[Scan]
initial_time=2016-01-15T20:24:06
final_time=2016-01-15T20:24:25
ip_count=19
run=1023
dataset=1
scan=21
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.80715E-6
ql1_vset=
ql1_vmon=-8.80042E1
ql1_imon=-7.92921E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.21076E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.88093E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.35412E-8
mult1=-1.171E-8
mult2=-2.96235E-9
rf_tmon=-4.9873E-3
rf_agc=3.24832E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=6.3318E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66055E0
bslens_imon=2.31533E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19933E1
lens5a_imon=1.99089E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12549E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54185E1
cs_ef1b_imon=2.87174E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02411E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04211E1
cs_ea1_imon=2.58297E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98268E0
lens1_imon=1.50728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64802E1
os_ef1alow_imon=2.97466E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0407E1
cs_ea2_imon=1.52038E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84045E1
cs_ef1a_imon=2.94547E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.07142E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.2812E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1511E1
os_ea1_imon=2.36112E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63698E1
os_ef1bup_imon=3.08132E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23128E0
cs_ionrep_imon=1.19385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91973E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01834E1
cs_anode1_imon=2.97279E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.18155E-9
tplens_vset=0.0E0
tplens_vmon=-1.65551E0
tplens_imon=-4.10011E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99638E1
iondef3_imon=8.75038E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98192E1
iondef2_imon=9.24623E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03116E2
lens6_imon=2.98287E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=9.76872E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29128E0
ionrepsh_imon=1.75471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33854E1
lens5b_imon=2.17968E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74551E1
cs_ef2b_imon=3.14008E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3023E0
os_ea2_imon=-8.87497E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71551E1
cs_ef2a_imon=3.16516E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06516E0
os_ef2alow_imon=-2.49946E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88899E-1
os_ef2bup_imon=-5.15295E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.4204E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.30002E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01952E1
cs_anode2_imon=2.23438E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58339E1
iondef1_imon=5.25004E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50172E1
iondef4_imon=5.2851E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27957E1
olens3_imon=2.53227E-8
olens1_vset=0.0E0
olens1_vmon=1.93119E-3
olens1_imon=1.24538E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15322E0
cs_ionaccel_imon=-1.97176E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02126E2
cs_ionfocb_imon=1.47541E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5658E1
einzel_imon=7.79263E-6
window_vset=0.0E0
window_vmon=2.5627E-1
window_imon=-8.71441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82733E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86999E1
mask2_imon=-6.20688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.45015E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.29316E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.92124E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.14002E0
defgridb_imon=5.90015E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33441E1
os_fil1_imon=9.42289E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06986E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64997E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.9602E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62141E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21315E-2
os_fil2_imon=-2.65627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70334E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34761E-1
cs_fil2_imon=-2.36933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22866E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.40378E-2
chamber_ion_pmon=2.23964E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.42345E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.755E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80043E1	-7.15256E-4	-8.80013E1	6.4373E-4	4.673E-3	9.64165E-2	1.58131E1	-1.9844E1	-1.99906E1	1.50352E1	2.2372E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.41546E-2
2.0E0	3.967E3	5.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80045E1	-1.19209E-3	-8.80016E1	5.72205E-4	4.50611E-3	9.59635E-2	1.58419E1	-1.98813E1	-1.99684E1	1.50359E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.41546E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80047E1	-6.91414E-4	-8.80013E1	7.62939E-4	4.95911E-3	9.59873E-2	1.58156E1	-1.98647E1	-1.99667E1	1.50514E1	2.23915E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.41546E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80045E1	-8.58307E-4	-8.80016E1	4.52995E-4	4.50611E-3	9.5892E-2	1.5848E1	-1.98903E1	-1.99612E1	1.50094E1	2.23964E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.42024E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80046E1	-1.07288E-3	-8.80015E1	6.91414E-4	4.55379E-3	9.60588E-2	1.58215E1	-1.98555E1	-1.99696E1	1.49956E1	2.23915E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.41756E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80045E1	-8.58307E-4	-8.80013E1	9.53674E-4	4.36306E-3	9.59873E-2	1.58215E1	-1.98861E1	-1.99594E1	1.50016E1	2.24499E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.41337E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80046E1	-8.82149E-4	-8.80014E1	7.86781E-4	4.57764E-3	9.59635E-2	1.58191E1	-1.98434E1	-1.99708E1	1.50749E1	2.23526E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.41127E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80045E1	-5.96046E-4	-8.80015E1	8.82149E-4	4.72069E-3	9.60588E-2	1.57831E1	-1.98693E1	-1.99167E1	1.50268E1	2.23963E-9	2.51804E-3	2.51804E-3	6.31858E-3	2.41693E-2
1.2E1	1.38E2	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80049E1	-6.91414E-4	-8.80015E1	8.58307E-4	4.48227E-3	9.59635E-2	1.5875E1	-1.98573E1	-1.99252E1	1.50208E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.41405E-2
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80049E1	-5.24521E-4	-8.80012E1	7.39098E-4	4.43459E-3	9.62973E-2	1.58816E1	-1.98501E1	-1.98999E1	1.50707E1	2.23915E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.41966E-2
1.4E1	1.6E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80046E1	-6.4373E-4	-8.80013E1	6.4373E-4	4.52995E-3	9.64165E-2	1.58286E1	-1.98558E1	-1.99537E1	1.50142E1	2.23818E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.41127E-2
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80044E1	-9.05991E-4	-8.80012E1	9.77516E-4	5.14984E-3	9.61781E-2	1.58371E1	-1.98603E1	-2.00033E1	1.50238E1	2.23818E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.41127E-2
1.6E1	4.68E2	2.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80047E1	-9.05991E-4	-8.80012E1	7.62939E-4	4.98295E-3	9.64642E-2	1.58053E1	-1.9844E1	-1.99828E1	1.50306E1	2.23526E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.40708E-2
1.7E1	1.268E3	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80047E1	-6.4373E-4	-8.80013E1	9.05991E-4	4.86374E-3	9.63449E-2	1.58257E1	-1.98579E1	-1.99546E1	1.49885E1	2.23623E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.39873E-2
1.8E1	5.434E3	6.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80046E1	-6.19888E-4	-8.80013E1	7.62939E-4	4.673E-3	9.60827E-2	1.58272E1	-1.98481E1	-1.99686E1	1.50603E1	2.23678E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.41199E-2
1.9E1	2.593E3	1.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80043E1	-8.10623E-4	-8.80014E1	8.82149E-4	4.81606E-3	9.61542E-2	1.58534E1	-1.98142E1	-1.9958E1	1.49705E1	2.23825E-9	2.52342E-3	2.52342E-3	6.3074E-3	2.41269E-2
2.0E1	4.0E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80043E1	-7.15256E-4	-8.80015E1	7.39098E-4	4.45843E-3	9.60588E-2	1.58419E1	-1.97948E1	-2.00081E1	1.50154E1	2.23858E-9	2.52338E-3	2.52338E-3	6.32483E-3	2.41559E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80043E1	-6.67572E-4	-8.80013E1	6.91414E-4	4.57764E-3	9.61304E-2	1.58469E1	-1.989E1	-1.9926E1	1.5013E1	2.24402E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.41546E-2
2.2E1	1.4E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80043E1	-3.8147E-4	-8.80012E1	6.67572E-4	4.55379E-3	9.61304E-2	1.58504E1	-1.98567E1	-1.99858E1	1.50286E1	2.23526E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.42387E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80042E1	-4.52995E-4	-8.80014E1	8.34465E-4	4.64916E-3	9.62734E-2	1.58339E1	-1.98192E1	-1.99638E1	1.50172E1	2.23964E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.40378E-2