[Scan]
initial_time=2015-12-22T19:06:58
final_time=2015-12-22T19:07:17
ip_count=19
run=1021
dataset=5
scan=196
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-7.5686E-1
ql1_imon=1.38486E-8
ql2_vset=
ql2_vmon=-7.35164E-1
ql2_imon=2.02348E-9
ql3_vset=
ql3_vmon=-9.19468E0
ql3_imon=2.27261E-10
ql4_vset=
ql4_vmon=-9.18972E0
ql4_imon=8.43287E-11
mult1=-9.81263E-9
mult2=-2.73159E-9
rf_tmon=-4.20932E-3
rf_agc=3.34392E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.67178E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64022E0
bslens_imon=2.84752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.98114E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05263E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.18721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05434E1
cs_ea1_imon=1.09332E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34301E0
lens1_imon=2.53814E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64799E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03957E1
cs_ea2_imon=1.39227E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.04195E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.37869E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.29339E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1512E1
os_ea1_imon=2.35205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30366E0
cs_ionrep_imon=9.33412E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91842E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=1.95802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.38799E-8
tplens_vset=1.4E-1
tplens_vmon=1.61478E0
tplens_imon=-5.27874E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26427E1
iondef3_imon=1.52506E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26683E1
iondef2_imon=1.55044E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98655E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.04688E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28976E0
ionrepsh_imon=8.43726E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.19632E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74837E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52382E0
os_ea2_imon=-7.36447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.20216E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09974E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.39513E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.45168E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30693E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72995E1
iondef1_imon=1.09297E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.81795E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.08068E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=1.84671E-1
window_imon=-9.82917E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.69335E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.89035E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=6.59835E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2354E0
defgridb_imon=5.98653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33281E1
os_fil1_imon=9.43538E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08001E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31672E1
cs_fil1_imon=6.75454E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82435E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67348E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.158E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56204E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.48384E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.72122E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22408E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.36038E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.56955E-1	-7.35474E-1	-9.19402E0	-9.18911E0	5.17368E-3	9.31978E-2	2.73159E1	-3.26657E1	-3.26254E1	2.68202E1	1.1929E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.006E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.5686E-1	-7.35354E-1	-9.19404E0	-9.18927E0	5.34058E-3	9.34124E-2	2.73516E1	-3.26572E1	-3.26217E1	2.68057E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-7.57074E-1	-7.34997E-1	-9.19418E0	-9.18899E0	5.24521E-3	9.34124E-2	2.73057E1	-3.26797E1	-3.25759E1	2.6785E1	1.1929E-7	2.51838E-3	2.51838E-3	6.31879E-3	3.01609E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.57313E-1	-7.35021E-1	-9.19445E0	-9.18918E0	5.38826E-3	9.34839E-2	2.7275E1	-3.26526E1	-3.26431E1	2.67964E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.5717E-1	-7.34949E-1	-9.19399E0	-9.18908E0	5.36442E-3	9.32217E-2	2.72606E1	-3.26554E1	-3.265E1	2.68174E1	1.1929E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.01356E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.56955E-1	-7.34878E-1	-9.19414E0	-9.1888E0	5.57899E-3	9.33647E-2	2.73183E1	-3.26488E1	-3.26464E1	2.68022E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.57146E-1	-7.34973E-1	-9.19397E0	-9.1892E0	5.19753E-3	9.31978E-2	2.72727E1	-3.26723E1	-3.26152E1	2.68034E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56931E-1	-7.35188E-1	-9.1944E0	-9.18927E0	5.43594E-3	9.29832E-2	2.73063E1	-3.26609E1	-3.26182E1	2.67968E1	1.1929E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.03449E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.56955E-1	-7.34901E-1	-9.19442E0	-9.18925E0	5.29289E-3	9.31025E-2	2.73111E1	-3.26639E1	-3.26344E1	2.68172E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-7.57122E-1	-7.35211E-1	-9.1944E0	-9.18927E0	5.38826E-3	9.31501E-2	2.72929E1	-3.2626E1	-3.26347E1	2.67814E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-7.57074E-1	-7.35068E-1	-9.19411E0	-9.1893E0	5.29289E-3	9.3174E-2	2.73656E1	-3.26921E1	-3.26254E1	2.67988E1	1.1929E-7	2.51679E-3	2.51679E-3	6.3126E-3	2.98768E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-7.5717E-1	-7.34949E-1	-9.19459E0	-9.18927E0	5.29289E-3	9.28879E-2	2.73181E1	-3.26791E1	-3.26484E1	2.6828E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.02154E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.56836E-1	-7.35044E-1	-9.19421E0	-9.18932E0	5.17368E-3	9.30071E-2	2.73116E1	-3.26885E1	-3.26089E1	2.6794E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02511E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.56764E-1	-7.34949E-1	-9.19397E0	-9.1892E0	5.24521E-3	9.27925E-2	2.72943E1	-3.26657E1	-3.2614E1	2.68021E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-7.56598E-1	-7.35021E-1	-9.19435E0	-9.18944E0	5.4121E-3	9.32455E-2	2.72907E1	-3.26657E1	-3.26308E1	2.68058E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56741E-1	-7.34901E-1	-9.19445E0	-9.18941E0	5.4121E-3	9.31025E-2	2.73015E1	-3.26567E1	-3.26927E1	2.67926E1	1.1929E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.56741E-1	-7.34687E-1	-9.19425E0	-9.18911E0	5.36442E-3	9.34124E-2	2.73081E1	-3.26807E1	-3.26549E1	2.68123E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.56907E-1	-7.35235E-1	-9.19456E0	-9.18953E0	5.38826E-3	9.29594E-2	2.72833E1	-3.26691E1	-3.26136E1	2.6801E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.56741E-1	-7.35259E-1	-9.1944E0	-9.18927E0	5.53131E-3	9.28164E-2	2.7245E1	-3.26278E1	-3.27372E1	2.67986E1	1.1929E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.5686E-1	-7.35164E-1	-9.19468E0	-9.18972E0	5.05447E-3	9.30071E-2	2.72995E1	-3.26683E1	-3.26427E1	2.67937E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1