[Scan]
initial_time=2016-01-15T20:00:05
final_time=2016-01-15T20:00:25
ip_count=19
run=1023
dataset=1
scan=1
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.71869E-6
ql1_vset=
ql1_vmon=-8.80035E1
ql1_imon=-7.88033E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.22935E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.67353E-9
ql4_vset=
ql4_vmon=1.23978E-3
ql4_imon=1.41294E-8
mult1=-7.9945E-9
mult2=-2.51102E-9
rf_tmon=-5.66E-3
rf_agc=3.18435E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=6.27613E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68193E0
bslens_imon=2.03409E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19758E1
lens5a_imon=1.99609E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.0477E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53945E1
cs_ef1b_imon=2.80737E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04682E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04467E1
cs_ea1_imon=2.5999E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98499E0
lens1_imon=1.4049E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64591E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04049E1
cs_ea2_imon=1.52263E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.92761E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=1.01822E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.119E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14419E1
os_ea1_imon=2.40663E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25557E0
cs_ionrep_imon=1.15554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92048E2
cs_nozzle_imon=1.9359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=2.95333E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.12538E-9
tplens_vset=0.0E0
tplens_vmon=-1.66924E0
tplens_imon=-3.64493E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99504E1
iondef3_imon=8.65278E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98338E1
iondef2_imon=9.4106E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03156E2
lens6_imon=2.98009E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=9.83691E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30019E0
ionrepsh_imon=1.71834E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33849E1
lens5b_imon=2.18658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.12869E0
os_ea2_imon=-7.36447E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06224E2
lens4b_imon=2.00498E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.15037E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0059E0
os_ef2alow_imon=-2.35912E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98968E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11083E1
os_restr2_imon=3.38461E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30345E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.24264E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58227E1
iondef1_imon=4.99234E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5007E1
iondef4_imon=5.4463E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.51907E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.15889E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15968E0
cs_ionaccel_imon=-1.63626E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02149E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-8.9256E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82727E2
mask1_imon=2.39317E-4
mask2_vset=0.0E0
mask2_vmon=-1.87259E1
mask2_imon=-8.1958E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=7.72245E0
multa_neg_imon=4.25538E-5
defgrida_vset=2.902E3
defgrida_vmon=7.18964E0
defgrida_imon=5.21134E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=7.22136E0
multb_neg_imon=4.32143E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.03819E0
defgridb_imon=4.03291E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.42125E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30766E1
cs_fil1_imon=9.97659E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64199E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77985E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.38668E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38017E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.41337E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58627E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=192
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80032E1	-5.00679E-4	-8.8002E1	1.09673E-3	5.00679E-3	9.61304E-2	1.58035E1	-1.98543E1	-1.99726E1	1.50479E1	2.21493E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.40462E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80034E1	-4.76837E-4	-8.8002E1	7.15256E-4	5.31673E-3	9.60827E-2	1.58032E1	-1.9834E1	-1.99567E1	1.5028E1	2.22171E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.40918E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80035E1	-3.33786E-4	-8.80016E1	1.09673E-3	5.6982E-3	9.59158E-2	1.58454E1	-1.98312E1	-1.99598E1	1.5019E1	2.23107E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.40994E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80037E1	-1.90735E-4	-8.80017E1	1.07288E-3	5.24521E-3	9.60827E-2	1.5875E1	-1.9835E1	-1.9933E1	1.50683E1	2.21695E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.40626E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80036E1	-4.05312E-4	-8.80019E1	9.05991E-4	5.57899E-3	9.63449E-2	1.57879E1	-1.98208E1	-1.99355E1	1.5012E1	2.21401E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.40788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80037E1	-5.24521E-4	-8.80018E1	8.10623E-4	5.26905E-3	9.61065E-2	1.58061E1	-1.98299E1	-1.99231E1	1.50112E1	2.21779E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.41817E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80035E1	-4.05312E-4	-8.80015E1	8.58307E-4	5.24521E-3	9.58443E-2	1.58516E1	-1.98122E1	-1.99402E1	1.50306E1	2.21779E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.4223E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80037E1	-4.76837E-4	-8.8002E1	8.34465E-4	5.22137E-3	9.61065E-2	1.57949E1	-1.98399E1	-1.99502E1	1.50316E1	2.23773E-9	2.50989E-3	2.50989E-3	6.32356E-3	2.41405E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80038E1	-3.33786E-4	-8.80017E1	8.82149E-4	5.17368E-3	9.59396E-2	1.57999E1	-1.98422E1	-1.99702E1	1.50461E1	2.23818E-9	2.51116E-3	2.51116E-3	6.32936E-3	2.41127E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80037E1	-5.00679E-4	-8.80018E1	9.29832E-4	5.19753E-3	9.61542E-2	1.58413E1	-1.9823E1	-1.99684E1	1.50503E1	2.23332E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41966E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80037E1	-2.6226E-4	-8.80016E1	7.86781E-4	5.34058E-3	9.59158E-2	1.58089E1	-1.98543E1	-1.99636E1	1.50364E1	2.21495E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.41199E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80039E1	-5.48363E-4	-8.80016E1	7.62939E-4	5.43594E-3	9.60827E-2	1.58451E1	-1.98741E1	-1.99537E1	1.50352E1	2.21593E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41127E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80039E1	-2.6226E-4	-8.80019E1	6.4373E-4	5.24521E-3	9.56297E-2	1.57873E1	-1.98525E1	-1.99342E1	1.50148E1	2.21401E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.41405E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80038E1	-1.19209E-4	-8.8002E1	8.34465E-4	5.26905E-3	9.57966E-2	1.58281E1	-1.98386E1	-1.99204E1	1.50335E1	2.2327E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.41693E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80038E1	-4.76837E-4	-8.80021E1	7.62939E-4	5.29289E-3	9.57489E-2	1.58203E1	-1.98464E1	-1.99828E1	1.50412E1	2.23869E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.40788E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80041E1	-2.38419E-4	-8.80017E1	8.34465E-4	5.31673E-3	9.62019E-2	1.58287E1	-1.9817E1	-1.99774E1	1.50485E1	2.21689E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.41337E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80038E1	-4.76837E-4	-8.80018E1	1.0252E-3	5.17368E-3	9.63926E-2	1.58708E1	-1.98609E1	-1.99534E1	1.50581E1	2.21497E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.42387E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.09279E-2	-8.80036E1	-4.29153E-4	-8.80017E1	1.23978E-3	5.17368E-3	9.57727E-2	1.58006E1	-1.98712E1	-1.9957E1	1.5037E1	2.21882E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.40708E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.10825E-2	-8.80037E1	-4.76837E-4	-8.80015E1	1.16825E-3	4.98295E-3	9.62973E-2	1.57814E1	-1.98263E1	-2.00346E1	1.50086E1	2.21772E-9	2.52448E-3	2.52448E-3	6.32858E-3	2.41876E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80035E1	-6.19888E-4	-8.80017E1	1.23978E-3	4.95911E-3	9.62019E-2	1.58227E1	-1.98338E1	-1.99504E1	1.5007E1	2.21401E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.41337E-2