[Scan]
initial_time=2016-01-15T20:22:19
final_time=2016-01-15T20:22:38
ip_count=19
run=1023
dataset=1
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.773E-6
ql1_vset=
ql1_vmon=-8.80043E1
ql1_imon=-7.83193E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.17404E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.8211E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.36276E-8
mult1=-1.02678E-8
mult2=-2.6919E-9
rf_tmon=-4.23812E-3
rf_agc=3.39167E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=5.97537E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54289E1
cs_ef1b_imon=2.85404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=2.58005E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00591E0
lens1_imon=1.79874E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84658E1
cs_ef1a_imon=2.96036E-5
olens2_vset=0.0E0
olens2_vmon=7.62939E-4
olens2_imon=1.07255E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15029E1
os_ea1_imon=2.36844E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.19863E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91987E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=2.9791E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.18169E-9
tplens_vset=0.0E0
tplens_vmon=-1.67208E0
tplens_imon=-3.6063E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99231E1
iondef3_imon=8.73827E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98464E1
iondef2_imon=9.30064E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03131E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=9.66644E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=1.76425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34247E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.2509E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.4342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.28847E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.24209E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57914E1
iondef1_imon=5.49381E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49628E1
iondef4_imon=5.56871E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.54504E-8
olens1_vset=0.0E0
olens1_vmon=1.74046E-3
olens1_imon=1.24116E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47601E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82745E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86777E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.44192E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=6.75915E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33413E1
os_fil1_imon=9.4021E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65237E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.95104E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63873E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66823E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34661E-3
inlet_lpb_pmon=2.41479E-2
chamber_ion_pmon=2.23963E-9
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.08836E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.79E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80041E1	-8.82149E-4	-8.80015E1	8.10623E-4	4.64916E-3	9.60112E-2	1.57973E1	-1.98723E1	-1.99655E1	1.50382E1	2.24207E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.41756E-2
2.0E0	3.97E3	3.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80042E1	-9.05991E-4	-8.80011E1	8.10623E-4	4.62532E-3	9.61304E-2	1.58185E1	-1.98349E1	-1.99543E1	1.50096E1	2.24764E-9	2.52025E-3	2.52025E-3	6.33919E-3	2.42282E-2
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80043E1	-7.86781E-4	-8.80016E1	8.58307E-4	4.50611E-3	9.62257E-2	1.58115E1	-1.98664E1	-1.9952E1	1.50437E1	2.24113E-9	2.51838E-3	2.51838E-3	6.3245E-3	2.42282E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80041E1	-7.86781E-4	-8.80015E1	7.62939E-4	4.8399E-3	9.59873E-2	1.58329E1	-1.98368E1	-1.99714E1	1.50433E1	2.24155E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.41199E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80041E1	-9.77516E-4	-8.80013E1	8.82149E-4	4.81606E-3	9.61781E-2	1.58233E1	-1.98664E1	-1.99714E1	1.50497E1	2.24538E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.41405E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80037E1	-7.62939E-4	-8.80017E1	6.4373E-4	4.41074E-3	9.62257E-2	1.58649E1	-1.98208E1	-1.99651E1	1.50207E1	2.24499E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.41756E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80039E1	-8.34465E-4	-8.80015E1	5.48363E-4	4.43459E-3	9.61304E-2	1.58362E1	-1.98398E1	-1.99781E1	1.5011E1	2.23263E-9	2.52236E-3	2.52236E-3	6.3074E-3	2.41269E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80042E1	-8.10623E-4	-8.80016E1	7.62939E-4	4.64916E-3	9.62257E-2	1.58239E1	-1.9844E1	-1.99282E1	1.50425E1	2.23566E-9	2.51915E-3	2.51915E-3	6.34099E-3	2.41479E-2
1.2E1	1.16E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80038E1	-5.72205E-4	-8.80017E1	6.4373E-4	4.3869E-3	9.61304E-2	1.58287E1	-1.98386E1	-1.99456E1	1.5023E1	2.24402E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.41756E-2
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80042E1	-8.34465E-4	-8.80018E1	8.10623E-4	4.673E-3	9.60827E-2	1.5814E1	-1.98417E1	-1.99726E1	1.50068E1	2.24347E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.40583E-2
1.4E1	1.38E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80043E1	-8.10623E-4	-8.80018E1	9.53674E-4	4.48227E-3	9.62257E-2	1.57995E1	-1.98184E1	-1.99481E1	1.50403E1	2.2369E-9	2.51679E-3	2.51679E-3	6.2815E-3	2.4094E-2
1.5E1	1.37E2	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.8004E1	-5.96046E-4	-8.80017E1	9.29832E-4	4.64916E-3	9.63449E-2	1.58155E1	-1.98801E1	-2.00075E1	1.50335E1	2.2426E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.40839E-2
1.6E1	4.85E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80041E1	-4.29153E-4	-8.80014E1	6.67572E-4	4.62532E-3	9.63688E-2	1.58351E1	-1.98334E1	-2.00127E1	1.50244E1	2.24012E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.42598E-2
1.7E1	1.239E3	2.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80041E1	-5.24521E-4	-8.80017E1	6.19888E-4	4.50611E-3	9.63449E-2	1.58449E1	-1.98615E1	-1.9942E1	1.50358E1	2.2372E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.41756E-2
1.8E1	5.367E3	2.0E0	7.27E2	5.0E2	-7.286E-2	-8.80043E1	-7.15256E-4	-8.80014E1	5.24521E-4	4.57764E-3	9.64642E-2	1.58203E1	-1.98248E1	-1.99234E1	1.50184E1	2.2372E-9	2.52209E-3	2.52209E-3	6.34588E-3	2.41127E-2
1.9E1	2.7E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80044E1	-5.48363E-4	-8.80017E1	6.67572E-4	4.88758E-3	9.66311E-2	1.58167E1	-1.98597E1	-1.99492E1	1.50094E1	2.23332E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.40708E-2
2.0E1	3.7E1	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80042E1	-7.39098E-4	-8.80016E1	7.15256E-4	4.76837E-3	9.68695E-2	1.58425E1	-1.98457E1	-1.99356E1	1.50259E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80043E1	-7.62939E-4	-8.80017E1	5.48363E-4	4.45843E-3	9.65357E-2	1.57904E1	-1.98366E1	-1.99739E1	1.50422E1	2.23726E-9	2.51847E-3	2.51847E-3	6.32626E-3	2.41611E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80044E1	-6.67572E-4	-8.80015E1	3.09944E-4	4.43459E-3	9.65834E-2	1.58468E1	-1.98627E1	-1.99576E1	1.50232E1					
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80043E1	-9.53674E-4	-8.80018E1	6.4373E-4	4.07696E-3	9.6035E-2	1.57914E1	-1.98464E1	-1.99231E1	1.49628E1	2.23963E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.41479E-2