[Scan]
initial_time=2016-01-15T20:19:39
final_time=2016-01-15T20:19:58
ip_count=19
run=1023
dataset=1
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.80217E-6
ql1_vset=
ql1_vmon=-8.80046E1
ql1_imon=-7.69472E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.2547E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.97339E-9
ql4_vset=
ql4_vmon=1.07288E-3
ql4_imon=1.36389E-8
mult1=-1.00655E-8
mult2=-2.4172E-9
rf_tmon=-4.65061E-3
rf_agc=3.30752E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=6.02055E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19592E1
lens5a_imon=2.00831E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12567E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53965E1
cs_ef1b_imon=2.86701E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=2.54833E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96445E0
lens1_imon=1.73385E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.53822E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.96468E-5
olens2_vset=0.0E0
olens2_vmon=9.29832E-4
olens2_imon=1.07033E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14789E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20644E0
cs_ionrep_imon=1.16979E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.9809E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.17563E-9
tplens_vset=0.0E0
tplens_vmon=-1.64684E0
tplens_imon=-2.77716E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99684E1
iondef3_imon=8.59407E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98122E1
iondef2_imon=9.21773E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03133E2
lens6_imon=2.98234E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=9.93466E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.77254E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2563E0
os_ea2_imon=-9.66262E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06165E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01732E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11087E1
os_restr2_imon=3.41806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.28522E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.23524E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57723E1
iondef1_imon=5.29915E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50388E1
iondef4_imon=5.45338E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.53015E-8
olens1_vset=0.0E0
olens1_vmon=1.90735E-3
olens1_imon=1.23528E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15417E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82758E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.73249E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50057E3
multb_neg_imon=7.50898E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=5.98769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33414E1
os_fil1_imon=9.41729E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65208E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.96245E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62522E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66529E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9415E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22726E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.39351E-2
chamber_ion_pmon=2.23764E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45477E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.848E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80044E1	-1.00136E-3	-8.80013E1	1.21593E-3	4.673E-3	9.5892E-2	1.57801E1	-1.98458E1	-1.99834E1	1.50274E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.40918E-2
2.0E0	4.041E3	3.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80043E1	-9.05991E-4	-8.80014E1	1.33514E-3	5.05447E-3	9.61065E-2	1.58149E1	-1.98519E1	-1.993E1	1.50304E1	2.23526E-9	2.52428E-3	2.52428E-3	6.28006E-3	2.39873E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80043E1	-9.77516E-4	-8.80016E1	1.00136E-3	5.03063E-3	9.62734E-2	1.58278E1	-1.98179E1	-1.99703E1	1.50491E1	2.23332E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.40918E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80045E1	-1.0252E-3	-8.80016E1	1.0252E-3	4.74453E-3	9.62257E-2	1.58024E1	-1.98401E1	-1.99591E1	1.50276E1	2.23544E-9	2.51814E-3	2.51814E-3	6.32328E-3	2.41269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80045E1	-9.53674E-4	-8.80015E1	7.86781E-4	4.52995E-3	9.66311E-2	1.57948E1	-1.98485E1	-1.99639E1	1.50029E1	2.23487E-9	2.52285E-3	2.52285E-3	6.3074E-3	2.41337E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80046E1	-8.82149E-4	-8.80016E1	8.10623E-4	4.69685E-3	9.64403E-2	1.58258E1	-1.98453E1	-1.99132E1	1.50497E1	2.23407E-9	2.51725E-3	2.51725E-3	6.3131E-3	2.4054E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80049E1	-6.91414E-4	-8.80017E1	9.53674E-4	4.98295E-3	9.67503E-2	1.58107E1	-1.98747E1	-1.99113E1	1.50172E1	2.23468E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.39563E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.45602E-2	-8.80046E1	-5.96046E-4	-8.80015E1	1.16825E-3	4.72069E-3	9.63688E-2	1.58005E1	-1.98633E1	-1.99324E1	1.50491E1	2.23526E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.41127E-2
1.2E1	1.2E2	0.0E0	4.85E2	3.23E2	-7.46377E-2	-8.80048E1	-7.15256E-4	-8.80018E1	8.34465E-4	5.03063E-3	9.61304E-2	1.58362E1	-1.9867E1	-1.9949E1	1.50358E1	2.23818E-9	2.5199E-3	2.5199E-3	6.3514E-3	2.40918E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80046E1	-9.05991E-4	-8.80016E1	9.05991E-4	5.07832E-3	9.64403E-2	1.57656E1	-1.98338E1	-1.9993E1	1.50166E1	2.24155E-9	2.50989E-3	2.50989E-3	6.33436E-3	2.40378E-2
1.4E1	1.5E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80045E1	-9.29832E-4	-8.80013E1	8.58307E-4	4.673E-3	9.63211E-2	1.58156E1	-1.98546E1	-1.99408E1	1.50456E1	2.23915E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.41127E-2
1.5E1	1.22E2	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80045E1	-1.09673E-3	-8.80011E1	8.58307E-4	4.74453E-3	9.65357E-2	1.58311E1	-1.9835E1	-1.99696E1	1.50136E1	2.24347E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.40583E-2
1.6E1	4.8E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80043E1	-7.15256E-4	-8.80013E1	9.05991E-4	4.91142E-3	9.63211E-2	1.57928E1	-1.98435E1	-1.99561E1	1.50135E1	2.22945E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.41127E-2
1.7E1	1.323E3	3.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80044E1	-8.10623E-4	-8.80014E1	9.77516E-4	5.07832E-3	9.61304E-2	1.58023E1	-1.98347E1	-1.99784E1	1.5034E1	2.23369E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.41052E-2
1.8E1	5.344E3	6.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80043E1	-8.58307E-4	-8.80014E1	6.91414E-4	5.126E-3	9.63688E-2	1.58564E1	-1.98514E1	-1.98943E1	1.50479E1	2.23964E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.40583E-2
1.9E1	2.709E3	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80044E1	-9.53674E-4	-8.80016E1	7.86781E-4	4.81606E-3	9.66072E-2	1.5854E1	-1.98314E1	-1.99967E1	1.50124E1	2.23769E-9	2.51826E-3	2.51826E-3	6.32112E-3	2.41127E-2
2.0E1	4.5E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80043E1	-1.04904E-3	-8.80014E1	5.48363E-4	4.95911E-3	9.63926E-2	1.58071E1	-1.98669E1	-1.99474E1	1.50358E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80043E1	-8.82149E-4	-8.80013E1	8.10623E-4	4.95911E-3	9.63211E-2	1.5778E1	-1.98614E1	-1.999E1	1.5012E1	2.23429E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.42177E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80044E1	-1.04904E-3	-8.80014E1	9.05991E-4	4.57764E-3	9.65595E-2	1.58748E1	-1.98171E1	-1.99787E1	1.50303E1	2.23918E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.40261E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80046E1	-1.00136E-3	-8.80015E1	1.07288E-3	4.62532E-3	9.62019E-2	1.57723E1	-1.98122E1	-1.99684E1	1.50388E1	2.23764E-9	2.51693E-3	2.51693E-3	6.3074E-3	2.39351E-2