[Scan]
initial_time=2016-01-15T20:22:46
final_time=2016-01-15T20:23:05
ip_count=19
run=1023
dataset=1
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.82796E-6
ql1_vset=
ql1_vmon=-8.80044E1
ql1_imon=-7.83777E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.26656E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.87535E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.35947E-8
mult1=-9.12761E-9
mult2=-2.73736E-9
rf_tmon=-5.451E-3
rf_agc=3.2457E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=6.21545E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=1.94294E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.85505E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.01901E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04585E1
cs_ea1_imon=2.54797E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97827E0
lens1_imon=1.59686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65006E1
os_ef1alow_imon=2.98562E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.51407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84533E1
cs_ef1a_imon=2.96049E-5
olens2_vset=0.0E0
olens2_vmon=8.82149E-4
olens2_imon=1.06829E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11353E1
os_restr1_imon=4.26865E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.35835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63721E1
os_ef1bup_imon=3.07125E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.183E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.98526E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99968E1
olens4_imon=4.15711E-9
tplens_vset=0.0E0
tplens_vmon=-1.71353E0
tplens_imon=-3.64235E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99749E1
iondef3_imon=8.57605E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98614E1
iondef2_imon=9.01585E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03112E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=9.84776E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34174E1
lens5b_imon=2.16116E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7466E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23527E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71193E1
cs_ef2a_imon=3.17952E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06429E0
os_ef2alow_imon=-2.40733E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.369E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11176E1
os_restr2_imon=3.42049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01562E1
cs_anode2_imon=2.23936E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5811E1
iondef1_imon=5.25589E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50202E1
iondef4_imon=5.34893E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.53315E-8
olens1_vset=0.0E0
olens1_vmon=1.90735E-3
olens1_imon=1.24482E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15491E0
cs_ionaccel_imon=-1.8801E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.47318E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.64538E-6
window_vset=0.0E0
window_vmon=2.57325E-1
window_imon=-7.97338E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.39141E-4
mask2_vset=0.0E0
mask2_vmon=-1.86639E1
mask2_imon=-7.65492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=7.34315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.16073E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50081E3
multb_neg_imon=6.93579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.27248E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33419E1
os_fil1_imon=9.41889E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0727E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65256E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.9621E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62183E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66618E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.62043E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05031E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8255E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36707E-1
cs_fil2_imon=-2.62043E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08314E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22887E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.41817E-2
chamber_ion_pmon=2.23869E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94928E-1
res40_imon=-2.5524E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.892E3	4.0E0	1.47E2	4.1E1	-7.31692E-2	-8.8004E1	-6.67572E-4	-8.80014E1	7.15256E-4	4.91142E-3	9.62734E-2	1.57938E1	-1.98959E1	-1.99579E1	1.50136E1	2.23915E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.40291E-2
2.0E0	3.897E3	2.0E0	3.16E2	1.6E2	-7.34782E-2	-8.8004E1	-7.86781E-4	-8.80014E1	9.29832E-4	4.95911E-3	9.63688E-2	1.58626E1	-1.98324E1	-1.99261E1	1.50415E1	2.23818E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.41756E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.8004E1	-1.00136E-3	-8.80015E1	8.34465E-4	4.76837E-3	9.66311E-2	1.5805E1	-1.98771E1	-1.99343E1	1.50004E1	2.24161E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80041E1	-8.82149E-4	-8.80018E1	9.77516E-4	4.36306E-3	9.61065E-2	1.57879E1	-1.98324E1	-1.99139E1	1.50304E1	2.23583E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.42024E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80044E1	-7.15256E-4	-8.80015E1	5.00679E-4	4.50611E-3	9.63449E-2	1.58186E1	-1.9799E1	-1.99561E1	1.50491E1	2.24207E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41127E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80046E1	-1.14441E-3	-8.80014E1	6.67572E-4	4.673E-3	9.63688E-2	1.58341E1	-1.98591E1	-1.9936E1	1.50208E1	2.23263E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.41067E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80048E1	-1.19209E-3	-8.80016E1	7.86781E-4	4.52995E-3	9.6488E-2	1.57799E1	-1.98986E1	-1.99334E1	1.5049E1	2.24442E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.41611E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80047E1	-6.91414E-4	-8.80015E1	4.76837E-4	4.86374E-3	9.6488E-2	1.58143E1	-1.98326E1	-1.99504E1	1.49896E1	2.24417E-9	2.51611E-3	2.51611E-3	6.3245E-3	2.41192E-2
1.2E1	9.8E1	1.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80045E1	-1.09673E-3	-8.80018E1	6.4373E-4	4.43459E-3	9.62257E-2	1.58156E1	-1.98523E1	-1.9929E1	1.50456E1	2.22916E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.4223E-2
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80047E1	-1.0252E-3	-8.8002E1	5.24521E-4	4.55379E-3	9.63211E-2	1.58462E1	-1.98284E1	-1.99366E1	1.50298E1	2.23915E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.41966E-2
1.4E1	1.25E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80049E1	-1.26362E-3	-8.8002E1	3.33786E-4	4.3869E-3	9.62496E-2	1.58071E1	-1.9808E1	-1.99684E1	1.49806E1	2.24109E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.40082E-2
1.5E1	1.38E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80047E1	-1.14441E-3	-8.80022E1	8.10623E-4	4.60148E-3	9.63688E-2	1.58654E1	-1.98885E1	-1.99222E1	1.50425E1	2.23915E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.42177E-2
1.6E1	4.29E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80045E1	-1.0252E-3	-8.80017E1	9.05991E-4	4.24385E-3	9.62496E-2	1.58101E1	-1.98513E1	-1.99852E1	1.50587E1	2.2406E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.41199E-2
1.7E1	1.266E3	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80045E1	-9.05991E-4	-8.80015E1	8.58307E-4	4.12464E-3	9.62496E-2	1.57897E1	-1.9823E1	-1.99618E1	1.50412E1	2.23072E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.39988E-2
1.8E1	5.347E3	2.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80046E1	-1.00136E-3	-8.80019E1	8.82149E-4	4.3869E-3	9.67026E-2	1.58263E1	-1.98464E1	-1.9957E1	1.50154E1	2.23487E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.41611E-2
1.9E1	2.631E3	2.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80047E1	-1.00136E-3	-8.80018E1	7.86781E-4	4.69685E-3	9.67503E-2	1.58317E1	-1.98531E1	-1.99762E1	1.50515E1	2.24012E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.40918E-2
2.0E1	4.6E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80046E1	-1.19209E-3	-8.80015E1	4.76837E-4	4.60148E-3	9.64165E-2	1.58079E1	-1.99048E1	-1.99313E1	1.50202E1	2.24499E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.41546E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80047E1	-1.19209E-3	-8.80019E1	7.62939E-4	4.29153E-3	9.63926E-2	1.58012E1	-1.98452E1	-1.99552E1	1.50109E1	2.23818E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.41546E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80048E1	-6.67572E-4	-8.80016E1	4.76837E-4	4.57764E-3	9.6488E-2	1.58227E1	-1.98362E1	-1.99894E1	1.50839E1	2.242E-9	2.51182E-3	2.51182E-3	6.33388E-3	2.41674E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80044E1	-7.15256E-4	-8.80015E1	7.39098E-4	4.74453E-3	9.63688E-2	1.5811E1	-1.98614E1	-1.99749E1	1.50202E1	2.23869E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.41817E-2