[Scan]
initial_time=2016-01-15T20:17:52
final_time=2016-01-15T20:18:12
ip_count=19
run=1023
dataset=1
scan=7
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.77374E-6
ql1_vset=
ql1_vmon=-8.8004E1
ql1_imon=-7.65944E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.1983E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.89568E-9
ql4_vset=
ql4_vmon=9.77516E-4
ql4_imon=1.36528E-8
mult1=-9.03831E-9
mult2=-2.87612E-9
rf_tmon=-5.29994E-3
rf_agc=3.22591E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=6.32632E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12553E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53505E1
cs_ef1b_imon=2.85811E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03897E1
cs_ea1_imon=2.58396E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01767E0
lens1_imon=1.57346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64967E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.50303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84591E1
cs_ef1a_imon=2.95507E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.05758E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=2.3447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25564E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91979E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01856E1
cs_anode1_imon=2.95194E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99964E1
olens4_imon=4.24063E-9
tplens_vset=0.0E0
tplens_vmon=-1.70809E0
tplens_imon=-1.78547E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99278E1
iondef3_imon=8.85756E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98511E1
iondef2_imon=9.1478E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03121E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.61542E-2
ql6_imon=9.88805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=1.77379E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27864E0
os_ea2_imon=-1.03154E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0616E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.16497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06962E0
os_ef2alow_imon=-2.43557E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8333E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11372E1
os_restr2_imon=3.39295E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.2416E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5815E1
iondef1_imon=5.24029E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50265E1
iondef4_imon=5.49496E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.5399E-8
olens1_vset=0.0E0
olens1_vmon=1.97887E-3
olens1_imon=1.22417E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17011E0
cs_ionaccel_imon=-1.62584E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02138E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.64614E-6
window_vset=0.0E0
window_vmon=2.48963E-1
window_imon=-7.74401E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82778E2
mask1_imon=2.39046E-4
mask2_vset=0.0E0
mask2_vmon=-1.86709E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58863E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33417E1
os_fil1_imon=9.42768E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07109E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64673E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.97538E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62893E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6665E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00396E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38641E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17651E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22698E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.38834E-2
chamber_ion_pmon=2.2372E-9
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55731E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=227
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.927E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80044E1	-1.0252E-3	-8.80013E1	7.39098E-4	5.07832E-3	9.59873E-2	1.58011E1	-1.98789E1	-1.99642E1	1.50166E1	2.23964E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.39355E-2
2.0E0	4.005E3	2.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80043E1	-7.15256E-4	-8.80014E1	8.58307E-4	5.24521E-3	9.59396E-2	1.58277E1	-1.98563E1	-1.99285E1	1.50172E1	2.23107E-9	2.51203E-3	2.51203E-3	6.31278E-3	2.42437E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80042E1	-1.23978E-3	-8.80015E1	5.48363E-4	4.81606E-3	9.63926E-2	1.58109E1	-1.98246E1	-2.00098E1	1.50213E1	2.23566E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.40839E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80042E1	-1.16825E-3	-8.8002E1	6.67572E-4	4.673E-3	9.63926E-2	1.58228E1	-1.98777E1	-1.99659E1	1.49579E1	2.24251E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.39355E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80042E1	-1.23978E-3	-8.80016E1	6.4373E-4	4.60148E-3	9.6488E-2	1.58923E1	-1.98629E1	-1.99048E1	1.49999E1	2.23764E-9	2.51804E-3	2.51804E-3	6.35223E-3	2.40839E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80044E1	-9.77516E-4	-8.80016E1	7.39098E-4	4.74453E-3	9.62257E-2	1.57735E1	-1.98032E1	-1.99774E1	1.50292E1	2.24304E-9	2.52428E-3	2.52428E-3	6.33486E-3	2.40708E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80044E1	-8.34465E-4	-8.80015E1	5.96046E-4	4.79221E-3	9.63449E-2	1.57796E1	-1.98151E1	-1.99526E1	1.50112E1	2.2372E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80045E1	-9.05991E-4	-8.8002E1	8.82149E-4	4.72069E-3	9.65595E-2	1.58287E1	-1.9817E1	-1.99089E1	1.50364E1	2.23637E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.40865E-2
1.2E1	1.26E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.8004E1	-6.91414E-4	-8.80017E1	8.58307E-4	4.91142E-3	9.63926E-2	1.5779E1	-1.98641E1	-1.99431E1	1.50311E1	2.24012E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.41756E-2
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80042E1	-8.10623E-4	-8.80016E1	8.58307E-4	5.19753E-3	9.63688E-2	1.58651E1	-1.98688E1	-1.99024E1	1.50443E1	2.23773E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.39764E-2
1.4E1	1.54E2	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80043E1	-8.82149E-4	-8.80017E1	1.0252E-3	5.00679E-3	9.64642E-2	1.57813E1	-1.98338E1	-1.99882E1	1.5016E1	2.24109E-9	2.51334E-3	2.51334E-3	6.34588E-3	2.41127E-2
1.5E1	1.08E2	1.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80043E1	-6.67572E-4	-8.80015E1	1.00136E-3	4.72069E-3	9.63688E-2	1.58552E1	-1.9936E1	-1.9939E1	1.50587E1	2.23041E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.41756E-2
1.6E1	4.76E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80045E1	-5.96046E-4	-8.80017E1	7.86781E-4	4.62532E-3	9.6488E-2	1.57843E1	-1.98246E1	-1.99956E1	1.49999E1	2.24277E-9	2.51863E-3	2.51863E-3	6.31555E-3	2.4106E-2
1.7E1	1.243E3	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80044E1	-7.39098E-4	-8.80017E1	9.05991E-4	4.3869E-3	9.64642E-2	1.57952E1	-1.98326E1	-1.99573E1	1.5052E1					
1.8E1	5.203E3	1.0E0	7.27E2	5.0E2	-7.201E-2	-8.80043E1	-8.82149E-4	-8.80017E1	9.53674E-4	4.62532E-3	9.63449E-2	1.5814E1	-1.99294E1	-1.9923E1	1.50365E1	2.2369E-9	2.52405E-3	2.52405E-3	6.34385E-3	2.40742E-2
1.9E1	2.599E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80043E1	-8.58307E-4	-8.80016E1	8.34465E-4	4.69685E-3	9.65118E-2	1.57759E1	-1.98579E1	-1.99576E1	1.50485E1	2.24113E-9	2.52179E-3	2.52179E-3	6.33021E-3	2.40974E-2
2.0E1	3.1E1	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80042E1	-9.05991E-4	-8.80018E1	1.07288E-3	4.57764E-3	9.63449E-2	1.58375E1	-1.98453E1	-1.99273E1	1.50518E1	2.23429E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41337E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80041E1	-6.19888E-4	-8.80015E1	9.77516E-4	4.74453E-3	9.65118E-2	1.58469E1	-1.98458E1	-1.99054E1	1.50629E1	2.23963E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.40626E-2
2.2E1	2.2E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.8004E1	-5.72205E-4	-8.80012E1	9.77516E-4	5.19753E-3	9.60112E-2	1.57973E1	-1.98464E1	-1.99768E1	1.49884E1	2.23011E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.40173E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.8004E1	-7.62939E-4	-8.80014E1	9.77516E-4	4.93526E-3	9.61542E-2	1.5815E1	-1.98511E1	-1.99278E1	1.50265E1	2.2372E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.38834E-2