[Scan]
initial_time=2016-01-15T20:25:41
final_time=2016-01-15T20:26:09
ip_count=19
run=1023
dataset=1
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=N2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.79658E-6
ql1_vset=
ql1_vmon=-8.80042E1
ql1_imon=-7.78663E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.17576E-9
ql3_vset=
ql3_vmon=-8.80017E1
ql3_imon=-2.89412E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.35641E-8
mult1=-9.13836E-9
mult2=-2.85035E-9
rf_tmon=-4.74675E-3
rf_agc=3.20238E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.90074E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67305E0
bslens_imon=2.48773E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1989E1
lens5a_imon=2.0093E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12557E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53128E1
cs_ef1b_imon=2.84791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02011E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05062E1
cs_ea1_imon=2.5714E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96896E0
lens1_imon=1.63606E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65183E1
os_ef1alow_imon=2.99874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0367E1
cs_ea2_imon=1.47802E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84617E1
cs_ef1a_imon=2.94725E-5
olens2_vset=0.0E0
olens2_vmon=1.00136E-3
olens2_imon=1.0649E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11137E1
os_restr1_imon=4.24548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15387E1
os_ea1_imon=2.36862E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64014E1
os_ef1bup_imon=3.09969E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20681E0
cs_ionrep_imon=1.20467E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.93347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0245E1
cs_anode1_imon=2.99103E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99971E1
olens4_imon=4.22173E-9
tplens_vset=0.0E0
tplens_vmon=-1.69754E0
tplens_imon=-1.93E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99246E1
iondef3_imon=8.6887E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98615E1
iondef2_imon=9.13887E-6
lens6_vset=-6.0E2
lens6_vmon=-6.03123E2
lens6_imon=2.98147E-4
ql6_vset=1.0E-1
ql6_vmon=9.62734E-2
ql6_imon=9.8716E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28387E0
ionrepsh_imon=1.76312E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33517E1
lens5b_imon=2.19423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74697E1
cs_ef2b_imon=3.12443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.23182E0
os_ea2_imon=-6.5128E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06227E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71197E1
cs_ef2a_imon=3.16132E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07213E0
os_ef2alow_imon=-2.40777E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83909E-1
os_ef2bup_imon=-5.18508E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30172E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01599E1
cs_anode2_imon=2.23772E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57879E1
iondef1_imon=5.46858E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50467E1
iondef4_imon=5.36869E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.53257E-8
olens1_vset=0.0E0
olens1_vmon=1.64509E-3
olens1_imon=1.24543E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.21326E0
cs_ionaccel_imon=-1.51984E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55973E1
einzel_imon=7.68379E-6
window_vset=0.0E0
window_vmon=2.06005E-1
window_imon=-4.85955E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8277E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86216E1
mask2_imon=-7.81931E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=6.98942E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.17598E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40796E0
defgridb_imon=5.82953E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33451E1
os_fil1_imon=9.43035E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08174E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64925E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.97169E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63169E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66858E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.54659E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06198E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85289E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3708E-1
cs_fil2_imon=-2.86419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.53765E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40045E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.36637E-1
res40_imon=-2.44426E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.767E3	3.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80044E1	-7.39098E-4	-8.80016E1	7.86781E-4	4.64916E-3	9.63926E-2	1.58412E1	-1.98127E1	-1.99645E1	1.5023E1	2.24012E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.4063E-2
2.0E0	3.846E3	5.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80044E1	-1.04904E-3	-8.80017E1	1.04904E-3	4.52995E-3	9.63688E-2	1.58915E1	-1.98541E1	-1.99109E1	1.50016E1	2.23731E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.40865E-2
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80046E1	-8.34465E-4	-8.80017E1	1.00136E-3	4.3869E-3	9.61304E-2	1.58159E1	-1.98164E1	-1.99523E1	1.50211E1	2.23709E-9	2.51498E-3	2.51498E-3	6.3131E-3	2.42282E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80045E1	-1.0252E-3	-8.80019E1	8.58307E-4	4.50611E-3	9.62496E-2	1.58604E1	-1.98378E1	-1.99898E1	1.50665E1	2.23701E-9	2.52224E-3	2.52224E-3	6.34261E-3	2.41849E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80047E1	-1.26362E-3	-8.80017E1	7.86781E-4	4.60148E-3	9.61304E-2	1.58058E1	-1.98591E1	-1.99344E1	1.50387E1	2.23858E-9	2.51758E-3	2.51758E-3	6.31902E-3	2.41115E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80049E1	-1.21593E-3	-8.80015E1	1.14441E-3	4.81606E-3	9.63449E-2	1.58141E1	-1.98266E1	-1.99732E1	1.50921E1	2.2345E-9	2.51498E-3	2.51498E-3	6.31269E-3	2.40664E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80048E1	-1.09673E-3	-8.80014E1	1.07288E-3	4.88758E-3	9.63926E-2	1.58103E1	-1.98493E1	-1.99561E1	1.50219E1	2.23709E-9	2.51384E-3	2.51384E-3	6.33592E-3	2.41192E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80048E1	-1.12057E-3	-8.80014E1	9.05991E-4	5.00679E-3	9.66311E-2	1.58383E1	-1.9802E1	-1.9987E1	1.5059E1	2.23392E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.41199E-2
1.2E1	1.36E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80047E1	-7.86781E-4	-8.80016E1	9.29832E-4	4.74453E-3	9.62257E-2	1.58245E1	-1.98555E1	-1.99498E1	1.50375E1	2.2372E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.41966E-2
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80046E1	-8.10623E-4	-8.80017E1	1.00136E-3	4.69685E-3	9.62019E-2	1.58474E1	-1.9831E1	-1.99573E1	1.50467E1	2.23818E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.40291E-2
1.4E1	1.42E2	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80046E1	-1.04904E-3	-8.80014E1	9.05991E-4	4.36306E-3	9.63211E-2	1.57831E1	-1.97936E1	-1.99384E1	1.50154E1	2.23869E-9	2.52815E-3	2.52815E-3	6.31278E-3	2.42024E-2
1.5E1	1.34E2	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80043E1	-9.05991E-4	-8.80013E1	9.77516E-4	4.76837E-3	9.61065E-2	1.5864E1	-1.98924E1	-1.99343E1	1.50136E1	2.23915E-9	2.51334E-3	2.51334E-3	6.30192E-3	2.40708E-2
1.6E1	4.42E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80045E1	-9.05991E-4	-8.80015E1	6.91414E-4	4.29153E-3	9.62019E-2	1.58498E1	-1.9799E1	-1.99714E1	1.50322E1	2.2406E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.40994E-2
1.7E1	1.349E3	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80046E1	-1.12057E-3	-8.80013E1	7.86781E-4	4.74453E-3	9.5892E-2	1.58774E1	-1.98927E1	-1.99234E1	1.5034E1	2.23764E-9	2.51915E-3	2.51915E-3	6.29624E-3	2.40839E-2
1.8E1	5.358E3	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80046E1	-7.15256E-4	-8.80012E1	4.52995E-4	4.52995E-3	9.64165E-2	1.5854E1	-1.98657E1	-1.99426E1	1.50412E1	2.2406E-9	2.51632E-3	2.51632E-3	6.35059E-3	2.41199E-2
1.9E1	2.625E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80044E1	-5.96046E-4	-8.80013E1	8.34465E-4	4.72069E-3	9.62496E-2	1.58407E1	-1.98969E1	-1.99961E1	1.50178E1	2.24207E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.40918E-2
2.0E1	3.8E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80043E1	-7.86781E-4	-8.8001E1	5.72205E-4	4.57764E-3	9.65118E-2	1.58545E1	-1.98275E1	-1.99685E1	1.50455E1	2.2372E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.41127E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80044E1	-5.96046E-4	-8.80015E1	9.77516E-4	4.95911E-3	9.62734E-2	1.5802E1	-1.97756E1	-1.99537E1	1.50431E1	2.23773E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.41611E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80042E1	-4.05312E-4	-8.80017E1	9.77516E-4	4.98295E-3	9.60588E-2	1.575E1	-1.9701E1	-1.99113E1	1.5031E1	2.23651E-9	2.52026E-3	2.52026E-3	6.32916E-3	2.41267E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80042E1	-4.76837E-4	-8.80017E1	7.86781E-4	4.673E-3	9.62734E-2	1.57879E1	-1.98615E1	-1.99246E1	1.50467E1