[Scan]
initial_time=2016-01-15T20:23:12
final_time=2016-01-15T20:23:32
ip_count=19
run=1023
dataset=1
scan=19
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.84404E-6
ql1_vset=
ql1_vmon=-8.80041E1
ql1_imon=-8.3158E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.19383E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.8948E-9
ql4_vset=
ql4_vmon=9.53674E-4
ql4_imon=1.35599E-8
mult1=-1.01618E-8
mult2=-2.7246E-9
rf_tmon=-4.62658E-3
rf_agc=3.3622E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=6.32787E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67783E0
bslens_imon=2.27528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19482E1
lens5a_imon=1.98328E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.05055E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.8549E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02039E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04308E1
cs_ea1_imon=2.57964E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95606E0
lens1_imon=1.55651E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6507E1
os_ef1alow_imon=2.98776E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03996E1
cs_ea2_imon=1.51196E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.94959E-5
olens2_vset=0.0E0
olens2_vmon=7.86781E-4
olens2_imon=1.06831E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11498E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15268E1
os_ea1_imon=2.35427E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63791E1
os_ef1bup_imon=3.06224E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22652E0
cs_ionrep_imon=1.20012E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91999E2
cs_nozzle_imon=1.93379E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01709E1
cs_anode1_imon=2.97691E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99966E1
olens4_imon=4.18963E-9
tplens_vset=0.0E0
tplens_vmon=-1.68948E0
tplens_imon=-2.81599E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99342E1
iondef3_imon=8.70305E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98609E1
iondef2_imon=9.2309E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03128E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=9.61685E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24898E0
ionrepsh_imon=1.75005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34138E1
lens5b_imon=2.1757E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74551E1
cs_ef2b_imon=3.13185E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23151E0
os_ea2_imon=-7.196E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06182E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71464E1
cs_ef2a_imon=3.14832E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06017E0
os_ef2alow_imon=-2.54437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.39424E-1
os_ef2bup_imon=-5.16418E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.42901E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24785E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58245E1
iondef1_imon=5.3076E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50124E1
iondef4_imon=5.50966E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.53694E-8
olens1_vset=0.0E0
olens1_vmon=1.7643E-3
olens1_imon=1.2429E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20686E0
cs_ionaccel_imon=-1.84451E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.47252E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56474E1
einzel_imon=7.85626E-6
window_vset=0.0E0
window_vmon=2.79973E-1
window_imon=-8.1156E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82718E2
mask1_imon=2.39047E-4
mask2_vset=0.0E0
mask2_vmon=-1.87068E1
mask2_imon=-5.38351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=6.99971E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.38202E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.31043E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44934E0
defgridb_imon=6.13868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33437E1
os_fil1_imon=9.42844E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07516E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65423E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.95396E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6317E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15705E-2
os_fil2_imon=-2.73735E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90968E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60191E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36106E-1
cs_fil2_imon=-2.35686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26097E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22779E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.41611E-2
chamber_ion_pmon=2.23392E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36731E-1
res40_imon=-2.49946E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.765E3	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80043E1	-8.82149E-4	-8.80016E1	5.48363E-4	4.45843E-3	9.67026E-2	1.58281E1	-1.98248E1	-1.99744E1	1.50226E1	2.23755E-9	2.51874E-3	2.51874E-3	6.31321E-3	2.41337E-2
2.0E0	3.977E3	8.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80044E1	-1.07288E-3	-8.80015E1	7.39098E-4	4.29153E-3	9.64165E-2	1.58436E1	-1.98392E1	-1.99481E1	1.50409E1	2.24109E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.40708E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80048E1	-1.0252E-3	-8.80016E1	6.4373E-4	4.76837E-3	9.61304E-2	1.58038E1	-1.98383E1	-1.99817E1	1.49943E1	2.23665E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.42121E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80048E1	-1.3113E-3	-8.80016E1	7.62939E-4	4.69685E-3	9.62496E-2	1.58026E1	-1.98588E1	-1.99432E1	1.50496E1	2.2365E-9	2.51956E-3	2.51956E-3	6.31251E-3	2.40233E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80044E1	-1.12057E-3	-8.80016E1	6.67572E-4	4.8399E-3	9.62734E-2	1.58113E1	-1.98693E1	-1.99486E1	1.50569E1	2.24315E-9	2.52749E-3	2.52749E-3	6.30171E-3	2.41409E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80045E1	-1.21593E-3	-8.80015E1	7.39098E-4	5.00679E-3	9.59158E-2	1.58675E1	-1.98611E1	-1.99455E1	1.50352E1	2.23869E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.41199E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80048E1	-1.09673E-3	-8.80018E1	6.4373E-4	4.8399E-3	9.61542E-2	1.57801E1	-1.98873E1	-1.9936E1	1.50154E1	2.23818E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.40918E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80044E1	-7.39098E-4	-8.80016E1	5.96046E-4	4.86374E-3	9.60112E-2	1.58185E1	-1.98569E1	-1.99641E1	1.50743E1	2.2372E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.40918E-2
1.2E1	1.21E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80044E1	-1.16825E-3	-8.80018E1	7.86781E-4	4.88758E-3	9.61542E-2	1.57943E1	-1.98405E1	-1.99768E1	1.50052E1	2.23818E-9	2.52977E-3	2.52977E-3	6.34037E-3	2.41337E-2
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80043E1	-1.0252E-3	-8.80018E1	5.72205E-4	4.74453E-3	9.63449E-2	1.58221E1	-1.98975E1	-1.99576E1	1.50647E1	2.2372E-9	2.51116E-3	2.51116E-3	6.29645E-3	2.41546E-2
1.4E1	1.37E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80044E1	-8.82149E-4	-8.80018E1	7.62939E-4	4.60148E-3	9.62973E-2	1.58216E1	-1.98392E1	-1.9961E1	1.50378E1	2.23595E-9	2.51787E-3	2.51787E-3	6.32402E-3	2.41301E-2
1.5E1	1.38E2	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80043E1	-1.07288E-3	-8.80015E1	9.05991E-4	4.48227E-3	9.62734E-2	1.58173E1	-1.98612E1	-1.99426E1	1.50184E1					
1.6E1	4.4E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80043E1	-9.29832E-4	-8.80018E1	1.09673E-3	4.45843E-3	9.62734E-2	1.58263E1	-1.98501E1	-1.99642E1	1.51464E1	2.24792E-9	2.52977E-3	2.52977E-3	6.32386E-3	2.41756E-2
1.7E1	1.256E3	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80045E1	-1.14441E-3	-8.8002E1	9.77516E-4	4.93526E-3	9.63449E-2	1.58329E1	-1.98116E1	-1.99822E1	1.50208E1	2.2426E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.41479E-2
1.8E1	5.391E3	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80043E1	-1.00136E-3	-8.80017E1	8.34465E-4	4.64916E-3	9.60588E-2	1.58103E1	-1.98322E1	-1.99254E1	1.50406E1	2.23869E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.40583E-2
1.9E1	2.611E3	6.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80044E1	-8.82149E-4	-8.80016E1	6.67572E-4	4.55379E-3	9.64403E-2	1.58083E1	-1.98362E1	-1.99834E1	1.50322E1	2.2372E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.41546E-2
2.0E1	4.5E1	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80042E1	-7.15256E-4	-8.80015E1	6.19888E-4	4.72069E-3	9.66549E-2	1.58215E1	-1.98837E1	-1.99336E1	1.50103E1	2.23773E-9	2.51417E-3	2.51417E-3	6.29665E-3	2.41199E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80043E1	-8.10623E-4	-8.80017E1	7.39098E-4	4.93526E-3	9.61781E-2	1.58179E1	-1.98942E1	-1.9965E1	1.50124E1	2.24304E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.40708E-2
2.2E1	2.4E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80043E1	-1.09673E-3	-8.80019E1	6.67572E-4	4.74453E-3	9.62257E-2	1.58095E1	-1.98513E1	-1.99438E1	1.50358E1	2.23526E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.41546E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80041E1	-1.04904E-3	-8.80018E1	9.53674E-4	5.126E-3	9.63688E-2	1.58245E1	-1.98609E1	-1.99342E1	1.50124E1	2.23392E-9	2.51954E-3	2.51954E-3	6.29128E-3	2.41611E-2