[Scan]
initial_time=2016-01-15T20:24:32
final_time=2016-01-15T20:24:52
ip_count=19
run=1023
dataset=1
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.7814E-6
ql1_vset=
ql1_vmon=-8.80048E1
ql1_imon=-7.38728E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.17626E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.79653E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=1.35728E-8
mult1=-1.1178E-8
mult2=-2.84672E-9
rf_tmon=-7.22892E-3
rf_agc=3.13919E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=6.00851E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64235E0
bslens_imon=2.12297E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19402E1
lens5a_imon=1.99675E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05016E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53162E1
cs_ef1b_imon=2.87735E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04797E1
cs_ea1_imon=2.59029E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95067E0
lens1_imon=1.46263E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65213E1
os_ef1alow_imon=2.98215E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03652E1
cs_ea2_imon=1.47993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84525E1
cs_ef1a_imon=2.93087E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=1.06864E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11261E1
os_restr1_imon=4.28007E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15128E1
os_ea1_imon=2.36356E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63804E1
os_ef1bup_imon=3.08881E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20502E0
cs_ionrep_imon=1.1967E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93527E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01865E1
cs_anode1_imon=2.97167E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9997E1
olens4_imon=4.16536E-9
tplens_vset=0.0E0
tplens_vmon=-1.70696E0
tplens_imon=-4.68779E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99113E1
iondef3_imon=8.62715E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98476E1
iondef2_imon=9.25696E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03086E2
lens6_imon=2.9838E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=9.68087E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29027E0
ionrepsh_imon=1.75742E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34135E1
lens5b_imon=2.16775E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74688E1
cs_ef2b_imon=3.14008E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.22729E0
os_ea2_imon=-5.52753E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00581E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.00965E0
os_ef2alow_imon=-2.61174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95137E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.41179E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01634E1
cs_anode2_imon=2.23737E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5815E1
iondef1_imon=5.2262E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50539E1
iondef4_imon=5.44229E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27954E1
olens3_imon=2.53269E-8
olens1_vset=0.0E0
olens1_vmon=1.83582E-3
olens1_imon=1.24214E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17131E0
cs_ionaccel_imon=-1.88568E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.47488E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56698E1
einzel_imon=7.91988E-6
window_vset=0.0E0
window_vmon=2.54399E-1
window_imon=-7.70391E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82748E2
mask1_imon=2.39245E-4
mask2_vset=0.0E0
mask2_vmon=-1.86818E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.56984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.37512E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.21868E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50329E0
defgridb_imon=6.15755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33414E1
os_fil1_imon=9.41472E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08583E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64988E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.96819E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62428E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67208E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07143E-2
os_fil2_imon=-2.84963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88473E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69167E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.26329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.4285E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22784E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.41907E-2
chamber_ion_pmon=2.23468E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09285E-1
res40_imon=-2.48824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.777E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80043E1	-6.19888E-4	-8.80018E1	6.91414E-4	4.36306E-3	9.61065E-2	1.58191E1	-1.98399E1	-1.9975E1	1.50547E1	2.23508E-9	2.52179E-3	2.52179E-3	6.29035E-3	2.41192E-2
2.0E0	4.039E3	4.0E0	3.16E2	1.6E2	-7.23964E-2	-8.8004E1	-6.67572E-4	-8.80016E1	6.4373E-4	4.33922E-3	9.62973E-2	1.5862E1	-1.98716E1	-1.99139E1	1.49979E1	2.23487E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.42024E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80042E1	-5.48363E-4	-8.80013E1	9.53674E-4	4.50611E-3	9.63449E-2	1.58185E1	-1.98688E1	-1.99278E1	1.50148E1	2.24062E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80043E1	-6.19888E-4	-8.80018E1	6.91414E-4	4.81606E-3	9.60827E-2	1.58185E1	-1.98316E1	-1.99473E1	1.50039E1	2.23583E-9	2.52169E-3	2.52169E-3	6.28056E-3	2.40788E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80047E1	-8.10623E-4	-8.80017E1	3.57628E-4	4.60148E-3	9.63449E-2	1.5816E1	-1.98588E1	-1.99689E1	1.50238E1	2.2372E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.40499E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80044E1	-8.82149E-4	-8.80012E1	5.00679E-4	4.57764E-3	9.61781E-2	1.58191E1	-1.98218E1	-1.99402E1	1.50425E1	2.24012E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.40499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80044E1	-8.10623E-4	-8.80014E1	6.4373E-4	4.50611E-3	9.62496E-2	1.58504E1	-1.98688E1	-1.99355E1	1.50226E1	2.24304E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.41337E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80046E1	-7.15256E-4	-8.80015E1	6.91414E-4	4.26769E-3	9.62496E-2	1.58335E1	-1.98122E1	-1.99973E1	1.49818E1	2.23487E-9	2.51954E-3	2.51954E-3	6.35059E-3	2.41405E-2
1.2E1	1.24E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80047E1	-1.07288E-3	-8.80015E1	8.58307E-4	4.45843E-3	9.63688E-2	1.58203E1	-1.98719E1	-1.99374E1	1.50805E1	2.23818E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.40082E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80045E1	-7.86781E-4	-8.80015E1	9.53674E-4	4.62532E-3	9.63211E-2	1.58115E1	-1.986E1	-1.99891E1	1.49866E1	2.23198E-9	2.51956E-3	2.51956E-3	6.3023E-3	2.41012E-2
1.4E1	1.75E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80043E1	-8.58307E-4	-8.80015E1	5.96046E-4	4.673E-3	9.61304E-2	1.57921E1	-1.98513E1	-1.99822E1	1.50058E1	2.23526E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.41756E-2
1.5E1	1.38E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80046E1	-9.29832E-4	-8.80016E1	6.4373E-4	4.86374E-3	9.61304E-2	1.58038E1	-1.98667E1	-1.99185E1	1.50396E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.40499E-2
1.6E1	4.9E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80046E1	-7.62939E-4	-8.80014E1	7.15256E-4	4.64916E-3	9.61304E-2	1.58369E1	-1.98612E1	-1.99463E1	1.50347E1	2.24012E-9	2.52466E-3	2.52466E-3	6.33297E-3	2.41597E-2
1.7E1	1.423E3	4.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80046E1	-7.86781E-4	-8.80014E1	5.00679E-4	4.69685E-3	9.61542E-2	1.58041E1	-1.98194E1	-2.00267E1	1.50479E1	2.23863E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.41479E-2
1.8E1	5.471E3	1.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80048E1	-7.62939E-4	-8.80014E1	9.53674E-4	4.14848E-3	9.64165E-2	1.58468E1	-1.9844E1	-1.99456E1	1.50857E1	2.23818E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.40918E-2
1.9E1	2.598E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80045E1	-8.34465E-4	-8.80013E1	7.86781E-4	4.64916E-3	9.6488E-2	1.58356E1	-1.9844E1	-1.9972E1	1.5041E1	2.2372E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.41337E-2
2.0E1	4.5E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80045E1	-7.62939E-4	-8.80015E1	6.19888E-4	4.69685E-3	9.61065E-2	1.58546E1	-1.98819E1	-1.9942E1	1.4995E1	2.23818E-9	2.51771E-3	2.51771E-3	6.28552E-3	2.41337E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80046E1	-7.39098E-4	-8.80014E1	5.48363E-4	4.60148E-3	9.60827E-2	1.58634E1	-1.9821E1	-1.99644E1	1.50112E1	2.2406E-9	2.51632E-3	2.51632E-3	6.33436E-3	2.40583E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80044E1	-5.96046E-4	-8.80012E1	6.4373E-4	4.673E-3	9.60827E-2	1.58185E1	-1.98441E1	-1.9923E1	1.50286E1	2.23964E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.40583E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80048E1	-6.4373E-4	-8.80011E1	6.19888E-4	4.81606E-3	9.63449E-2	1.5815E1	-1.98476E1	-1.99113E1	1.50539E1	2.23468E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.41907E-2