[Scan]
initial_time=2016-01-15T20:16:32
final_time=2016-01-15T20:16:52
ip_count=19
run=1023
dataset=1
scan=4
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.8792E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.97558E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.23749E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.80198E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.36848E-8
mult1=-1.02386E-8
mult2=-2.58756E-9
rf_tmon=-4.49564E-3
rf_agc=3.19877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=6.44958E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71133E0
bslens_imon=2.48539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.98859E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12565E2
lens4a_imon=2.04878E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54766E1
cs_ef1b_imon=2.86424E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02131E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05119E1
cs_ea1_imon=2.56884E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00354E0
lens1_imon=1.52571E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64838E1
os_ef1alow_imon=2.9847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03485E1
cs_ea2_imon=1.50466E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84355E1
cs_ef1a_imon=2.95954E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.05545E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.118E1
os_restr1_imon=4.27117E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.36529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63814E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22136E0
cs_ionrep_imon=1.17611E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91982E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01843E1
cs_anode1_imon=2.9592E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.14279E-9
tplens_vset=0.0E0
tplens_vmon=-1.68526E0
tplens_imon=-3.2534E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99637E1
iondef3_imon=8.75914E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9849E1
iondef2_imon=9.42169E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03129E2
lens6_imon=2.98086E-4
ql6_vset=1.0E-1
ql6_vmon=9.6488E-2
ql6_imon=9.60243E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25665E0
ionrepsh_imon=1.76216E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.1655E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74725E1
cs_ef2b_imon=3.1367E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.19404E0
os_ea2_imon=-6.01972E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.16153E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04729E0
os_ef2alow_imon=-2.58309E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87544E-1
os_ef2bup_imon=-5.26407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11291E1
os_restr2_imon=3.40312E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.26581E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01916E1
cs_anode2_imon=2.2398E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58236E1
iondef1_imon=5.26537E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50217E1
iondef4_imon=5.52024E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.54312E-8
olens1_vset=0.0E0
olens1_vmon=2.0504E-3
olens1_imon=1.22538E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16817E0
cs_ionaccel_imon=-1.78115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56444E1
einzel_imon=7.87574E-6
window_vset=0.0E0
window_vmon=2.6554E-1
window_imon=-9.25515E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82769E2
mask1_imon=2.39141E-4
mask2_vset=0.0E0
mask2_vmon=-1.86708E1
mask2_imon=-7.10768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.33092E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.01397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37608E0
defgridb_imon=6.00989E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=9.43192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06625E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6425E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.96213E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62959E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66442E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18571E-2
os_fil2_imon=-2.77284E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89118E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.13695E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33871E-1
cs_fil2_imon=-2.28631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.6219E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.41966E-2
chamber_ion_pmon=2.23915E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98273E-1
res40_imon=-2.54954E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=194
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.828E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80047E1	-9.05991E-4	-8.80013E1	7.86781E-4	4.72069E-3	9.61542E-2	1.58696E1	-1.9841E1	-1.99149E1	1.50509E1	2.2369E-9	2.52925E-3	2.52925E-3	6.27633E-3	2.42132E-2
2.0E0	3.949E3	0.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80043E1	-7.15256E-4	-8.80014E1	8.82149E-4	4.74453E-3	9.61542E-2	1.58334E1	-1.98566E1	-1.99464E1	1.50216E1	2.2426E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.41479E-2
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80045E1	-1.04904E-3	-8.80015E1	7.39098E-4	4.74453E-3	9.65595E-2	1.58905E1	-1.98346E1	-1.99691E1	1.50016E1	2.23665E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.41907E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80044E1	-9.53674E-4	-8.80018E1	7.62939E-4	4.64916E-3	9.68456E-2	1.58104E1	-1.98707E1	-1.99558E1	1.50422E1	2.2372E-9	2.5199E-3	2.5199E-3	6.29098E-3	2.41337E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80044E1	-7.15256E-4	-8.80017E1	1.09673E-3	4.88758E-3	9.67026E-2	1.58299E1	-1.98416E1	-1.99528E1	1.50376E1	2.23773E-9	2.52223E-3	2.52223E-3	6.29934E-3	2.41921E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80042E1	-5.72205E-4	-8.80016E1	7.39098E-4	4.52995E-3	9.66549E-2	1.58179E1	-1.98224E1	-1.99426E1	1.5004E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80041E1	-9.77516E-4	-8.80017E1	8.10623E-4	4.50611E-3	9.63688E-2	1.58061E1	-1.98723E1	-1.99461E1	1.50427E1	2.23583E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.41611E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80044E1	-1.21593E-3	-8.80013E1	7.86781E-4	4.52995E-3	9.63211E-2	1.57885E1	-1.98332E1	-1.99678E1	1.504E1	2.23818E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.42387E-2
1.2E1	1.1E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80042E1	-1.12057E-3	-8.80015E1	6.4373E-4	4.36306E-3	9.62734E-2	1.57831E1	-1.98795E1	-1.9942E1	1.50755E1	2.24012E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.41337E-2
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80045E1	-1.14441E-3	-8.80016E1	6.67572E-4	4.673E-3	9.63211E-2	1.58545E1	-1.98381E1	-1.99349E1	1.50449E1	2.24347E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.41199E-2
1.4E1	1.7E2	0.0E0	5.66E2	3.82E2	-7.01548E-2	-8.80047E1	-8.58307E-4	-8.80015E1	8.10623E-4	4.55379E-3	9.64165E-2	1.58179E1	-1.98747E1	-1.99167E1	1.5004E1	2.24012E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.41966E-2
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.00005E-2	-8.80046E1	-8.34465E-4	-8.80014E1	8.58307E-4	4.79221E-3	9.63449E-2	1.58119E1	-1.98741E1	-1.99702E1	1.50148E1	2.24109E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.42177E-2
1.6E1	4.54E2	0.0E0	6.47E2	4.41E2	-7.05415E-2	-8.80043E1	-7.15256E-4	-8.80018E1	1.07288E-3	4.57764E-3	9.63449E-2	1.57879E1	-1.98128E1	-1.99473E1	1.50254E1	2.23603E-9	2.51972E-3	2.51972E-3	6.33461E-3	2.41475E-2
1.7E1	1.269E3	1.0E0	6.87E2	4.7E2	-7.0464E-2	-8.80042E1	-8.34465E-4	-8.80017E1	1.07288E-3	4.72069E-3	9.63926E-2	1.58687E1	-1.9841E1	-1.99188E1	1.50465E1					
1.8E1	5.185E3	4.0E0	7.27E2	5.0E2	-7.06187E-2	-8.80044E1	-9.29832E-4	-8.80017E1	7.39098E-4	4.74453E-3	9.62257E-2	1.5749E1	-1.98353E1	-1.99141E1	1.50532E1	2.23526E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.41127E-2
1.9E1	2.618E3	0.0E0	7.68E2	5.29E2	-7.10051E-2	-8.80045E1	-8.10623E-4	-8.80017E1	8.82149E-4	4.55379E-3	9.63211E-2	1.5854E1	-1.98621E1	-1.99378E1	1.51073E1	2.23678E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.40583E-2
2.0E1	4.0E1	0.0E0	8.08E2	5.58E2	-7.06958E-2	-8.80044E1	-6.91414E-4	-8.80021E1	8.34465E-4	4.93526E-3	9.62257E-2	1.57805E1	-1.98361E1	-2.00026E1	1.50304E1	2.23297E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.42024E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.10051E-2	-8.80047E1	-1.04904E-3	-8.80016E1	9.29832E-4	4.93526E-3	9.62257E-2	1.57949E1	-1.98092E1	-1.9975E1	1.50388E1	2.2327E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.41265E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80042E1	-9.53674E-4	-8.80015E1	1.14441E-3	4.76837E-3	9.63211E-2	1.58371E1	-1.98657E1	-1.9933E1	1.50467E1	2.23915E-9	2.5188E-3	2.5188E-3	6.28552E-3	2.41127E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80044E1	-5.24521E-4	-8.80016E1	7.62939E-4	4.76837E-3	9.6488E-2	1.58236E1	-1.9849E1	-1.99637E1	1.50217E1	2.23915E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.41966E-2