[Scan]
initial_time=2016-01-15T20:18:19
final_time=2016-01-15T20:18:38
ip_count=19
run=1023
dataset=1
scan=8
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.76526E-6
ql1_vset=
ql1_vmon=-8.80047E1
ql1_imon=-8.38864E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.16596E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.79162E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.37127E-8
mult1=-9.33101E-9
mult2=-2.13775E-9
rf_tmon=-6.05655E-3
rf_agc=3.20839E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.29914E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6883E0
bslens_imon=2.0758E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19787E1
lens5a_imon=1.99018E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12542E2
lens4a_imon=2.04961E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53974E1
cs_ef1b_imon=2.84977E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.57522E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95718E0
lens1_imon=1.66213E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64973E1
os_ef1alow_imon=2.99225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.52298E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84689E1
cs_ef1a_imon=2.94499E-5
olens2_vset=0.0E0
olens2_vmon=3.57628E-4
olens2_imon=1.06221E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=4.28539E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15271E1
os_ea1_imon=2.34788E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1791E0
cs_ionrep_imon=1.2122E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91986E2
cs_nozzle_imon=1.93566E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=2.98565E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99965E1
olens4_imon=4.19198E-9
tplens_vset=0.0E0
tplens_vmon=-1.67851E0
tplens_imon=-4.68779E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99402E1
iondef3_imon=8.97259E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97497E1
iondef2_imon=9.32717E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03114E2
lens6_imon=2.98214E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=9.79781E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27411E0
ionrepsh_imon=1.76388E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33773E1
lens5b_imon=2.1692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.13196E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.26716E0
os_ea2_imon=-6.07827E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.00404E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.15594E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0256E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.12869E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.4072E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.29094E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.25098E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57891E1
iondef1_imon=5.27391E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50533E1
iondef4_imon=5.3768E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.53657E-8
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=1.23388E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17764E0
cs_ionaccel_imon=-1.66754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47476E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.87203E-6
window_vset=0.0E0
window_vmon=2.5128E-1
window_imon=-8.82134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82736E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.8712E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.60645E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.26811E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.01201E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51671E0
defgridb_imon=6.18468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33397E1
os_fil1_imon=9.42455E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64691E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=9.96397E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63142E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20775E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.03809E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.44909E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.42354E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22633E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.41127E-2
chamber_ion_pmon=2.24109E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.72152E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.816E3	0.0E0	1.47E2	4.1E1	-7.17007E-2	-8.80045E1	-1.04904E-3	-8.80018E1	8.34465E-4	4.95911E-3	9.65357E-2	1.58227E1	-1.98877E1	-1.99467E1	1.50148E1	2.24012E-9	2.51919E-3	2.51919E-3	6.30212E-3	2.40865E-2
2.0E0	4.062E3	2.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80046E1	-1.0252E-3	-8.80019E1	7.39098E-4	5.05447E-3	9.63449E-2	1.57561E1	-1.98777E1	-1.98924E1	1.5031E1	2.23138E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.39457E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80043E1	-1.09673E-3	-8.80019E1	7.39098E-4	5.24521E-3	9.68218E-2	1.58616E1	-1.98104E1	-1.98989E1	1.50515E1	2.24109E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.40291E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80042E1	-9.05991E-4	-8.80017E1	7.15256E-4	4.88758E-3	9.64403E-2	1.57662E1	-1.9826E1	-1.99762E1	1.50292E1	2.24402E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.40082E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80042E1	-1.09673E-3	-8.80012E1	7.39098E-4	5.22137E-3	9.62734E-2	1.592E1	-1.98688E1	-1.98995E1	1.50543E1	2.23583E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.40994E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80043E1	-1.04904E-3	-8.80013E1	1.04904E-3	4.8399E-3	9.65118E-2	1.57732E1	-1.98851E1	-1.99445E1	1.50546E1	2.23818E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.40918E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80045E1	-9.05991E-4	-8.80016E1	1.12057E-3	4.81606E-3	9.61542E-2	1.5799E1	-1.98395E1	-1.99715E1	1.50122E1	2.24207E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.41546E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80044E1	-1.0252E-3	-8.80017E1	5.48363E-4	4.74453E-3	9.60588E-2	1.57891E1	-1.98153E1	-1.98857E1	1.50497E1	2.24284E-9	2.5267E-3	2.5267E-3	6.33809E-3	2.41012E-2
1.2E1	1.27E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80044E1	-1.19209E-3	-8.80016E1	5.48363E-4	4.48227E-3	9.6035E-2	1.58051E1	-1.98409E1	-1.99395E1	1.5071E1	2.2426E-9	2.51804E-3	2.51804E-3	6.27954E-3	2.4255E-2
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80048E1	-1.00136E-3	-8.80014E1	1.0252E-3	4.76837E-3	9.62257E-2	1.58197E1	-1.99101E1	-1.99349E1	1.50294E1	2.2427E-9	2.52802E-3	2.52802E-3	6.33065E-3	2.41115E-2
1.4E1	1.6E2	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80045E1	-1.12057E-3	-8.80015E1	8.10623E-4	5.05447E-3	9.60588E-2	1.57903E1	-1.98314E1	-1.9933E1	1.50412E1	2.23818E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41127E-2
1.5E1	1.26E2	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80046E1	-1.12057E-3	-8.80013E1	8.58307E-4	4.88758E-3	9.62257E-2	1.58584E1	-1.9848E1	-1.98952E1	1.50497E1	2.24347E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.41199E-2
1.6E1	4.97E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80049E1	-9.05991E-4	-8.80013E1	6.67572E-4	4.98295E-3	9.61065E-2	1.57175E1	-1.96635E1	-2.00008E1	1.50022E1	2.23825E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.41876E-2
1.7E1	1.265E3	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80052E1	-1.16825E-3	-8.80015E1	7.15256E-4	4.86374E-3	9.61542E-2	1.57997E1	-1.9883E1	-1.99561E1	1.50695E1	2.23863E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.40839E-2
1.8E1	5.347E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80047E1	-1.26362E-3	-8.80013E1	4.52995E-4	4.76837E-3	9.61065E-2	1.58185E1	-1.98933E1	-1.98987E1	1.50175E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.41199E-2
1.9E1	2.524E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80046E1	-9.29832E-4	-8.80014E1	7.86781E-4	4.62532E-3	9.6035E-2	1.58286E1	-1.99272E1	-1.99461E1	1.50128E1	2.24442E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.40378E-2
2.0E1	4.3E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80047E1	-9.53674E-4	-8.80012E1	5.48363E-4	4.673E-3	9.61781E-2	1.58221E1	-1.98765E1	-1.99468E1	1.51422E1	2.24155E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.40788E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80044E1	-1.0252E-3	-8.80013E1	6.91414E-4	5.26905E-3	9.63211E-2	1.57938E1	-1.98293E1	-1.99703E1	1.49902E1	2.23623E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.40082E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80047E1	-1.38283E-3	-8.80014E1	8.34465E-4	4.93526E-3	9.59396E-2	1.58305E1	-1.98579E1	-1.99967E1	1.50058E1	2.23392E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.40788E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80047E1	-9.53674E-4	-8.80014E1	5.72205E-4	4.88758E-3	9.61065E-2	1.57891E1	-1.97497E1	-1.99402E1	1.50533E1	2.24109E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.41127E-2