[Scan]
initial_time=2016-01-15T20:16:59
final_time=2016-01-15T20:17:18
ip_count=19
run=1023
dataset=1
scan=5
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.79307E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.71368E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.23665E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.89218E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.36139E-8
mult1=-9.65304E-9
mult2=-2.73698E-9
rf_tmon=-4.65105E-3
rf_agc=3.26543E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.33621E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1955E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12552E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=2.8508E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04321E1
cs_ea1_imon=2.58438E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98608E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65515E1
os_ef1alow_imon=2.99892E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.51803E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.94486E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.05752E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1194E1
os_restr1_imon=4.2758E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.37421E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.06451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=1.19611E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91992E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.94414E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.13394E-9
tplens_vset=0.0E0
tplens_vmon=-1.68229E0
tplens_imon=-3.02951E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99791E1
iondef3_imon=8.64815E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98139E1
iondef2_imon=9.416E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0315E2
lens6_imon=2.98072E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=9.83155E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23948E0
ionrepsh_imon=1.77182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21425E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0618E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.15137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16645E-1
os_ef2bup_imon=-5.08462E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11586E1
os_restr2_imon=3.41626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.2529E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57967E1
iondef1_imon=4.95668E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50476E1
iondef4_imon=5.60835E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.54114E-8
olens1_vset=0.0E0
olens1_vmon=1.57356E-3
olens1_imon=1.2303E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.98881E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82723E2
mask1_imon=2.3947E-4
mask2_vset=0.0E0
mask2_vmon=-1.87041E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.06918E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=6.01293E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33419E1
os_fil1_imon=9.41141E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06981E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64912E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.94864E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62798E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66585E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92346E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22647E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.40082E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27167E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.906E3	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80044E1	-1.23978E-3	-8.80014E1	5.24521E-4	4.98295E-3	9.65834E-2	1.57867E1	-1.98977E1	-1.99301E1	1.50461E1	2.23566E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.41479E-2
2.0E0	3.8E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80043E1	-1.04904E-3	-8.80018E1	7.15256E-4	4.88758E-3	9.65595E-2	1.58297E1	-1.9831E1	-1.99789E1	1.50864E1	2.23773E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.41199E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80043E1	-6.91414E-4	-8.80015E1	9.29832E-4	4.79221E-3	9.60827E-2	1.58319E1	-1.98423E1	-1.99506E1	1.50086E1	2.23863E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.41693E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80044E1	-5.96046E-4	-8.80016E1	8.10623E-4	4.81606E-3	9.64165E-2	1.58079E1	-1.98983E1	-1.99219E1	1.49825E1	2.23487E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.40788E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80044E1	-8.82149E-4	-8.80015E1	9.77516E-4	4.64916E-3	9.64403E-2	1.58654E1	-1.98615E1	-1.9939E1	1.50575E1	2.24442E-9	2.53031E-3	2.53031E-3	6.31817E-3	2.40788E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80046E1	-5.72205E-4	-8.80018E1	9.53674E-4	4.8399E-3	9.61542E-2	1.57531E1	-1.98505E1	-1.99744E1	1.4989E1	2.24251E-9	2.52061E-3	2.52061E-3	6.28056E-3	2.40994E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80045E1	-4.52995E-4	-8.80016E1	8.58307E-4	4.26769E-3	9.65357E-2	1.5865E1	-1.98863E1	-1.99292E1	1.50316E1	2.24402E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.40918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80044E1	-4.05312E-4	-8.80017E1	7.62939E-4	4.55379E-3	9.63449E-2	1.57861E1	-1.98346E1	-1.99054E1	1.50485E1	2.23623E-9	2.5188E-3	2.5188E-3	6.34588E-3	2.40918E-2
1.2E1	1.11E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80047E1	-6.91414E-4	-8.80017E1	1.0252E-3	4.81606E-3	9.61781E-2	1.57879E1	-1.98557E1	-1.99518E1	1.50136E1	2.23235E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41546E-2
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80049E1	-5.00679E-4	-8.80018E1	4.76837E-4	5.126E-3	9.62019E-2	1.58126E1	-1.98328E1	-1.99579E1	1.49956E1	2.23235E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.41337E-2
1.4E1	1.67E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80046E1	-6.91414E-4	-8.80017E1	5.00679E-4	5.05447E-3	9.64642E-2	1.58575E1	-1.98641E1	-1.99685E1	1.49987E1	2.23915E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.41337E-2
1.5E1	1.44E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80044E1	-6.67572E-4	-8.80014E1	7.15256E-4	4.98295E-3	9.66072E-2	1.58564E1	-1.98657E1	-1.99762E1	1.50364E1	2.2406E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41611E-2
1.6E1	4.62E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80042E1	-9.29832E-4	-8.80015E1	9.77516E-4	5.00679E-3	9.61781E-2	1.57819E1	-1.98314E1	-1.99342E1	1.50238E1	2.23678E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.41817E-2
1.7E1	1.252E3	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80042E1	-1.0252E-3	-8.80015E1	9.29832E-4	5.03063E-3	9.63211E-2	1.58131E1	-1.99035E1	-1.99534E1	1.50425E1	2.23332E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.41756E-2
1.8E1	5.216E3	2.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80043E1	-8.10623E-4	-8.80015E1	9.05991E-4	4.93526E-3	9.64642E-2	1.58156E1	-1.98069E1	-2.00104E1	1.501E1	2.24158E-9	2.52045E-3	2.52045E-3	6.29919E-3	2.40918E-2
1.9E1	2.586E3	2.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80043E1	-1.00136E-3	-8.80013E1	8.10623E-4	4.88758E-3	9.61304E-2	1.58353E1	-1.98639E1	-1.99438E1	1.50352E1					
2.0E1	3.4E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80039E1	-9.05991E-4	-8.80017E1	6.4373E-4	5.00679E-3	9.62019E-2	1.58362E1	-1.98422E1	-1.99549E1	1.50094E1	2.23818E-9	2.52099E-3	2.52099E-3	6.28552E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.8004E1	-9.53674E-4	-8.8002E1	5.00679E-4	5.19753E-3	9.63211E-2	1.57687E1	-1.98388E1	-1.99668E1	1.50294E1	2.23235E-9	2.51334E-3	2.51334E-3	6.34588E-3	2.41337E-2
2.2E1	1.8E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80041E1	-5.48363E-4	-8.80018E1	9.77516E-4	4.72069E-3	9.59873E-2	1.58332E1	-1.98747E1	-1.99353E1	1.50163E1	2.23773E-9	2.52384E-3	2.52384E-3	6.35059E-3	2.41199E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80044E1	-5.96046E-4	-8.80015E1	7.39098E-4	5.19753E-3	9.61065E-2	1.57967E1	-1.98139E1	-1.99791E1	1.50476E1	2.23623E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.40082E-2