[Scan]
initial_time=2016-01-15T20:19:12
final_time=2016-01-15T20:19:32
ip_count=19
run=1023
dataset=1
scan=10
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80981E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-8.29446E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.23768E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.9775E-9
ql4_vset=
ql4_vmon=1.14441E-3
ql4_imon=1.35984E-8
mult1=-9.81854E-9
mult2=-2.67426E-9
rf_tmon=-5.83085E-3
rf_agc=3.16397E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=6.19781E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6247E0
bslens_imon=2.38195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.98162E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1255E2
lens4a_imon=2.0508E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53878E1
cs_ef1b_imon=2.85018E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04367E1
cs_ea1_imon=2.5742E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98981E0
lens1_imon=1.56368E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64911E1
os_ef1alow_imon=2.97668E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.51277E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8447E1
cs_ef1a_imon=2.95722E-5
olens2_vset=0.0E0
olens2_vmon=1.04904E-3
olens2_imon=1.06172E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11167E1
os_restr1_imon=4.26762E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15102E1
os_ea1_imon=2.3472E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63868E1
os_ef1bup_imon=3.09215E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18118E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=2.9783E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.11016E-9
tplens_vset=0.0E0
tplens_vmon=-1.66618E0
tplens_imon=-3.73095E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99396E1
iondef3_imon=8.92475E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98305E1
iondef2_imon=9.12602E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03106E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=1.02899E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24165E0
ionrepsh_imon=1.77178E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33899E1
lens5b_imon=2.17431E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74945E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27079E0
os_ea2_imon=-7.19537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06197E2
lens4b_imon=2.0055E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71431E1
cs_ef2a_imon=3.16513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02753E0
os_ef2alow_imon=-2.38669E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96883E-1
os_ef2bup_imon=-5.4324E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.41067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30093E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01788E1
cs_anode2_imon=2.23163E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5789E1
iondef1_imon=5.18318E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50076E1
iondef4_imon=5.21624E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.54228E-8
olens1_vset=0.0E0
olens1_vmon=1.95503E-3
olens1_imon=1.23586E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16852E0
cs_ionaccel_imon=-1.45903E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02126E2
cs_ionfocb_imon=1.47252E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56546E1
einzel_imon=7.84029E-6
window_vset=0.0E0
window_vmon=2.41009E-1
window_imon=-7.51928E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82776E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.87004E1
mask2_imon=-4.9893E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.14305E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.53265E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.90879E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3486E0
defgridb_imon=6.18951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33427E1
os_fil1_imon=9.44253E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0747E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64923E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=9.98404E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63583E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66951E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21471E-2
os_fil2_imon=-2.75066E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88105E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.52902E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.19938E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22863E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.41693E-2
chamber_ion_pmon=2.24161E-9
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64458E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=187
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.791E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80045E1	-7.39098E-4	-8.80016E1	6.67572E-4	5.26905E-3	9.59396E-2	1.58271E1	-1.98435E1	-1.99359E1	1.50596E1	2.23079E-9	2.51423E-3	2.51423E-3	6.29237E-3	2.40124E-2
2.0E0	3.946E3	1.0E1	3.16E2	1.6E2	-7.24736E-2	-8.80046E1	-9.05991E-4	-8.80015E1	1.0252E-3	5.05447E-3	9.6035E-2	1.58167E1	-1.98539E1	-1.99524E1	1.50376E1	2.23709E-9	2.52179E-3	2.52179E-3	6.3131E-3	2.40106E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80048E1	-9.29832E-4	-8.80015E1	7.86781E-4	4.93526E-3	9.63211E-2	1.57943E1	-1.9847E1	-1.99107E1	1.5041E1	2.23623E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.42177E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80047E1	-9.53674E-4	-8.80017E1	6.91414E-4	4.62532E-3	9.6035E-2	1.57943E1	-1.98588E1	-1.99697E1	1.5034E1	2.24347E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.41611E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80044E1	-1.16825E-3	-8.80016E1	1.0252E-3	4.93526E-3	9.59158E-2	1.58371E1	-1.98513E1	-1.99702E1	1.50593E1	2.24347E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.41611E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80045E1	-1.09673E-3	-8.80012E1	6.19888E-4	4.81606E-3	9.60588E-2	1.58431E1	-1.98603E1	-1.99077E1	1.5028E1	2.24109E-9	2.52373E-3	2.52373E-3	6.32661E-3	2.40708E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80046E1	-7.15256E-4	-8.80013E1	5.72205E-4	4.673E-3	9.64165E-2	1.58115E1	-1.98387E1	-1.99437E1	1.50358E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80043E1	-8.10623E-4	-8.80011E1	6.67572E-4	4.88758E-3	9.63688E-2	1.58017E1	-1.98314E1	-1.9948E1	1.50382E1	2.24012E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.40708E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80043E1	-6.91414E-4	-8.80016E1	5.96046E-4	4.76837E-3	9.64165E-2	1.58227E1	-1.98747E1	-1.99408E1	1.50364E1	2.24326E-9	2.52243E-3	2.52243E-3	6.31283E-3	2.40128E-2
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80042E1	-6.91414E-4	-8.80017E1	7.86781E-4	4.62532E-3	9.62734E-2	1.57843E1	-1.98675E1	-1.99816E1	1.50262E1					
1.4E1	1.42E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80042E1	-6.67572E-4	-8.80016E1	4.29153E-4	4.79221E-3	9.62973E-2	1.58185E1	-1.98224E1	-1.99534E1	1.50382E1	2.23915E-9	2.51334E-3	2.51334E-3	6.34588E-3	2.41127E-2
1.5E1	1.56E2	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80041E1	-4.76837E-4	-8.80017E1	5.48363E-4	4.72069E-3	9.62734E-2	1.58383E1	-1.98675E1	-1.99306E1	1.50068E1	2.23623E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.40291E-2
1.6E1	4.53E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80041E1	-6.19888E-4	-8.80017E1	9.77516E-4	4.72069E-3	9.61065E-2	1.57902E1	-1.98647E1	-1.99626E1	1.50256E1	2.23818E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.40082E-2
1.7E1	1.273E3	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80044E1	-6.91414E-4	-8.80016E1	6.91414E-4	4.74453E-3	9.63926E-2	1.58377E1	-1.98476E1	-1.99973E1	1.50076E1	2.23678E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.39968E-2
1.8E1	5.395E3	4.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80046E1	-6.19888E-4	-8.80014E1	6.91414E-4	4.36306E-3	9.61542E-2	1.58274E1	-1.9857E1	-1.99166E1	1.50449E1	2.24207E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.39249E-2
1.9E1	2.601E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80044E1	-6.91414E-4	-8.80017E1	5.48363E-4	4.81606E-3	9.63211E-2	1.58053E1	-1.97972E1	-1.99997E1	1.50052E1	2.23678E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.39968E-2
2.0E1	3.6E1	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80044E1	-7.15256E-4	-8.80016E1	8.34465E-4	4.74453E-3	9.62496E-2	1.58463E1	-1.98305E1	-1.99331E1	1.50074E1	2.23915E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.39665E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80043E1	-5.48363E-4	-8.80017E1	8.10623E-4	5.00679E-3	9.61065E-2	1.58002E1	-1.98576E1	-1.99355E1	1.50292E1	2.23869E-9	2.51847E-3	2.51847E-3	6.35059E-3	2.39764E-2
2.2E1	1.9E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80045E1	-7.39098E-4	-8.80017E1	9.53674E-4	4.86374E-3	9.61542E-2	1.58264E1	-1.98655E1	-1.99445E1	1.50136E1	2.24251E-9	2.5131E-3	2.5131E-3	6.33436E-3	2.40788E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80044E1	-1.04904E-3	-8.80016E1	1.14441E-3	4.93526E-3	9.62019E-2	1.5789E1	-1.98305E1	-1.99396E1	1.50076E1	2.24161E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.41693E-2