[Scan]
initial_time=2015-12-22T19:07:51
final_time=2015-12-22T19:08:10
ip_count=19
run=1021
dataset=5
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.8
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-7.56764E-1
ql1_imon=1.38375E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=2.03719E-9
ql3_vset=
ql3_vmon=-9.19445E0
ql3_imon=2.74646E-10
ql4_vset=
ql4_vmon=-9.18913E0
ql4_imon=1.6762E-10
mult1=-1.01968E-8
mult2=-2.90552E-9
rf_tmon=-5.20556E-3
rf_agc=3.20526E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.63E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66116E0
bslens_imon=2.72671E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.98942E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53954E1
cs_ef1b_imon=3.21157E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02187E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.09358E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40133E0
lens1_imon=2.6055E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98851E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03892E1
cs_ea2_imon=1.40211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84469E1
cs_ef1a_imon=3.02743E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.38082E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10942E1
os_restr1_imon=4.28232E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15434E1
os_ea1_imon=2.35635E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64178E1
os_ef1bup_imon=3.12661E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2423E0
cs_ionrep_imon=9.44824E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93292E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02139E1
cs_anode1_imon=1.9447E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.3911E-8
tplens_vset=1.4E-1
tplens_vmon=1.59185E0
tplens_imon=-2.19017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25942E1
iondef3_imon=1.50128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.57804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.06775E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25883E0
ionrepsh_imon=8.4345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33854E1
lens5b_imon=2.18445E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74258E1
cs_ef2b_imon=3.10677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5643E0
os_ea2_imon=-6.81811E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71364E1
cs_ef2a_imon=3.22467E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13066E0
os_ef2alow_imon=-2.56683E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99503E-1
os_ef2bup_imon=-5.40745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10662E1
os_restr2_imon=3.43163E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.31654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01522E1
cs_anode2_imon=2.08355E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73281E1
iondef1_imon=1.10974E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.0884E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=5.89478E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=8.09276E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18378E0
cs_ionaccel_imon=-5.34609E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47032E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55688E1
einzel_imon=7.70281E-6
window_vset=0.0E0
window_vmon=1.72686E-1
window_imon=-7.47936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.36934E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.64944E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.24446E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32388E0
defgridb_imon=6.05442E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.43281E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07229E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66135E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31699E1
cs_fil1_imon=6.96217E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.99366E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27885E-2
os_fil2_imon=-2.40676E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.30889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59696E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.16973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32335E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22247E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-6.0889E-1
res40_imon=-2.73525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-7.56955E-1	-7.34901E-1	-9.19428E0	-9.1892E0	5.53131E-3	9.30309E-2	2.7321E1	-3.26614E1	-3.26449E1	2.68435E1	1.1929E-7	2.51045E-3	2.51045E-3	6.30171E-3	3.02426E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-7.56693E-1	-7.34925E-1	-9.19421E0	-9.18944E0	5.53131E-3	9.29594E-2	2.7335E1	-3.26441E1	-3.26123E1	2.67714E1	1.1929E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.56884E-1	-7.34758E-1	-9.19433E0	-9.18989E0	5.57899E-3	9.30786E-2	2.73155E1	-3.26648E1	-3.26167E1	2.68134E1	1.1929E-7	2.5147E-3	2.5147E-3	6.29624E-3	2.99879E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-7.57074E-1	-7.35044E-1	-9.19423E0	-9.18925E0	5.67436E-3	9.30309E-2	2.73068E1	-3.26486E1	-3.26289E1	2.68262E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56907E-1	-7.34925E-1	-9.19433E0	-9.18941E0	5.26905E-3	9.3317E-2	2.73189E1	-3.26729E1	-3.2629E1	2.67914E1	1.1929E-7	2.51182E-3	2.51182E-3	6.30212E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.57074E-1	-7.34735E-1	-9.1944E0	-9.18918E0	5.57899E-3	9.3174E-2	2.7298E1	-3.26614E1	-3.26349E1	2.68166E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-7.56693E-1	-7.35044E-1	-9.19433E0	-9.18932E0	5.45979E-3	9.29356E-2	2.73033E1	-3.26008E1	-3.26717E1	2.68221E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-7.56741E-1	-7.35331E-1	-9.19421E0	-9.18946E0	5.45979E-3	9.2864E-2	2.72871E1	-3.26356E1	-3.26296E1	2.68274E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.57003E-1	-7.35283E-1	-9.19416E0	-9.18961E0	5.50747E-3	9.26733E-2	2.73039E1	-3.26455E1	-3.26266E1	2.68052E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-7.57146E-1	-7.35044E-1	-9.19383E0	-9.18913E0	5.19753E-3	9.29117E-2	2.72738E1	-3.26319E1	-3.26449E1	2.68395E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-7.57265E-1	-7.35188E-1	-9.19416E0	-9.18939E0	5.34058E-3	9.30309E-2	2.73718E1	-3.27269E1	-3.25785E1	2.68013E1	1.1929E-7	2.51287E-3	2.51287E-3	6.32858E-3	2.99594E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.57051E-1	-7.35164E-1	-9.19485E0	-9.1893E0	5.126E-3	9.30309E-2	2.73243E1	-3.26512E1	-3.26344E1	2.6786E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.00942E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.57027E-1	-7.35188E-1	-9.19442E0	-9.1893E0	5.14984E-3	9.31263E-2	2.73213E1	-3.26585E1	-3.26458E1	2.67998E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-7.57146E-1	-7.3514E-1	-9.19437E0	-9.18949E0	5.19753E-3	9.30071E-2	2.72997E1	-3.26416E1	-3.26374E1	2.6807E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9952E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-7.56955E-1	-7.35164E-1	-9.19456E0	-9.18951E0	5.19753E-3	9.30071E-2	2.73116E1	-3.26614E1	-3.26225E1	2.68128E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.98026E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-7.57051E-1	-7.35116E-1	-9.19442E0	-9.18918E0	5.126E-3	9.28879E-2	2.73243E1	-3.26777E1	-3.2623E1	2.67854E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00197E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-7.56812E-1	-7.35211E-1	-9.19433E0	-9.18927E0	5.24521E-3	9.29356E-2	2.72751E1	-3.26897E1	-3.26194E1	2.68244E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-7.57027E-1	-7.35211E-1	-9.19454E0	-9.18915E0	5.36442E-3	9.29594E-2	2.7298E1	-3.26531E1	-3.26449E1	2.68118E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.03449E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-7.56884E-1	-7.34925E-1	-9.1944E0	-9.18903E0	5.43594E-3	9.29117E-2	2.72282E1	-3.2584E1	-3.27275E1	2.68134E1	1.1929E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.56764E-1	-7.34615E-1	-9.19445E0	-9.18913E0	5.34058E-3	9.29594E-2	2.73281E1	-3.26478E1	-3.25942E1	2.67968E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1