[Scan]
initial_time=2016-01-15T20:20:32
final_time=2016-01-15T20:20:52
ip_count=19
run=1023
dataset=1
scan=13
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.7743E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.90024E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.20054E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.84772E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.36293E-8
mult1=-8.95775E-9
mult2=-2.7226E-9
rf_tmon=-4.84288E-3
rf_agc=3.35559E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=6.18398E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.3575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=2.02273E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12563E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.8544E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04562E2
lens23_imon=1.0198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=2.59555E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99149E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03486E1
cs_ea2_imon=1.48955E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=2.93152E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=1.06351E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.28517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.39043E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=1.20945E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.96432E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.16058E-9
tplens_vset=0.0E0
tplens_vmon=-1.62581E0
tplens_imon=-4.68779E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99492E1
iondef3_imon=8.96178E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98416E1
iondef2_imon=9.25739E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03094E2
lens6_imon=2.97917E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=9.81045E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=1.78768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34114E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.14455E0
os_ea2_imon=-9.04978E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00785E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71846E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02813E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1155E1
os_restr2_imon=3.40833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23112E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24064E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58906E1
iondef1_imon=5.25228E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50431E1
iondef4_imon=5.38851E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.54654E-8
olens1_vset=0.0E0
olens1_vmon=2.00272E-3
olens1_imon=1.24275E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02163E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56874E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82714E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=5.09727E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93538E3
defgrida_imon=8.78514E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50416E3
multb_neg_imon=4.14196E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.03765E0
defgridb_imon=6.4996E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33423E1
os_fil1_imon=9.41249E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65047E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3086E1
cs_fil1_imon=9.96209E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66674E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93764E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22644E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.41479E-2
chamber_ion_pmon=2.23963E-9
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.842E3	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.8004E1	-9.53674E-4	-8.80016E1	5.96046E-4	4.76837E-3	9.62973E-2	1.58197E1	-1.98251E1	-1.99738E1	1.50259E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41546E-2
2.0E0	3.923E3	2.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80042E1	-9.29832E-4	-8.80013E1	7.39098E-4	4.673E-3	9.61542E-2	1.58203E1	-1.98257E1	-1.99787E1	1.50334E1	2.23964E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.40994E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80043E1	-6.19888E-4	-8.80013E1	6.91414E-4	4.72069E-3	9.62257E-2	1.58321E1	-1.98753E1	-1.99366E1	1.49813E1	2.23566E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80044E1	-1.00136E-3	-8.80013E1	6.19888E-4	4.57764E-3	9.63211E-2	1.58333E1	-1.98458E1	-1.99832E1	1.49976E1	2.2406E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.4223E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80046E1	-9.77516E-4	-8.80013E1	7.62939E-4	4.43459E-3	9.65118E-2	1.58079E1	-1.98458E1	-1.9972E1	1.50202E1	2.23825E-9	2.51919E-3	2.51919E-3	6.3445E-3	2.41269E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80044E1	-8.82149E-4	-8.80016E1	6.67572E-4	4.64916E-3	9.65595E-2	1.58522E1	-1.9835E1	-1.99252E1	1.50653E1	2.23235E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.41966E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80043E1	-8.34465E-4	-8.80018E1	6.19888E-4	4.33922E-3	9.62496E-2	1.58125E1	-1.98879E1	-1.99366E1	1.5037E1	2.2372E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.39873E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80043E1	-7.62939E-4	-8.80015E1	7.15256E-4	4.29153E-3	9.63688E-2	1.57831E1	-1.98287E1	-1.99478E1	1.50491E1	2.2372E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.40291E-2
1.2E1	1.09E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80042E1	-1.0252E-3	-8.80013E1	3.57628E-4	4.36306E-3	9.61781E-2	1.58425E1	-1.98212E1	-1.99456E1	1.50473E1	2.23678E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.39764E-2
1.3E1	2.9E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80045E1	-9.77516E-4	-8.80014E1	8.34465E-4	4.74453E-3	9.59873E-2	1.57957E1	-1.9835E1	-1.99894E1	1.50461E1	2.23623E-9	2.52647E-3	2.52647E-3	6.34037E-3	2.41756E-2
1.4E1	1.57E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80044E1	-9.77516E-4	-8.80013E1	8.58307E-4	4.45843E-3	9.63688E-2	1.5762E1	-1.98026E1	-1.99432E1	1.50671E1	2.23138E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41337E-2
1.5E1	1.21E2	1.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80048E1	-9.53674E-4	-8.80012E1	8.58307E-4	4.62532E-3	9.65357E-2	1.57914E1	-1.98281E1	-1.99673E1	1.50155E1	2.2372E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.41337E-2
1.6E1	4.83E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80044E1	-1.09673E-3	-8.80012E1	9.53674E-4	4.95911E-3	9.63926E-2	1.58642E1	-1.98531E1	-1.99852E1	1.50473E1	2.23964E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.39968E-2
1.7E1	1.275E3	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80044E1	-7.39098E-4	-8.80014E1	6.4373E-4	4.24385E-3	9.62019E-2	1.5862E1	-1.98416E1	-1.99824E1	1.4993E1	2.23429E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.41127E-2
1.8E1	5.383E3	2.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80043E1	-7.86781E-4	-8.80017E1	7.62939E-4	4.07696E-3	9.61065E-2	1.58287E1	-1.98621E1	-1.99456E1	1.50222E1	2.23791E-9	2.52285E-3	2.52285E-3	6.3074E-3	2.40984E-2
1.9E1	2.544E3	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80043E1	-9.53674E-4	-8.80017E1	5.96046E-4	4.41074E-3	9.62973E-2	1.58144E1	-1.98546E1	-1.99579E1	1.50382E1					
2.0E1	4.1E1	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80044E1	-1.09673E-3	-8.80011E1	8.34465E-4	4.36306E-3	9.61304E-2	1.58648E1	-1.98398E1	-1.99288E1	1.50545E1	2.23678E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.40173E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80041E1	-7.15256E-4	-8.80013E1	8.34465E-4	4.60148E-3	9.62973E-2	1.58298E1	-1.98579E1	-1.99178E1	1.50034E1	2.23526E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.41337E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80044E1	-5.72205E-4	-8.80017E1	8.10623E-4	4.3869E-3	9.61304E-2	1.58191E1	-1.98621E1	-1.9924E1	1.50041E1	2.24012E-9	2.51662E-3	2.51662E-3	6.31974E-3	2.41651E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80044E1	-7.62939E-4	-8.80016E1	6.91414E-4	4.55379E-3	9.62257E-2	1.58906E1	-1.98416E1	-1.99492E1	1.50431E1	2.23963E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.41479E-2