[Scan]
initial_time=2016-01-15T20:21:26
final_time=2016-01-15T20:21:45
ip_count=19
run=1023
dataset=1
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79566E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.71868E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.20571E-9
ql3_vset=
ql3_vmon=-8.80016E1
ql3_imon=-2.8704E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.3601E-8
mult1=-1.0222E-8
mult2=-2.74656E-9
rf_tmon=-5.33556E-3
rf_agc=3.30392E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=6.00433E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.413E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19822E1
lens5a_imon=1.98253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.0477E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54072E1
cs_ef1b_imon=2.86436E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02131E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.60373E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96703E0
lens1_imon=1.43271E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.99086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.49412E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84771E1
cs_ef1a_imon=2.93421E-5
olens2_vset=0.0E0
olens2_vmon=1.54972E-3
olens2_imon=1.06625E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=4.27114E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15097E1
os_ea1_imon=2.359E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64058E1
os_ef1bup_imon=3.10589E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23414E0
cs_ionrep_imon=1.17084E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91971E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.97626E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99973E1
olens4_imon=4.09923E-9
tplens_vset=0.0E0
tplens_vmon=-1.693E0
tplens_imon=-4.16636E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99816E1
iondef3_imon=8.93088E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98645E1
iondef2_imon=9.11859E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03137E2
lens6_imon=2.98363E-4
ql6_vset=1.0E-1
ql6_vmon=9.64403E-2
ql6_imon=9.68707E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25442E0
ionrepsh_imon=1.7969E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3375E1
lens5b_imon=2.17268E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7504E1
cs_ef2b_imon=3.10832E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21618E0
os_ea2_imon=-8.19876E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06174E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.14655E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04066E0
os_ef2alow_imon=-2.32784E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78117E-1
os_ef2bup_imon=-5.27485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11349E1
os_restr2_imon=3.41971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.28086E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.25654E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58401E1
iondef1_imon=5.23915E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50431E1
iondef4_imon=5.67567E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27955E1
olens3_imon=2.53131E-8
olens1_vset=0.0E0
olens1_vmon=1.95503E-3
olens1_imon=1.24012E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16837E0
cs_ionaccel_imon=-1.61889E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56637E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=2.48384E-1
window_imon=-5.86738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.39296E-4
mask2_vset=0.0E0
mask2_vmon=-1.87022E1
mask2_imon=-6.45817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=6.97725E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93664E3
defgrida_imon=6.36196E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.1893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.334E0
defgridb_imon=6.05606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33427E1
os_fil1_imon=9.411E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0737E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65002E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.95099E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63026E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66527E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19531E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94487E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.31587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15359E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22929E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=2.40499E-2
chamber_ion_pmon=2.22945E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50518E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.787E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80044E1	-9.77516E-4	-8.80014E1	8.58307E-4	4.72069E-3	9.62496E-2	1.58093E1	-1.98266E1	-1.99355E1	1.50213E1	2.23544E-9	2.51287E-3	2.51287E-3	6.3074E-3	2.40865E-2
2.0E0	3.909E3	6.0E0	3.16E2	1.6E2	-7.12368E-2	-8.80042E1	-1.28746E-3	-8.80017E1	1.09673E-3	4.79221E-3	9.64642E-2	1.58565E1	-1.9894E1	-1.99052E1	1.50203E1	2.2345E-9	2.50867E-3	2.50867E-3	6.3074E-3	2.42282E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.8004E1	-9.53674E-4	-8.80017E1	1.21593E-3	4.60148E-3	9.63688E-2	1.57737E1	-1.988E1	-1.9985E1	1.50161E1	2.24214E-9	2.51271E-3	2.51271E-3	6.34737E-3	2.40974E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.8004E1	-1.07288E-3	-8.80015E1	5.96046E-4	4.3869E-3	9.62734E-2	1.58353E1	-1.98489E1	-1.99516E1	1.50533E1	2.22916E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80042E1	-1.3113E-3	-8.80013E1	6.19888E-4	4.45843E-3	9.61781E-2	1.58344E1	-1.9882E1	-1.99481E1	1.50621E1	2.23429E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41756E-2
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.05415E-2	-8.80043E1	-1.28746E-3	-8.80015E1	4.76837E-4	4.43459E-3	9.65834E-2	1.58023E1	-1.99167E1	-1.99949E1	1.50806E1	2.24304E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80042E1	-9.77516E-4	-8.80016E1	4.76837E-4	4.41074E-3	9.63449E-2	1.58463E1	-1.98369E1	-1.99248E1	1.50258E1	2.24109E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80043E1	-1.21593E-3	-8.80017E1	6.4373E-4	4.43459E-3	9.64165E-2	1.57702E1	-1.98623E1	-1.99791E1	1.50304E1	2.23429E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.41756E-2
1.2E1	1.29E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80044E1	-1.26362E-3	-8.80019E1	6.19888E-4	4.45843E-3	9.66311E-2	1.58124E1	-1.98459E1	-1.99426E1	1.50028E1	2.23964E-9	2.53031E-3	2.53031E-3	6.30202E-3	2.41817E-2
1.3E1	2.1E1	1.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80045E1	-1.19209E-3	-8.80018E1	7.86781E-4	4.64916E-3	9.62973E-2	1.58522E1	-1.98074E1	-1.99968E1	1.50641E1	2.23818E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41337E-2
1.4E1	1.28E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80044E1	-8.82149E-4	-8.80017E1	4.52995E-4	4.55379E-3	9.64165E-2	1.57813E1	-1.98248E1	-1.99648E1	1.50479E1	2.24109E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41651E-2
1.5E1	1.25E2	1.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80043E1	-1.0252E-3	-8.80018E1	8.10623E-4	4.57764E-3	9.66311E-2	1.58653E1	-1.98827E1	-1.9955E1	1.5057E1					
1.6E1	4.33E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80043E1	-7.39098E-4	-8.80015E1	1.00136E-3	4.55379E-3	9.62734E-2	1.58273E1	-1.98517E1	-1.99395E1	1.50554E1	2.23966E-9	2.51886E-3	2.51886E-3	6.323E-3	2.4094E-2
1.7E1	1.268E3	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80043E1	-7.86781E-4	-8.80016E1	1.0252E-3	4.45843E-3	9.60112E-2	1.58456E1	-1.98218E1	-1.99282E1	1.50232E1	2.24579E-9	2.51758E-3	2.51758E-3	6.32483E-3	2.40893E-2
1.8E1	5.387E3	9.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80045E1	-5.48363E-4	-8.80014E1	6.91414E-4	4.64916E-3	9.62496E-2	1.58572E1	-1.98999E1	-1.99514E1	1.50402E1	2.23429E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.39873E-2
1.9E1	2.511E3	4.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80043E1	-7.39098E-4	-8.80018E1	8.82149E-4	4.60148E-3	9.62257E-2	1.57873E1	-1.98218E1	-2.00076E1	1.50315E1	2.23469E-9	2.51447E-3	2.51447E-3	6.29211E-3	2.41793E-2
2.0E1	4.8E1	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80043E1	-6.91414E-4	-8.80017E1	8.10623E-4	4.64916E-3	9.63449E-2	1.56581E1	-1.97822E1	-2.01769E1	1.5037E1	2.24113E-9	2.52179E-3	2.52179E-3	6.3074E-3	2.41409E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80045E1	-1.00136E-3	-8.80019E1	8.10623E-4	4.74453E-3	9.61781E-2	1.58333E1	-1.98476E1	-1.99555E1	1.50238E1	2.23818E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.41756E-2
2.2E1	2.3E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80044E1	-8.58307E-4	-8.80018E1	6.91414E-4	4.31538E-3	9.62257E-2	1.57741E1	-1.98747E1	-1.9975E1	1.50298E1	2.2372E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.41337E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80044E1	-7.86781E-4	-8.80016E1	7.62939E-4	4.50611E-3	9.64403E-2	1.58401E1	-1.98645E1	-1.99816E1	1.50431E1	2.22945E-9	2.5188E-3	2.5188E-3	6.3514E-3	2.40499E-2