[Scan]
initial_time=2016-01-15T20:21:52
final_time=2016-01-15T20:22:12
ip_count=19
run=1023
dataset=1
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.83364E-6
ql1_vset=
ql1_vmon=-8.80045E1
ql1_imon=-7.44748E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.2437E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.7441E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=1.36481E-8
mult1=-9.5959E-9
mult2=-2.73658E-9
rf_tmon=-5.28749E-3
rf_agc=3.27628E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=6.48987E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66116E0
bslens_imon=2.37777E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.9964E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12566E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.85368E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02007E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=2.58297E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02125E0
lens1_imon=1.70929E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65029E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.50605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=2.95567E-5
olens2_vset=0.0E0
olens2_vmon=1.19209E-3
olens2_imon=1.06788E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.33945E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.10307E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=1.21001E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91985E2
cs_nozzle_imon=1.93681E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.9809E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.20483E-9
tplens_vset=0.0E0
tplens_vmon=-1.69224E0
tplens_imon=-3.32879E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99714E1
iondef3_imon=8.8973E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9805E1
iondef2_imon=9.22787E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03148E2
lens6_imon=2.98379E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=9.79686E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27903E0
ionrepsh_imon=1.77528E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.19327E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.25149E0
os_ea2_imon=-5.60603E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06188E2
lens4b_imon=2.00597E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.15389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02753E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11478E1
os_restr2_imon=3.41878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.28459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.25001E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58401E1
iondef1_imon=5.25004E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50388E1
iondef4_imon=5.42094E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.53798E-8
olens1_vset=0.0E0
olens1_vmon=1.97887E-3
olens1_imon=1.23917E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.99602E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02146E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56814E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.53983E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82723E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=6.79269E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.61271E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=6.71555E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29324E0
defgridb_imon=6.19032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33444E1
os_fil1_imon=9.4045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64983E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3087E1
cs_fil1_imon=9.95296E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37084E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90164E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22873E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.41052E-2
chamber_ion_pmon=2.24359E-9
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81516E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.771E3	3.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80043E1	-1.00136E-3	-8.8002E1	8.82149E-4	4.50611E-3	9.61542E-2	1.58669E1	-1.98552E1	-1.99467E1	1.50143E1	2.23665E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.41693E-2
2.0E0	3.932E3	5.0E0	3.16E2	1.6E2	-7.17007E-2	-8.80042E1	-5.96046E-4	-8.8002E1	1.00136E-3	4.88758E-3	9.61781E-2	1.58161E1	-1.98452E1	-1.99438E1	1.50552E1	2.23263E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.41067E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80041E1	-8.82149E-4	-8.80016E1	7.62939E-4	4.81606E-3	9.63211E-2	1.57826E1	-1.98835E1	-1.99301E1	1.5041E1	2.23863E-9	2.52027E-3	2.52027E-3	6.28511E-3	2.40413E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80043E1	-6.91414E-4	-8.80015E1	5.72205E-4	4.76837E-3	9.62496E-2	1.58056E1	-1.98287E1	-1.99697E1	1.50214E1	2.23773E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.40994E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80041E1	-8.34465E-4	-8.80017E1	6.67572E-4	4.57764E-3	9.61542E-2	1.58375E1	-1.98428E1	-1.99585E1	1.50274E1	2.23487E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.41817E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80043E1	-7.62939E-4	-8.80015E1	6.67572E-4	4.62532E-3	9.63211E-2	1.58209E1	-1.98681E1	-1.99588E1	1.5013E1	2.23623E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41546E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80043E1	-7.39098E-4	-8.80014E1	6.4373E-4	4.673E-3	9.65595E-2	1.5802E1	-1.98452E1	-1.99573E1	1.50461E1	2.23468E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.41907E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80043E1	-7.39098E-4	-8.80016E1	7.86781E-4	4.88758E-3	9.61781E-2	1.58014E1	-1.98257E1	-1.99322E1	1.50443E1	2.23964E-9	2.52169E-3	2.52169E-3	6.28056E-3	2.42024E-2
1.2E1	1.17E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80044E1	-4.52995E-4	-8.80016E1	7.86781E-4	4.55379E-3	9.63449E-2	1.5822E1	-1.9852E1	-1.99282E1	1.50469E1	2.23963E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.41052E-2
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.8005E1	-4.29153E-4	-8.80016E1	8.10623E-4	4.31538E-3	9.62257E-2	1.57991E1	-1.98366E1	-1.9982E1	1.50289E1	2.24012E-9	2.51854E-3	2.51854E-3	6.3023E-3	2.41793E-2
1.4E1	1.3E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.8005E1	-6.19888E-4	-8.80014E1	5.72205E-4	4.36306E-3	9.60588E-2	1.58888E1	-1.98909E1	-1.9966E1	1.49596E1	2.24167E-9	2.5257E-3	2.5257E-3	6.31902E-3	2.41559E-2
1.5E1	1.35E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80043E1	-8.82149E-4	-8.80017E1	6.91414E-4	4.41074E-3	9.64642E-2	1.57914E1	-1.98841E1	-1.99768E1	1.50306E1	2.23623E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.40918E-2
1.6E1	4.57E2	1.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80043E1	-5.24521E-4	-8.80016E1	6.4373E-4	4.74453E-3	9.62019E-2	1.58313E1	-1.98667E1	-1.9939E1	1.50378E1	2.23773E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.40788E-2
1.7E1	1.339E3	1.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80044E1	-6.19888E-4	-8.80014E1	6.67572E-4	5.24521E-3	9.64165E-2	1.58383E1	-1.98849E1	-1.99306E1	1.50545E1	2.23963E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.41479E-2
1.8E1	5.295E3	2.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80045E1	-7.15256E-4	-8.80014E1	7.62939E-4	5.126E-3	9.62734E-2	1.58283E1	-1.98214E1	-1.99812E1	1.50394E1	2.23818E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.41966E-2
1.9E1	2.602E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80045E1	-9.29832E-4	-8.80013E1	9.29832E-4	4.91142E-3	9.62496E-2	1.5825E1	-1.98169E1	-1.99461E1	1.50184E1	2.23138E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.40918E-2
2.0E1	4.7E1	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80049E1	-7.15256E-4	-8.80013E1	9.53674E-4	5.00679E-3	9.63211E-2	1.58516E1	-1.97972E1	-1.99456E1	1.50172E1	2.23583E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.4223E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80044E1	-8.82149E-4	-8.80014E1	7.39098E-4	4.64916E-3	9.63211E-2	1.58157E1	-1.9855E1	-1.99216E1	1.50431E1	2.23818E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.41966E-2
2.2E1	9.0E0	1.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80044E1	-1.14441E-3	-8.80014E1	9.77516E-4	4.8399E-3	9.62257E-2	1.58684E1	-1.98495E1	-1.9969E1	1.51026E1	2.23169E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.41269E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80045E1	-9.29832E-4	-8.80014E1	7.62939E-4	4.57764E-3	9.63449E-2	1.58401E1	-1.9805E1	-1.99714E1	1.50388E1	2.24359E-9	2.52139E-3	2.52139E-3	6.30182E-3	2.41052E-2