[Scan]
initial_time=2016-01-15T20:17:26
final_time=2016-01-15T20:17:45
ip_count=19
run=1023
dataset=1
scan=6
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.79438E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-8.57306E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.19948E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.8569E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.36849E-8
mult1=-9.3575E-9
mult2=-2.66054E-9
rf_tmon=-3.80749E-3
rf_agc=3.2029E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=6.42025E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69378E0
bslens_imon=2.26738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=2.01443E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=2.85476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04671E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04411E1
cs_ea1_imon=2.56455E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98788E0
lens1_imon=1.65814E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.522E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.95135E-5
olens2_vset=0.0E0
olens2_vmon=9.05991E-4
olens2_imon=1.05932E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10967E1
os_restr1_imon=4.2704E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.35799E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=1.19431E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92005E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=2.95639E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.27098E-9
tplens_vset=0.0E0
tplens_vmon=-1.70632E0
tplens_imon=-3.20976E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99532E1
iondef3_imon=8.78153E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98706E1
iondef2_imon=9.26099E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03137E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=9.2535E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=1.7693E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74375E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23648E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06172E2
lens4b_imon=2.00799E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.36002E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.39788E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.23992E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57778E1
iondef1_imon=5.45055E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50286E1
iondef4_imon=5.50744E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.53804E-8
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=1.22778E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1818E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0215E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.52206E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-5.65243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82754E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.48375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33239E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33414E1
os_fil1_imon=9.423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64689E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.96558E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62168E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66535E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.02916E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.85818E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22611E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.41127E-2
chamber_ion_pmon=2.24207E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61695E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.846E3	3.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80043E1	-6.19888E-4	-8.80014E1	6.67572E-4	4.98295E-3	9.62734E-2	1.57938E1	-1.98511E1	-1.99703E1	1.50381E1	2.2406E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.41199E-2
2.0E0	3.955E3	6.0E0	3.16E2	1.6E2	-7.17007E-2	-8.80045E1	-6.67572E-4	-8.80016E1	6.4373E-4	4.81606E-3	9.60112E-2	1.58504E1	-1.98446E1	-1.99642E1	1.50124E1	2.23869E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.41611E-2
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80048E1	-7.86781E-4	-8.80017E1	7.39098E-4	4.48227E-3	9.62734E-2	1.58174E1	-1.9847E1	-1.9926E1	1.5037E1	2.23963E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.42121E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.80047E1	-1.0252E-3	-8.80017E1	6.19888E-4	4.52995E-3	9.63926E-2	1.57861E1	-1.98487E1	-1.99301E1	1.503E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80045E1	-8.10623E-4	-8.80017E1	7.86781E-4	4.55379E-3	9.65357E-2	1.58281E1	-1.98597E1	-1.99498E1	1.5013E1	2.23731E-9	2.51814E-3	2.51814E-3	6.32858E-3	2.41067E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80047E1	-8.82149E-4	-8.80014E1	1.14441E-3	4.43459E-3	9.62734E-2	1.58726E1	-1.9844E1	-1.99744E1	1.50106E1	2.23863E-9	2.52473E-3	2.52473E-3	6.31858E-3	2.41052E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80045E1	-9.29832E-4	-8.80016E1	9.77516E-4	4.52995E-3	9.64403E-2	1.5838E1	-1.98476E1	-1.9952E1	1.50382E1	2.23964E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.40788E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80047E1	-9.05991E-4	-8.80016E1	9.05991E-4	4.48227E-3	9.63211E-2	1.57867E1	-1.98537E1	-1.99492E1	1.50076E1	2.24207E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.39665E-2
1.2E1	1.12E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80044E1	-7.62939E-4	-8.80014E1	5.96046E-4	4.41074E-3	9.62019E-2	1.58179E1	-1.98796E1	-1.98961E1	1.50292E1	2.2372E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.41966E-2
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80042E1	-1.0252E-3	-8.80012E1	5.96046E-4	4.64916E-3	9.61065E-2	1.5838E1	-1.9857E1	-1.9998E1	1.50304E1	2.23526E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.40708E-2
1.4E1	1.57E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80045E1	-1.0252E-3	-8.80015E1	1.04904E-3	4.69685E-3	9.64403E-2	1.59753E1	-1.99588E1	-1.98693E1	1.50244E1	2.23332E-9	2.51225E-3	2.51225E-3	6.30192E-3	2.41756E-2
1.5E1	1.16E2	1.0E0	6.06E2	4.11E2	-7.13143E-2	-8.80043E1	-1.23978E-3	-8.80011E1	9.77516E-4	4.43459E-3	9.59158E-2	1.58522E1	-1.98728E1	-1.99481E1	1.50382E1	2.23526E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.41546E-2
1.6E1	4.84E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80045E1	-1.16825E-3	-8.80012E1	5.72205E-4	4.36306E-3	9.62257E-2	1.57678E1	-1.98458E1	-1.99514E1	1.50557E1	2.23915E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.41756E-2
1.7E1	1.266E3	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80042E1	-1.26362E-3	-8.80015E1	6.91414E-4	4.72069E-3	9.61781E-2	1.58702E1	-1.98561E1	-1.9945E1	1.5013E1	2.23843E-9	2.52243E-3	2.52243E-3	6.34007E-3	2.40542E-2
1.8E1	5.201E3	5.0E0	7.27E2	5.0E2	-7.15461E-2	-8.8004E1	-1.09673E-3	-8.80013E1	8.58307E-4	4.673E-3	9.60827E-2	1.58191E1	-1.98765E1	-1.99252E1	1.50509E1					
1.9E1	2.6E3	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80043E1	-7.86781E-4	-8.80015E1	4.05312E-4	4.62532E-3	9.61542E-2	1.58772E1	-1.98446E1	-1.998E1	1.50133E1	2.23915E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.39665E-2
2.0E1	4.1E1	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80042E1	-8.10623E-4	-8.80017E1	6.4373E-4	4.52995E-3	9.60112E-2	1.58528E1	-1.98816E1	-1.99497E1	1.50074E1	2.23731E-9	2.51498E-3	2.51498E-3	6.30212E-3	2.40865E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80043E1	-7.39098E-4	-8.80015E1	7.62939E-4	4.57764E-3	9.62496E-2	1.57809E1	-1.9837E1	-1.9983E1	1.50526E1	2.24012E-9	2.52179E-3	2.52179E-3	6.33021E-3	2.41192E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.08504E-2	-8.80043E1	-8.34465E-4	-8.80016E1	6.19888E-4	4.74453E-3	9.63688E-2	1.5884E1	-2.00063E1	-1.99683E1	1.50412E1	2.2406E-9	2.52276E-3	2.52276E-3	6.29665E-3	2.40994E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80044E1	-7.86781E-4	-8.80016E1	7.62939E-4	4.69685E-3	9.62496E-2	1.57778E1	-1.98706E1	-1.99532E1	1.50286E1	2.24207E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.41127E-2