[Scan]
initial_time=2016-01-15T20:25:02
final_time=2016-01-15T20:25:30
ip_count=19
run=1023
dataset=1
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.81263E-6
ql1_vset=
ql1_vmon=-8.80042E1
ql1_imon=-7.8243E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.2404E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.99902E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.35602E-8
mult1=-9.40478E-9
mult2=-2.61155E-9
rf_tmon=-3.135E-3
rf_agc=3.39462E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=6.08802E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53948E1
cs_ef1b_imon=2.84966E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.0197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05198E1
cs_ea1_imon=2.54977E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01192E0
lens1_imon=1.35893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64565E1
os_ef1alow_imon=2.97129E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.54795E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84619E1
cs_ef1a_imon=2.94435E-5
olens2_vset=0.0E0
olens2_vmon=6.4373E-4
olens2_imon=1.06948E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.27034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.37421E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63941E1
os_ef1bup_imon=3.07197E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20824E0
cs_ionrep_imon=1.22315E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91988E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01996E1
cs_anode1_imon=2.96006E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99966E1
olens4_imon=4.22727E-9
tplens_vset=0.0E0
tplens_vmon=-1.65465E0
tplens_imon=-5.08433E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99709E1
iondef3_imon=8.65175E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98647E1
iondef2_imon=8.99062E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03128E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=9.65869E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.74623E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.11089E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30317E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.1326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04707E0
os_ef2alow_imon=-2.53689E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87028E-1
os_ef2bup_imon=-5.31014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11535E1
os_restr2_imon=3.41179E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.3137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01715E1
cs_anode2_imon=2.25421E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58203E1
iondef1_imon=4.94586E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49896E1
iondef4_imon=5.34124E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.53274E-8
olens1_vset=0.0E0
olens1_vmon=1.64509E-3
olens1_imon=1.24355E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15384E0
cs_ionaccel_imon=-1.90065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47398E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56374E1
einzel_imon=7.51942E-6
window_vset=0.0E0
window_vmon=2.63755E-1
window_imon=-7.36708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82719E2
mask1_imon=2.39331E-4
mask2_vset=0.0E0
mask2_vmon=-1.86937E1
mask2_imon=-5.23381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.05115E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.69066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50166E3
multb_neg_imon=6.91056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63916E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33424E1
os_fil1_imon=9.41354E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07392E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65037E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30925E1
cs_fil1_imon=9.9622E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62827E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.72488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85354E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88866E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37719E-1
cs_fil2_imon=-2.44419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.80671E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22981E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.40974E-2
chamber_ion_pmon=2.23709E-9
chamber_cvt_pmon=2.52293E-3
foreline_cvt_pmon=2.52293E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.35681E-1
res40_imon=-2.71279E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.728E3	2.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80048E1	-7.86781E-4	-8.80012E1	6.91414E-4	4.673E-3	9.63449E-2	1.58269E1	-1.98525E1	-1.99582E1	1.50298E1	2.2372E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.41337E-2
2.0E0	3.963E3	4.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80044E1	-1.19209E-3	-8.80015E1	8.10623E-4	4.673E-3	9.63926E-2	1.58613E1	-1.9849E1	-1.99653E1	1.50485E1	2.23041E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.41337E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80046E1	-1.16825E-3	-8.80016E1	7.62939E-4	5.00679E-3	9.63688E-2	1.5782E1	-1.98664E1	-1.99585E1	1.49845E1	2.23863E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.41052E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.12368E-2	-8.80044E1	-6.19888E-4	-8.80018E1	1.09673E-3	4.72069E-3	9.63211E-2	1.58329E1	-1.9838E1	-1.99594E1	1.49765E1	2.23678E-9	2.51632E-3	2.51632E-3	6.34518E-3	2.41817E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80044E1	-8.34465E-4	-8.80015E1	1.09673E-3	4.72069E-3	9.61781E-2	1.58047E1	-1.98428E1	-1.99432E1	1.50346E1	2.23764E-9	2.51581E-3	2.51581E-3	6.31858E-3	2.41479E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80049E1	-8.58307E-4	-8.80015E1	7.15256E-4	4.88758E-3	9.62734E-2	1.58563E1	-1.97962E1	-1.99484E1	1.503E1	2.23773E-9	2.50989E-3	2.50989E-3	6.31817E-3	2.41817E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8005E1	-6.4373E-4	-8.80013E1	1.00136E-3	4.48227E-3	9.64165E-2	1.58209E1	-1.98342E1	-1.99402E1	1.5041E1	2.23773E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.40994E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80042E1	-1.0252E-3	-8.80013E1	9.53674E-4	4.79221E-3	9.62734E-2	1.58572E1	-1.9804E1	-1.99637E1	1.5054E1	2.23825E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.41067E-2
1.2E1	1.3E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80042E1	-9.53674E-4	-8.80014E1	9.29832E-4	4.74453E-3	9.64642E-2	1.57772E1	-1.98275E1	-1.9965E1	1.50052E1	2.23755E-9	2.52106E-3	2.52106E-3	6.32483E-3	2.40672E-2
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80042E1	-1.00136E-3	-8.80016E1	8.82149E-4	4.72069E-3	9.65357E-2	1.58481E1	-1.98475E1	-1.99384E1	1.50074E1	2.2406E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.41199E-2
1.4E1	1.62E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80042E1	-5.48363E-4	-8.80013E1	9.29832E-4	4.3869E-3	9.61781E-2	1.58418E1	-1.98979E1	-1.99334E1	1.49949E1	2.2345E-9	2.52025E-3	2.52025E-3	6.34982E-3	2.4006E-2
1.5E1	1.14E2	1.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80043E1	-7.86781E-4	-8.80012E1	9.53674E-4	4.52995E-3	9.6488E-2	1.58327E1	-1.98275E1	-1.99355E1	1.50659E1	2.2327E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.41265E-2
1.6E1	4.25E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80041E1	-9.77516E-4	-8.80011E1	1.00136E-3	4.98295E-3	9.62496E-2	1.57915E1	-1.98446E1	-1.99468E1	1.50232E1	2.23202E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.41611E-2
1.7E1	1.331E3	3.0E0	6.87E2	4.7E2	-7.25507E-2	-8.8004E1	-8.82149E-4	-8.80015E1	6.67572E-4	4.93526E-3	9.64403E-2	1.58269E1	-1.98483E1	-1.99486E1	1.50382E1	2.23963E-9	2.52585E-3	2.52585E-3	6.31858E-3	2.40839E-2
1.8E1	5.525E3	8.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80041E1	-7.62939E-4	-8.80015E1	9.05991E-4	4.57764E-3	9.62496E-2	1.5848E1	-1.98969E1	-1.99582E1	1.50503E1	2.2406E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.41199E-2
1.9E1	2.534E3	1.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80041E1	-5.48363E-4	-8.80015E1	8.58307E-4	4.673E-3	9.64642E-2	1.57975E1	-1.98308E1	-1.99949E1	1.50443E1	2.23332E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41651E-2
2.0E1	4.6E1	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80041E1	-5.48363E-4	-8.80014E1	5.72205E-4	4.93526E-3	9.61781E-2	1.58305E1	-1.9838E1	-1.99528E1	1.50851E1					
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80041E1	-5.00679E-4	-8.80016E1	5.00679E-4	4.62532E-3	9.63449E-2	1.58038E1	-1.98303E1	-1.99595E1	1.50248E1	2.24161E-9	2.52809E-3	2.52809E-3	6.3074E-3	2.41265E-2
2.2E1	2.0E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80042E1	-2.38419E-4	-8.80015E1	5.72205E-4	4.64916E-3	9.6488E-2	1.58007E1	-1.98294E1	-1.99102E1	1.50268E1	2.24284E-9	2.5165E-3	2.5165E-3	6.32784E-3	2.41012E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80042E1	-5.96046E-4	-8.80015E1	5.24521E-4	4.57764E-3	9.61065E-2	1.58203E1	-1.98647E1	-1.99709E1	1.49896E1	2.23709E-9	2.52293E-3	2.52293E-3	6.3074E-3	2.40974E-2