[Scan]
initial_time=2016-01-15T20:20:59
final_time=2016-01-15T20:21:19
ip_count=19
run=1023
dataset=1
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.85127E-6
ql1_vset=
ql1_vmon=-8.80047E1
ql1_imon=-7.55763E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.18849E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.81723E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.36321E-8
mult1=-1.02581E-8
mult2=-2.85035E-9
rf_tmon=-4.91498E-3
rf_agc=3.21079E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=6.58047E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69605E0
bslens_imon=2.61284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1918E1
lens5a_imon=1.98574E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12612E2
lens4a_imon=2.04858E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.86629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04388E1
cs_ea1_imon=2.57856E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05247E0
lens1_imon=1.72031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.96072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03715E1
cs_ea2_imon=1.51781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.95459E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=1.06791E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11868E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14828E1
os_ea1_imon=2.36039E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63173E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24781E0
cs_ionrep_imon=1.19275E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91973E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=2.99027E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99975E1
olens4_imon=4.23622E-9
tplens_vset=0.0E0
tplens_vmon=-1.7051E0
tplens_imon=-6.34062E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9978E1
iondef3_imon=9.00014E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98248E1
iondef2_imon=9.30867E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03138E2
lens6_imon=2.97997E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=9.88448E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23802E0
ionrepsh_imon=1.78079E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33627E1
lens5b_imon=2.16866E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28577E0
os_ea2_imon=-8.61787E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00803E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02392E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.24454E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11478E1
os_restr2_imon=3.40076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.28128E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.23199E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58347E1
iondef1_imon=5.44471E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50262E1
iondef4_imon=5.15425E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.5482E-8
olens1_vset=0.0E0
olens1_vmon=2.07424E-3
olens1_imon=1.23981E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.21784E0
cs_ionaccel_imon=-1.65004E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56928E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.75006E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82785E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-8.57164E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.38036E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.40702E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.09754E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46484E0
defgridb_imon=5.81935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33442E1
os_fil1_imon=9.39879E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06765E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65165E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.95278E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62786E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66968E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73485E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56269E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22861E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.42024E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47589E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.766E3	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80044E1	-9.53674E-4	-8.80014E1	7.86781E-4	4.26769E-3	9.61542E-2	1.58728E1	-1.98287E1	-1.99602E1	1.50418E1	2.23566E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.39988E-2
2.0E0	3.719E3	1.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80046E1	-9.77516E-4	-8.80014E1	3.8147E-4	4.8399E-3	9.61065E-2	1.57951E1	-1.98579E1	-1.99065E1	1.5016E1	2.23202E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.40583E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80047E1	-1.28746E-3	-8.80016E1	5.72205E-4	4.673E-3	9.60827E-2	1.58522E1	-1.98894E1	-1.99272E1	1.50201E1	2.24207E-9	2.52977E-3	2.52977E-3	6.31837E-3	2.41966E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80051E1	-1.07288E-3	-8.80016E1	5.72205E-4	4.88758E-3	9.60588E-2	1.58371E1	-1.98476E1	-2.00159E1	1.50515E1	2.24155E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.41405E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80047E1	-1.09673E-3	-8.80016E1	1.04904E-3	4.8399E-3	9.61781E-2	1.58545E1	-1.98272E1	-1.9946E1	1.50497E1	2.23818E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.40291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80044E1	-1.16825E-3	-8.80013E1	1.00136E-3	4.8399E-3	9.58681E-2	1.58209E1	-1.9849E1	-1.9939E1	1.50446E1	2.23731E-9	2.51814E-3	2.51814E-3	6.2863E-3	2.41067E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80048E1	-1.26362E-3	-8.80012E1	7.62939E-4	4.86374E-3	9.59396E-2	1.58071E1	-1.98711E1	-1.9927E1	1.50468E1	2.23863E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.41265E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80047E1	-1.09673E-3	-8.80013E1	5.96046E-4	4.673E-3	9.59873E-2	1.58392E1	-1.98322E1	-1.99685E1	1.50184E1	2.23964E-9	2.50989E-3	2.50989E-3	6.30202E-3	2.40583E-2
1.2E1	1.24E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80047E1	-9.05991E-4	-8.80013E1	4.52995E-4	4.57764E-3	9.61065E-2	1.57951E1	-1.98356E1	-1.99678E1	1.50509E1	2.24499E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.40082E-2
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80044E1	-1.12057E-3	-8.80013E1	5.00679E-4	4.69685E-3	9.62257E-2	1.57993E1	-1.9841E1	-1.9927E1	1.50581E1	2.23818E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.40708E-2
1.4E1	1.46E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80045E1	-1.35899E-3	-8.8001E1	8.10623E-4	4.52995E-3	9.59873E-2	1.58269E1	-1.98855E1	-1.996E1	1.49974E1	2.23869E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.40583E-2
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80042E1	-1.3113E-3	-8.80013E1	8.82149E-4	4.69685E-3	9.61304E-2	1.58569E1	-1.98493E1	-1.99213E1	1.50244E1	2.23526E-9	2.52099E-3	2.52099E-3	6.35692E-3	2.40291E-2
1.6E1	4.44E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80042E1	-1.19209E-3	-8.80014E1	8.82149E-4	4.69685E-3	9.60588E-2	1.58246E1	-1.98471E1	-1.99334E1	1.50479E1	2.23915E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.39249E-2
1.7E1	1.3E3	2.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80041E1	-1.3113E-3	-8.80012E1	1.00136E-3	4.64916E-3	9.62257E-2	1.58026E1	-1.98894E1	-1.99313E1	1.50467E1	2.23369E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.40626E-2
1.8E1	5.231E3	3.0E0	7.27E2	5.0E2	-7.286E-2	-8.8004E1	-1.0252E-3	-8.80013E1	6.91414E-4	4.52995E-3	9.61781E-2	1.58504E1	-1.98145E1	-2.00251E1	1.50445E1	2.23678E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.41611E-2
1.9E1	2.648E3	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80042E1	-1.00136E-3	-8.80014E1	6.4373E-4	4.55379E-3	9.61065E-2	1.57554E1	-1.98817E1	-1.99419E1	1.49854E1	2.22916E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.39968E-2
2.0E1	4.4E1	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80043E1	-1.0252E-3	-8.80014E1	9.53674E-4	4.55379E-3	9.63211E-2	1.5813E1	-1.983E1	-1.99292E1	1.50534E1	2.23731E-9	2.52553E-3	2.52553E-3	6.33919E-3	2.40462E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80045E1	-1.19209E-3	-8.80014E1	7.86781E-4	4.60148E-3	9.62734E-2	1.57772E1	-1.98405E1	-1.99573E1	1.50097E1	2.24359E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.41265E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80048E1	-1.23978E-3	-8.80015E1	6.91414E-4	4.60148E-3	9.60112E-2	1.5866E1	-1.98603E1	-1.99606E1	1.50334E1	2.24109E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.41337E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80047E1	-1.0252E-3	-8.80015E1	7.15256E-4	4.55379E-3	9.62019E-2	1.58347E1	-1.98248E1	-1.9978E1	1.50262E1	2.23773E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.42024E-2