5.00679E-3	9.3174E-2	2.7278E1	-3.26667E1	-3.26343E1	2.68166E1	1.1929E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-7.56884E-1	-7.35164E-1	-9.19397E0	-9.18913E0	5.05447E-3	9.29356E-2	2.72653E1	-3.26278E1	-3.2604E1	2.68172E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.56812E-1	-7.35354E-1	-9.19425E0	-9.18939E0	5.19753E-3	9.31978E-2	2.73647E1	-3.27127E1	-3.259E1	2.6792E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-7.57051E-1	-7.35259E-1	-9.19414E0	-9.18927E0	5.07832E-3	9.3174E-2	2.72915E1	-3.26632E1	-3.26449E1	2.67972E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-7.56669E-1	-7.3545E-1	-9.19414E0	-9.18901E0	5.14984E-3	9.31263E-2	2.72955E1	-3.26783E1	-3.2617E1	2.68136E1	1.1929E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-7.57051E-1	-7.35164E-1	-9.19404E0	-9.18915E0	5.29289E-3	9.33409E-2	2.73255E1	-3.26633E1	-3.26206E1	2.68214E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-7.57122E-1	-7.35021E-1	-9.19404E0	-9.18932E0	5.03063E-3	9.33409E-2	2.72732E1	-3.26449E1	-3.26697E1	2.68046E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-7.57194E-1	-7.34735E-1	-9.19399E0	-9.18937E0	5.36442E-3	9.32932E-2	2.73002E1	-3.26334E1	-3.26125E1	2.67716E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-7.56931E-1	-7.35092E-1	-9.19373E0	-9.18901E0	5.24521E-3	9.3317E-2	2.73309E1	-3.26675E1	-3.26434E1	2.68016E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3514E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-7.57027E-1	-7.35092E-1	-9.19387E0	-9.18922E0	5.05447E-3	9.32217E-2	2.72909E1	-3.26319E1	-3.26502E1	2.6834E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.56931E-1	-7.35021E-1	-9.19409E0	-9.18903E0	5.26905E-3	9.35316E-2	2.71795E1	-3.25293E1	-3.2623E1	2.6804E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.56836E-1	-7.3514E-1	-9.1943E0	-9.18913E0	5.34058E-3	9.32932E-2	2.7301E1	-3.2672E1	-3.2636E1	2.68082E1	1.1929E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.99941E-1